在本研究中, 我們設計並開發出一種創新的掃描探針顯微鏡(Scanning probe microscope, SPM) 探針，用以直接量測電性元件的電場作用力大小(庫倫力)。本技術是以一絕緣體探針在其尖端接合一顆帶固定同性電量奈米球後，此帶電奈米球可視為一點電荷，作用於帶電奈米球的作用力可以直接被絕緣體探針的懸臂樑量測出，其值就為所欲量測的電場作用力大小。
我們以氮化矽材質的原子力顯微鏡探針的探針尖端接合210 nm 的鐵氟龍駐極體奈米球，再以接觸式充電法對針尖上的奈米球充電，並進一步的對此帶電探針的儲元特性如帶電時間、電量穩定性皆進行確認與檢測。本研究並開發出一新穎的氮氣乾燥系統以利進行電場作用力的量測研究。
最後我們以此探針量測以20 nm 鈦(Ti)金屬作為黏著層，30 nm鍍金(Au)層作為電極的平板電容邊緣的電場作為量測測試。本技術在橫向(X-axis)與縱向(Z-axis)的空間解析度各為 250 nm 與 100 nm，可被量測的最小力量質為 50 pN.

This study designed and fabricated a novel microscopy probe for the direct measurement of the electrostatic field (mainly Coulombic force) of electrical samples. The probe is based in the principle of using an insulating cantilever for the attachment of a charged nanoparticle, such that the probe acts as a point charge applicable in the detection of electrostatic force.
We attached a single 210 nm Teflon nanoparticle (sTNP) to the vertex of a silicon nitride (Si3N4) atomic force microscope (AFM) tip and applied charge via contact electrification. We then verified the characteristics of the charged sTNP tip, such as charge duration and consistency, and fabricated an N2 drying system to facilitate the measurement of electrostatic field.
To demonstrate the efficacy of electrostatic force detection, we used the charged sTNP tip to measure the electrostatic field adjacent to a parallel plate condenser using 30 nm gold /20 nm Titanium as electrodes. The proposed technique provides resolution of 250 nm / 100 nm along the X / Z-axes and a measured minimum electrostatic force accurate to within 50 pN.

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