本論文的研究重點在於設計一個大出平面位移值、靜電式自然翹曲梳狀結構的微鏡面，並且受降低製程時誤差的影響，在製作大位移之微鏡面時，許多製程技術已經被發展，會因CMOS製程時所產生的誤差所影響，所設計之微鏡面元件，不但保留住大位移的優點，並且在翹曲結構的兩端設計一小彈簧以將低CMOS製程時所產生的誤差。
微鏡面的製作是採用TSMC所提供的0.35um 2P4M 標準CMOS製程，並自行進行兩道蝕刻步驟的後製程，完成元件的製作。此微結構有兩個驅動點的優點，當元件殘餘應力釋放完畢後，梳狀結構會產生自然翹曲，鏡面兩側的梳狀結構，其中一組梳狀結構會使鏡面向上轉動，另一組梳狀結構則是讓鏡面向下轉動，由兩組梳狀結構交互作用可使鏡面產生順時鐘或是逆時鐘的旋轉。
在實驗的過程中，我們定義鏡面的尺寸為500um × 500um由metal1-4組成，小彈簧的尺寸為4um × 21um由metal1及poly1組成，鏡面元件的自然共振頻率為727Hz，當輸入電壓為25V時，最大出平面的位移值為32um，小彈簧結構的設計，可成功將製程時所造成的誤差由30%降低為10%。

This paper presents a large displacement static- electricity curled-hinge comb micro-mirror with low process variability effect. Many fabrication techniques have been developed to produce mirrors in large displacement, which were influenced by the variation in CMOS MEMS process. We not only present a large electrically actuated out-of-plane displacement, but also additial a micro-spring on the side of the finger. It can decrease the influence of the variation in CMOS MEMS process.
The developed procedure is a standard TSMC 0.35um 2p4m process. The metal-1 spring has only thin layers of interconnect aluminum and dielectrics. The mirror was made by metal1~4. This micro-structure has advantage of these two anchor options. The comb drives curls up after it is released. One comb drives pull the mirror up, and another comb drives pull the mirror down. The two sets of each comb drive double the Y-axis torque and zero the net Z-axis force. The comb drives rotate the mirror clockwise, and rotate the mirror counterclockwise.
In the experimental stage, we have formulated a mirror for 500um x 500um and made by metal1~4. The micro-spring were used metal 1 and poly1 and its size was 4um x 21um. The nature frequency is 727Hz and the maximum displacement of this micromirror is 32um with 25V dc. The variation among each batch of production was reduced from 30% to 10%. The major contribution to the efficiency is due to the size of the micro-spring.

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