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研究生: 林剛逸
Kang-Yi Lin
論文名稱: 超晶格式電子傳輸結構應用於有機發光元件之探討
A Study on Superlattice Structure Applied to Organic Light Emitting Device
指導教授: 蕭高智
Kao-Chih Syao
口試委員:
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 光電工程研究所
Institute of Photonics Technologies
論文出版年: 2005
畢業學年度: 94
語文別: 中文
論文頁數: 89
中文關鍵詞: 有機發光元件電子傳輸層電子注入超晶格起始電壓熱退火
外文關鍵詞: OLED, electron transporting layer, electron injection, superlattice, turn-on voltage, thermal annealing
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  • 本論文探討有機發光元件中置入超晶格結構對元件的影響。目前有機發光元件多遇到載子不平衡的問題,亦即電洞注入數目凌駕於電子之上。有鑑於超晶格結構(Superlattice)在無機領域中已發展成熟,因此將此結構概念置入有機發光元件之電子傳輸層(Electron Transporting Layer)之中,期望產生電子注入增強效應,藉此達成載子平衡。在實驗初期發現,此超晶格結構雖可降低電阻,降低起始電壓,然而存在發光效率不佳之現象。結構設計上,我們採用了CuPc與Alq3交替成長的設計,並嘗試2~6 nm之結構厚度(4~12 nm為週期)。
    研究過程首先從單層Alq3、CuPc薄膜的表面特性開始,藉由原子力顯微鏡觀察薄膜表面平坦度,並嘗試以電漿表面處理之方式將其平坦化。之後產出一系列的有機超晶格結構多層薄膜,藉由歐傑電子能譜儀與二次離子質譜儀,檢測其交替式結構之實踐性。
    我們將之應用在有機發光二極體之結構上,以基本的ITO/ CuPc(15nm)/ NPB(40nm)/ Alq3(50nm)/ MgAg結構為對照組,將其中Alq3層做一系列的結構替換,測量元件之電特性(電流-電壓圖)與發光特性(頻譜圖與亮度-電流圖),並作系統化之評量。亦運用單載子元件之方式,以及應用在紅光元件之上,判讀其確實特性。最後我們以熱退火處理,試圖改善其特性並研究熱退火對超晶格結構元件之影響。


    Current OLEDs face the problem of unbalanced carrier injection caused by the poor electron mobility. Taking the tunneling concept of superlattice in inorganic semiconductors, we can apply it to the Electron Transporting Layer (ETL) for better electron injection and carrier balance. The fabricated devices, however, show an earlier turn-on voltage and lower device resistance with a huge trade-off of light efficiency. The performance degradation is discussed in the thesis.
    To begin with, AFM was used to characterize the surface roughness. Surface plasma treatment was investigated to smooth out the surface for process improvement. We also fabricated a series of superlattice structures and examined the thin film thicknesses by Auger Electron Spectrometer (Auger or AES) and Secondary Ion Mass Spectrometer (SIMS.)
    The superlattice structure comprises alternating 2 to 6 nm-per-layer CuPc/ Alq3 (4 to 12 nm-per-period). Basic design of “ITO/ CuPc(15nm)/ NPB(40nm)/ Alq3(50nm)/ Mg:Ag” was used for reference. The Alq3 layer was then modified with the superlattice in the experiment for comparison. The current-voltage (I-V) diagrams and luminance-current (L-I) diagram were measured and analyzed. We also applied them into single-injected devices and red emitting OLEDs. Same superlattice structures were also used on single-injected devices and red emitting OLEDs for the investigation of carrier injecting status. Finally, we proved that thermal annealing treatment improves the efficiency.

    第一章 序 論 1 1-1 研究背景 1 1-1.1 平面顯示器之發展現況 1 1-1.2 有機材料與有機電激發光二極體之發展 2 1-1.3 超晶格結構簡介 4 1-2 研究動機 5 1-3 論文架構 6 第二章 理論基礎與文獻回顧 7 2-1 有機發光元件理論 7 2-1.1 軌域理論與發光機制 7 2-1.2 元件結構與載子注入、傳輸機制 13 2-1.3 材料介紹 20 2-2 薄膜成長理論與薄膜量測儀器原理 23 2-2.1 真空熱蒸鍍(Thermal Evaporation)製程原理 23 2-2.2 電漿表面處理(Plasma surface treatment) 24 2-2.3 熱退火處理(Thermal Annealing Treatment) 25 2-2.4 原子力顯微鏡(Atomic Force Microscope, AFM) 25 2-2.5 X-ray繞射儀(X-Ray Diffraction, XRD) 25 2-2.6 歐傑電子能譜儀(Auger Electron Spectrometer, AES) 26 2-2.7 二次離子質譜儀(SIMS) 27 2-3 元件特性量測原理 27 2-3.1 頻譜 27 2-3.2 電壓-電流-光強度特性 28 2-4 OLED之研究趨勢 28 2-5 超晶格理論概述 33 第三章 實驗設計、儀器架設與實驗步驟 35 3-1 實驗設計 35 3-1.1 成膜品質與膜特性之實驗 35 3-1.2 發光元件之實驗 37 3-1.3 限制載子注入之元件實驗 40 3-1.4 紅光材料之實驗 42 3-1.5 超晶格有機發光元件之熱退火處理實驗 43 3-2 有機薄膜與有機發光元件之製備流程 44 3-2.1 ITO玻璃及基板的清洗流程 45 3-2.2 ITO玻璃之圖案定義(patterning) 47 3-2.3 樣品及元件之蒸鍍 48 3-2.4 真空系統流程 48 3-2.5 蒸鍍流程:以B0對照組結構為例 49 第四章 結果與討論 51 4-1 成膜品質與膜特性之量測 51 4-1.1 表面AFM圖形 51 4-1.2 XRD 53 4-1.3 Alq3螢光頻譜 55 4-1.4 超晶格結構之縱深分析 56 4-2 以Alq3發光之各結構元件量測結果 64 4-3 限制載子注入之元件實驗 71 4-4 以DCM2發光之紅光元件實驗 74 4-5 超晶格OLED熱退火實驗 77 4-6 超晶格式結構的討論 84 第五章 結論 88 參考文獻 90

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