本研究利用反應式射頻磁控濺鍍法，以AlCrTaTiZr高熵合金靶材與Si靶材共濺鍍的方式製備不同矽含量之多元氮化物(AlCrTaTiZr)-Six-N鍍膜，並探討矽含量對於鍍膜微結構、機械性質、磨潤性質以及抗氧化能力之影響。最後亦將性質優異之氮化物硬膜鍍覆在拋棄式三角銑刀上進行304不鏽鋼以及SKD11工具鋼的切削測試。
實驗結果發現，多元氮化物鍍膜在低矽含量時仍然呈現單一FCC結構，直到矽含量達到7.9 at%時，非晶相SiNx開始於晶界上析出，此時多元氮化物鍍膜轉變為奈米複合結構，且隨著矽含量的繼續增加，非晶相的比例亦持續增加，致使鍍膜結構中FCC氮化物晶粒大小大幅度的下降。
多元氮化物鍍膜硬度約為34 GPa，且隨著矽元素的添加沒有明顯的改變，但是當矽含量達到10.2 at%時，硬度大幅度下降至26 GPa。此軟化現象主要歸因於鍍膜結構中析出大量的SiNx非晶相，導致整體硬度明顯的下降。在摩潤性質的研究中，多元氮化物鍍膜對鉻鋼球的磨耗行為以溫和的擦損磨耗為主，摩擦係數約為0.79，磨耗速率約為6.0×10-6 mm3/N•m，且隨著矽含量的增加有些微的上升；但是當矽含量達到10.2 at%時，鍍膜之磨耗行為轉變為摩潤化學磨耗，此時摩擦係數降低為0.74，磨耗速率也因鍍膜表面生成氧化層以及部分鉻鋼球的黏著而大幅降低。
矽元素的添加大幅度的改善多元(AlCrTaTiZr)N鍍膜之抗氧化能力。矽含量為7.9 at%之氮化物鍍膜在經過1000 °C，2小時的氧化實驗後仍然保有初鍍狀態的氮化物結構，且鍍膜表面僅生成厚度約330 nm之氧化層。此抗氧化能力的提升歸因於在鍍膜氧化時，非晶SiO2於晶界上形成並阻擋氧原子的擴散，並且當高矽含量時因形成奈米複合結構，亦可藉由非晶SiNx的析出阻礙氧原子的擴散。此外，當氮化物鍍膜在1000 °C進行氧化時，表面會額外生成一層富矽、鋁的氧化表層以及一層富鉻、鋁的氧化層，這些具有保護性的氧化物提供額外的抗氧化能力，使多元氮化物之氧化速率大幅度的下降。
由切削測試結果發現，對304不鏽鋼進行切削時，與工業上所使用的TiN及TiAlN鍍膜相比，多元氮化物鍍膜具有最低的磨損量及磨耗速率；對於SKD11工具鋼進行切削時，因工作溫度的上升突顯出抗氧化能力的重要性，此時添加矽的多元氮化物鍍膜則具有最低的磨損量及磨耗速率，由此可見，本研究開發的(AlCrTaTiZr)-Si-N鍍膜具有優異的切削性質，在工業應用上極具潛力。

The aim of this study is to develop a novel nitride material as a protective coating, which enhances the surface hardness, wear resistance, thermal stability and oxidation resistance of the machining tools. Multi-component (AlCrTaTiZr)-Six-N coatings were deposited on silicon wafers, cemented carbide substrates and cutting inserts by reactive RF magnetron co-sputtering of an equimolar AlCrTaTiZr alloy target and a pure silicon target. The effect of silicon content on the microstructures, mechanical properties, tribological behavior and oxidation resistance was studied. Nitride films with low silicon content remained a simple FCC (face-centered cubic) structure. As the silicon content reached 7.9 at%, thermodynamically driven phase separation occurred, leading to a nanocomposite structure consisting of an FCC solid-solution nitride and an amorphous SiNx phase. These nitride films exhibited high hardness of 34 GPa and remained a constant level up to 7.9 at% Si. The reduced hardness at silicon content of 10.2 at% was attributed to the appreciable amounts of softer amorphous segregation. These nitride films showed a mild polishing wear behavior with higher friction coefficient from 0.79 to 0.83 and a higher wear rate from 6.0×10-6 mm3/N•m to 9.8×10-6 mm3/N•m with increasing silicon content, while the film with the silicon content of 10.2 at% showed a tribochemical wear behavior having the lowest friction coefficient of 0.74 and an almost undetectable wear rate due to the oxidized products and transferred materials on the worn surface. Silicon incorporation significantly improved the oxidation resistance of the (AlCrTaTiZr)N films. The nitride film with the silicon content of 7.9 at% annealed at 1000 °C for 2 h in air only had a 330 nm-thick oxide layer. This improvement was attributed to the amorphous SiO2 boundary around the crystallites, and the nanocomposite structure (for high silicon content) with the presence of amorphous SiNx phase. The presence of protective skin surface consisting SiO2 and Al2O3 and the subsequent sublayer consisting of Cr2O3 and Al2O3 also accounted for the further improved oxidation resistance at such a high temperature. Comparing with the present state-of-the-art protective hard coatings, the inserts with multi-component nitride coatings exhibited lower tool wear rates when machining stainless steel. The silicon-containing nitride coating had better performance when machining SKD11 tool steel due to the much improved oxidation resistance. In this study, the optimum silicon content of the multi-component nitride coatings is 7.9 at% since it gives the best combination result of hardness and oxidation resistance and consequently the best cutting performance. These coatings are indeed applicable to the manufacturing and processing industry.

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