本論文主要發展三維高分子微製程技術，利用UV光微影製程與黑光阻遮罩方式於微光學生物感測器與微流體反應器之應用。其內容包含：(1) 利用單石化製程方式製作具有微稜鏡陣列之內全反射式生物感測器於螢光感測上，(2) 製作平面三維微流體流體聚合裝置於封閉與開放式微流體系統下產生尺寸大小相當一致的單一或是雙重乳化液珠。
(1) 在微光學生物感測器上：吾人提出單石化內全反射式生物感測器，其整合微流道、高分子微光學元件、與平面光波導組合成平行化平台。為了製作微稜鏡陣列，吾人採用甘油浸入式斜向曝光技術在平面光波導上製作具有不同傾斜角之微稜鏡陣列，藉由此一整合式生物晶片，吾人可觀察在平面波導上同時產生多重內全反射螢光點，另外，在此系統下，吾人也可以觀測在消散波激發下微顆粒在靠近表面上之布郎運動情形。此一獨特的製程整合技術簡化的目前內全反射式生物晶片的架構，且可整合到一微小系統中。
(2) 在微流體反應器上：吾人提出平面三維微流體流體聚合裝置。其優點在於可在同一個裝置用來產生油-水或是水-油單一乳化液珠。另外，也可用來產生雙重乳化液珠，亦即液珠內包含多個微小液珠的型態，再者，吾人首次展示在開放式微流體系統下，製作水-油液珠或是藉由光聚合固化形成高分子微顆粒，同時，吾人也可製作具有羧基的高分子微顆粒並修飾接上生物抗體分子，此一獨特的製程整合技術克服了目前二微微流體流體聚合裝置的所面臨的問題，且可整合到一微小系統中。

This thesis develops the three-dimensional (3D) polymer microfabrication techniques with UV lithography and black photoresist shadow method for applications of microoptic biosensors and microfluidic reactors. It mainly consists of (1) a monolithic integration method to fabricate a total-internal- reflection (TIR) based biosensor with microprism arrays for fluorescence sensing, and (2) a planar 3D microfluidic flow-focusing device (MFFD) to produce monodisperse single/double emulsions in a closed/open microfluidic system.
(1) Microoptic biosensors: we propose a monolithic TIR-based biosensor, which integrates a microfluidic chamber, polymer-based optics, and planar waveguides into a high-throughput platform. To fabricate the microprism array, a technology employing glycerol-compensated oblique-exposure is employed. Microprism arrays with various inclined surface angles on the planar optical waveguide have been successfully fabricated. Multiple total internal reflection spots can be observed, through this monolithically integrated optical system simultaneously. Real-time Brownian motions of fluorescent microspheres excited by the evanescent wave under this system are captured for motion analysis. The unique fabrication/integration aspects including on-chip micro-optics simplify current TIR optical configurations and could be integrated into a microsystem.
(2) Microfluidic reactors: we present a planar 3D-MFFD that can produce monodisperse single/double emulsions in a closed/open microfluidic system. The proposed 3D MFFD can produce single emulsions for both water-in-oil (W/O) and oil-in-water (O/W) droplets utilizing the same device. Double emulsions containing one to several internal droplets were successfully produced in the closed channel configuration. In addition, we demonstrated for the first time the feasibility of forming W/O droplets and polymer particles by means of in-situ photopolymerization in an open channel configuration by withdrawing the fluid from the outlet channel. Bioconjugation of the carboxylated copolymer (EGDMA/AA) particles with the anti-rabbit IgG-Cy3 conjugates was also successfully achieved. The unique fabrication of the 3D MFFD device utilizing SU-8 resist overcomes problems for current 2D MFFD and provides flexibility for Lab-on-Chip microsystem.

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