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研究生： 黃旆齊
Huang, Pei-Chi
論文名稱： 多波長外差式干涉儀位移量測技術
Displacement Measurement by Multi-Wavelength Heterodyne Interferometry
指導教授： 楊尚達
Yang, Shang-Da
口試委員: 楊尚達
李朱育
施宙聰
學位類別： 碩士
Master
系所名稱： 電機資訊學院 - 光電工程研究所
Institute of Photonics Technologies
論文出版年： 2013
畢業學年度： 101
語文別： 英文
論文頁數： 43
中文關鍵詞： 位移量測 、干涉儀
外文關鍵詞： absolute distance, interferometry
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    • 在本論文中，我們提出一個改良式多波長外差式干涉儀位移量測技術。首先，我們量測不同波長的相位並利用所組成的數組來決定位移，以避免過去使用相位差來一步步估計位移時產生的累積相位錯誤，因此提升了在相同實驗環境下可量測的最大距離。再者，我們修正了當所提供振幅不等於電光效應相位調變器之半波電壓的鋸齒波所造成的錯誤，進而讓我們得以使用單一個電光效應相位調變器來提供相位延遲給不同波長的單頻雷射，大大簡化了實驗的複雜度。在實驗上，我們成功地藉由三波長外差式干涉儀達到1公分的量測距離，0.57奈米的精準度以及33赫茲的量測速度。

    CHAPTER 1 INTRODUCTION 1 CHAPTER 2 THEORY 3 2.1 Heterodyne interferometry 4 2.2 Two-wavelength heterodyne interferometry 8 2.3 Wavelength sweeping heterodyne interferometry 13 2.4 Multi-wavelength heterodyne interferometry 2.4.1 Basic principle 16 2.4.2 Mapping method 17 2.4.3 Phase error tolerance 20 2.4.4 Calibration of phase modulation error 25 CHAPTER 3 EXPERIMENTS 3.1 Experimental setup 29 3.2 Calibrations 31 3.3 Experimental results 3.3.1 Demonstration of high accuracy 34 3.3.2 Demonstration of long non-ambiguity range 37 CHAPTER 4 CONCLUSIONS AND PERSEPCTIVES 40 REFERENCES 42

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    11. H. L. Hsieh, J. Y. Lee, W. T. Wu, J. C. Chen, R. Deturche and G. Leronde, "Quasi-common-optical-path heterodyne grating interferometer for absolute distance measurement", Measurement Science And Technology 21, 115304 (2010).
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