稀土-過渡合金薄膜是目前最被廣泛使用的磁光記錄媒體材料。本實驗已成功地利用磁控式濺鍍系統在(100)矽基板及康寧玻璃上濺鍍具有垂直異向性之 SiNx / TbFeCo / SiNx 多層磁光薄膜。
實驗過程除了探討製程參數如總壓對薄膜中Tb/Fe/Co合金比例、微觀結構、磁性質的影響之外；更設計不同膜層結構觀察兩層記錄層間的交互耦合效應；另外，經由實驗結果發現介電層應力狀態會對磁性質，尤其是垂直異向性產生作用，若介電層為壓應力，則記錄層的垂直異向性會加強，反之，若為張應力，記錄層異向性會變差，改變了介電層只作為提供記錄層保護的觀念。

最後，本實驗介紹了一種方法來製作彼此互相隔離的(isolate)記錄位元，經由原子力顯微鏡於探針施加電壓的方式，成功的對記錄層進行局部氧化，依據記錄層氧化後磁性質尤其是異向性改變的材料特性，創造出彼此獨立的記錄位元，並且希望利用磁力顯微鏡進行觀察。

記錄媒體

1. Media for Erasable Magnetooptic Recording
P. Hansen and H. Heitmann, IEEE Trans. Magn. MAG-25, No.6, pp.4390-4404(1989)
2. 磁光紀錄薄膜的最新發展趨勢
蕭在莒，光電資訊，V.10，pp.2-8(1991)
3. 未來的磁光紀錄材料
林建榮，材料與社會，V.73, pp.76-80(1993)
4. Summary Abstract: Magneto-Optic Recording Materials
M. H. Kryder, J. Vac. Sci. Tech. A, V.4, No.3, pp.558-559(1986)
5. Handbook of Magneto-Optical Data Recording
Terry W. McDaniel, and Randall H. Victora, Noyes Publication (1996).
6. High Density Magneto-Optical Disk Technologies
Y.tanaka, M. Kurebayashi, T. Maeda, K. Torazawa, A. Takahashi, N. Ohta, and S. Yonezawa, IEEE Trans. Cons. Elec., Vol. 43, No. 3, pp.475-482(1997)
7. 高性能磁光材料及紀錄技術
蕭在莒，光電資訊，V.13，pp.10-15(1992)
8. Erasable Magneto-Optical Recording Media
M. Hartmann, IEEE Trans. Magn, Vol. MAG-20, No. 5, pp. 1013.(1984).
9. Amorphous Magnetic Materials for Bubble Domain and Magneto-Optics Application
Cuomo, J. J. Chaudhari, P. Gambino, R. J.Source, J. Elec. Mater. V. 3, No. 2, pp. 517-529 (1974)
10. Positional Dependence of Recording Noise in Amorphous Rare-Earth(Dash)Transition-Metal Magneto Optical Disk
K. Nagato, A. Kawamoto, T. Sato, T. Yorozu, J. Appl. Physics, V.63, No.8, pp. 3856-3858.(1988)
11. Study on Recorded Domain Characteristic of Magneto-Optical TbFeCo Disk
M. Takahashi, T. Niihara, N. Ohta, J. Appl. Physics, V.64, No.1, pp. 262-269.
12. Preparation of TbFeCo thin Films with Large Kerr Rotation Angle by Facing Targets Sputtering
H. Ito, M. Yamaguchi, M. Naoe, J. Appl. Physics, V.67, No.9, pp.5307-5309.
13. Microstructure and Stability of RF-Diode Sputtered GdTbFeCo Thin Films
H-P. D. Shieh, M. Hong , S. Nakahara, J. Appl. Physics, V.63, No.8, pp.3627-3629.(1988)
14. Preparation of Amorphous TbFeCo Thin Films by Plasma-Free High-Rate Sputtering
M. Naoe, N. Kitamura, T. Hirata, J. Appl. Physics, V.61, No.8, pp.3337-3339.(1987)
15. Future Generation Magneo-Optiacal Media from A Manufacturing Point of View
N. Ohta, Jpn. J. Appl. Phys, Vol. 32, Pt. 1, No. 11B, pp.5185-5188(1993).
16. The Effects of Deposition Conditions on Microstructure and Magnetic Properties of TbFeCo
J.-W. Lee, H-P. D. Shieh, M. H. Kryder, D. E. Layghlin, J. Appl. Phys., V.63, No.8, pp.3624-3626.(1988)
17. Characterization of Amorphous TbFeCo Films for Magneto Optical Media
M. F. Ruane, J. Calkins, J. Appl. Phys., V. 63, No.8, pp.3630-3632.(1988)
18. Control of Parameters in Rare Earth-Transition Metal Alloys for Magneto-Optical Recording Media
M. H. Kryder, H.-P. D. Shieh and D. K. Hairston, IEEE Trans. Magn. MAG-23, pp.165.(165)
19. Influence of Preparation Conditions on Magnetic Properties and Aging Behavior of RF Diode Sputtered GdTbCo Films
H. Heitmann, M. Hartmann, S. Kkagn, M. Rosenkranz, H. J. Tolle, P. Willich, J. Appl. Phys., V.61, No.8, pp.3331-3333.(1987)
20. Influence of Nitrogen, Oxygen, and Water on Magnetic Properties of DC Magnetron Sputtered Gdtbfe Films
H. Heitmann, A. M. J. Spruijt, and P. Willich, J. Appl. Phys., V.61, No.8, pp.3343-3345.(1987)
21. Effect of Argon Sputtering Pressure on The Magnetic Properties and Mophology of TbFeCo Films
T. K. Hatwar, A. C. Palumbo and D. G. Stinson, IEEE Trans. Magn. MAG-24, No.6, pp.2775-2777(1988).
22. Oxidation Induced Magnetic and Structural Changes in Magneto-Optical Alloys
E. E. Marinero, D. C. Miller, A. E. Bell, A. Gupta, R. N. Payane and H. Notarys, IEEE Trans. Magn. MAG-23, No.5,pp.2629-2631(1987).
23. Effect of Sputtering on Magnetron-Sputtered Magneto-Optical Recording Media
H-P. D. Shieh, M. H. Kryder, and J-W. Lee, IEEE Trans. Magn, Vol. 24, No. 6, pp. 2446.(1988).