本論文的研究重點在於分析與設計SDA致動器以結合撓性雙穩態機構應用於光切換器。在理論分析上，分別介紹SDA的致動原理與連接SDA微致動器的彈簧系統 : 在致動力方面，利用虛功法（Principle of virtual work）求得電壓與靜電力的關係，更進一步分析SDA之幾何形狀在靜電力作用下產生之形變與輸出力的關係 ; 在彈簧系統方面，由懸臂樑觀念求出其等效彈簧常數（Spring constant），並分析懸臂樑撓曲時的內應力。在製程方面分為前段薄膜沉積與後段蝕刻釋放兩部份，前段製程係委託美國Cronos Integrated Microsystems公司的多人共用製程(Multi-User MEMS Processes or MUMPsTM) ; 後段製程則是使用液體強酸腐蝕氧化矽後以清洗溶液去除強酸，最後以蒸發方式去除清洗溶液。在整體元件的設計方面，同時考慮MUMPs共用製程的限制與撓性雙穩態機構的特性，設計出符合供給式或保護式需求條件的光切換器，並且以MEMCAD軟體進一步模擬設計結果。在實驗量測方面，除討論SDA雙向推動雙穩態撓性機構、SDA單向拉動雙穩態撓性機構與SDA旋轉馬達三種元件的表現外，也對蝕刻釋放與電腦模擬作一探討。結果顯示本文提出之設計具可行性，此外並建議出未來深入研究的目標。

This thesis presents the design of a scratch drive actuator (SDA) for the bistable compliant mechanism applied to optical switching devices. In accordance with the force needed to drive the mechanism, the relationship among SDA output force, geometries, and applied voltage is first constructed by employing the principle of virtual work. The stresses and the equivalent constant of the spring system connected to SDA are calculated by assuming the configuration of the SDA as an overhanging beam. The SDA and the associated bistable compliant mechanism that are fitted to the demand of provision or protective optical switch are designed by considering the characteristics of MUMPsTM fabrication process. There are two types of SDA in combination with both the bistable mechanism and step motor being designed and fabricated as illustrative samples. The chip well defined in MUMPsTM is released by immersing the chip in a bath of HF. It is followed by cleaning in DI water and IPA on a hot plate at 200oC to reduce stiction. The samples are inspected by OM and SEM, respectively. The experimental and analytical results indicate the practicability of the proposed design concept.

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