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研究生: 鄭宜明
I-Ming Cheng
論文名稱: 利用電子束測試機與超大型積體電路測試機連結,進行液晶平面顯示器之源極驅動積體元件的故障分析
Failure Analysis of TFT-LCD Source Driver IC with E-Beam Prober linking to VLSI Tester (SC-μ)
指導教授: 黃惠良
Huey-liang Hwang
口試委員:
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電子工程研究所
Institute of Electronics Engineering
論文出版年: 2003
畢業學年度: 91
語文別: 中文
論文頁數: 120
中文關鍵詞: 電子束測試機驅動元件
外文關鍵詞: Failure Analysis, TFT-LCD, Driver IC, E-Beam Prober, VLSI Tester
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  • 近年來,液晶平面顯示器已被大眾廣泛的接受而且其應用面也在持續的成長中。在液晶平面顯示器中,面板之驅動積體元件佔了成本的很大一部份。然而,在液晶平面顯示器之源極驅動積體元件在傳統的故障分析上有許多缺點和障礙,本研究之成果提供一個全新的解決方案,就是利用電子束測試機(E-Beam Prober)與超大型積體電路測機(VLSI Tester)進行連結。這個解決方案適用於源極驅動積體元件的兩種不同的封裝型式,包含TCP和QTCP。這個全新的解決方案包含三個主要技術:首先是高成功率(94%)的驅動積體元件開蓋技術,其次是可以在電子束測試機上進行分析的新治具,還有就是一個功能強大且高彈性的測試程式。 整合上述三種技術,此研究成功的完成了利用電子束測試機與超大型積體電路測機連結以進行液晶平面顯示器之源極驅動積體元件的故障分析。除了在電子束測試機上進行分析之外,上述三種技術也能夠成功的運用在其他的故障分析工具上。此外,本論文還針對運算放大器(OP)介紹一種開路分析技巧,使得運算放大器的故障分析變的更容易。在實際的分析案件中, Hspice 模擬工具也被應用來協助了解運算放大器的內部行為。有了這個全新的解決方案,可以顯著地提昇源極驅動積體元件的故障分析成功率並且有效率地縮短故障分析的時間。


    A new system of failure analysis for TFT-LCD Source Driver IC is presented. This system is suitable to two package types (TCP and QTCP) of TFT-LCD Source Driver IC. This system consists of a high success rate (94%) de-capsulate technique, a new fixture between device and E-Beam Prober and a powerful/flexible test program. All of above make failure analysis of TFT-LCD Source Driver IC by E-Beam prober linking to VLSI Tester (SC-μ) being successful and practicable. In addition to failure analysis with E-Beam Prober, these new techniques are also useful to other failure analysis tools such as internal probing at probe-station, Emission Microscope for Multi-layer Inspection (EMMI), Optical Beam Induced Resistance Change (OBIRCH), Liquid Crystal (LC), etc. Besides, an Open-Loop method for OP (operation amplifier) is also presented which makes OP analysis become more effective. Hspice simulation is also introduced to help failure analysis in OP. With this system, for TFT-LCD Source Driver IC, failure analysis success rate is promoted and failure analysis cycle time is shortened successfully and effectively.

    Contents page 1. Introductions 1.1. Introduction to TFT-LCD Driver IC 1 1.2. Overview of TFT-LCD Driver IC failure analysis 1 1.3. Motivation of this study 2 1.4. Research direction and Challenges of this study 3 Figures of Ch1 6 2. Principles/Structures of E-Beam Prober and SC-μ Tester 2.1. E-Beam Prober 11 2.2. VLSI Tester (SC-μ) 13 Figures of Ch2 15 3. Experiments 3.1. New de-capsulate technique of LCD Driver IC 3.1.1. De-capsulate problems of LCD Driver IC 19 3.1.2. New de-capsulate recipe developing 19 3.1.3. New de-capsulate recipe modification 20 3.1.4. Result and discussion of de-capsulate experiment 21 3.1.5. Summary of new de-capsulate technique 21 3.2. New fixtures between Driver IC and E-Beam Prober 3.2.1. Fixtures problems of LCD Driver IC 22 3.2.2. New fixture for TCP 22 3.2.3. New fixture for QTCP 24 3.2.4. Summary of new fixtures 24 3.3. SC-μ test program 3.3.1. Preface of test program 25 3.3.2. Function study of two products 25 3.3.3. Test program for Product-A 26 3.3.4. Test program for Product-B 26 3.3.5. Summary of test program 27 3.4. Open-Loop method of OP-AMP 3.4.1. Problem description 28 3.4.2. Open-Loop method developing 28 3.4.3. Experiment and discussion 29 3.4.4. Summary of Open-Loop method 30 Figures of Ch3 31 4. Case studies 4.1. Case 1 52 4.2. Case 2 55 4.3. Case 3 58 4.4. Summary of case studies 60 Figures of Ch4 61 5. Conclusions 88 6. Appendixes 6.1. A: Design Charts of fixtures 91 6.2. B: Test Items of Sc-μ program 96 6.3. C: Circuitry and Layout of Open-Loop Method 112 7. References 115

    [1] Mentley, D.E., “State of flat-panel display technology and future trends”, Proceedings of the IEEE, Volume: 90 Issue: 4, April 2002, pp: 453 –459.
    [2] Lin, M.-S.,“Technology trends of microelectronics in Taiwan”, IEMT/IMC Symposium, 2nd 1998 , 1998, pp: 1 –9.
    [3] Morimoto, M. , “Trends of marketing and technology in TFT-LCD”,
    Electronics Manufacturing Technology Symposium, 1994. Low-Cost Manufacturing Technologies for Tomorrow's Global Economy. Proceedings 1994 IEMT Symposium., Sixteenth IEEE/CPMT International , 1994, pp: 384 -386 vol.1.
    [4] Lalama, S.J., “Flat panel display manufacturing overview”, Electronics Manufacturing Technology Symposium, 1994. Low-Cost Manufacturing Technologies for Tomorrow's Global Economy. Proceedings 1994 IEMT Symposium., Sixteenth IEEE/CPMT International , 1994, pp: 185 -190 vol.1.
    [5] Un-Byoung Kang, Young-Ho Kim, “A fine pitch COG technique using eutectic Bi-Sn solder joints for LCD driver IC packaging applications”, Electronic Materials and Packaging, 2001. EMAP 2001. Advances in, 2001, pp: 129 –134.
    [6] Kristiansen, H.; Liu, J.,“Overview of conductive adhesive interconnection technologies for LCD's”, Polymeric Electronics Packaging, 1997., Proceedings., The First IEEE International Symposium on , 1997, pp: 223 –232.
    [7] Hayashi, N.; Naito, H.; Osada, O.; Adachi, Y.; Kubota, Y.; Yoshifuku, T.; Atsumi, K.; Yamaya, Y.; Takeno, S.; Nakano, H., “Development of TFT-LCD TAB modules”, Electronic Manufacturing Technology Symposium, 1989, Proceedings. Japan IEMT Symposium, Sixth IEEE/CHMT International, 1989, pp: 79 –82.
    [8] Wong, T., “The realities of ASIC packaging”, ASIC Seminar and Exhibit, 1990. Proceedings, Third Annual IEEE, 1990, pp: T/13.1.
    [9] Morris, J.R., “Interconnection and assembly of LCDs”, Active Matrix Liquid Crystal Displays, 1995. AMLCDs '95., Second International Workshop on , 1995
    pp: 66 –71.
    [10] Itakura, T.; Minamizaki, H.; Saito, T.; Kuroda, T., “A 402-output TFT-LCD driver IC with power-controlling function by selecting number of colors”, Custom Integrated Circuits Conference, 2002. Proceedings of the IEEE 2002, 2002, pp: 257 –260.
    [11] Chun Lai Yiu; Mok, P.K.T., “Design of polysilicon TFT operational amplifier for analog TFT AMLCD driver”, Electronics, Circuits and Systems, 2001. ICECS 2001. The 8th IEEE International Conference on , Volume: 1 , 2001, pp: 317 -320 vol.1.
    [12] Byong-Deok Choi; Oh-Kyong Kwon, “Stepwise data driving method and circuits for low-power TFT-LCDs”, Consumer Electronics, IEEE Transactions on , Volume: 46 Issue: 4 , Nov. 2000, pp: 1155 –1160.
    [13] De Pauw, P.; Van Haeverbeke, S., “Quality and reliability improvement through defect oriented failure analysis”, Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium, 1996, pp: 1835 –1838.
    [14] Terry Barrette,“Failure Analysis Issues Concerning-High Pin Count Gate Array Devices”, LSI Logic Corporation, 1551 McCarthy Blvd., MS:C-123, Milpitas, CA.95035.
    [15] R. E. Anderson, J. M. Soden, C. L. Henderson, “Future Technology Challenges for Failure Analysis”, International Symposium for Testing and Failure Analysis Proceedings, pp. 27-31, 1995
    [16] Vallett, D.P., “An overview of CMOS VLSI failure analysis and the importance of test and diagnostics”, Test Conference, 1996. Proceedings., International , 1996, pp: 930.
    [17] Inuzuka, E.; Suzuki, H., “Emission microscopy in semiconductor failure”,
    Instrumentation and Measurement Technology Conference, 1994. IMTC/94. Conference Proceedings. 10th Anniversary. Advanced Technologies in I & M., 1994 IEEE, 1994, pp: 1492 -1496 vol.3.
    [18] Chew, Y.Y.; Siek, K.H.; Yee, W.M., “Novel backside sample preparation processes for advanced CMOS integrated circuits failure analysis”,
    Physical and Failure Analysis of Integrated Circuits, 1999. Proceedings of the 1999 7th International Symposium, 1999, pp: 119 –122.
    [19] Nikawa, K. and S. Inoue, “New Capabilities on OBIRCH Method for Fault Localization and Defect Detection”, 5A.3,11:15-45, 1997/11/18, ATS(Asian Testing Symposium),1997/11/17-19, Akita.
    [20] Nikawa, K. and S. Inoue, “LSI Failure Analysis Using Focused Laser Beam Heating”, Proc. ESREF, pp. 307-312 (1995).
    [21] Nikawa, K. and S. Inoue, “New Laser Beam Heating Methods Applicable to Fault Localization and Defect Detection in VLSI Devices”, Proc. Int. Rel. Phy. Symp.,IEEE, pp.346-354(1996).
    [22] Xia, W.; Villafana, M.; Tappan, J.; Watson, T.; Campbell, M., “Reliability of via and its diagnosis by e-beam probing”, Integrated Reliability Workshop Final Report, 2000 IEEE International, 2000,pp: 104 –106.
    [23] Jenkins, K.A.; Henkels, W.H. ,“Internal node probing of a DRAM with a low-temperature e-beam tester”, Solid-State Circuits, IEEE Journal of , Volume: 26 Issue: 4 , April 1991, pp: 672 –675.
    [24] Chanh Q. Vo, “Using E-Beam Schlumberger IDS5000 to Find a Cause of Internal Latchup”, SHARP Microleectronics Technology, Inc.,5700 NW Pacific Rim Blvd. Camas, WA, 98607.
    [25] Meneghesso, G.; Luchies, J.R.M.; Kuper, F.G.; Mouthhaan, A.J., “Turn-on speed of grounded gate NMOS ESD protection transistors”, Reliability of Electron Devices, Failure Physics and Analysis, 1996. Proceedings of the 7th European Symposium on, 1996, pp: 1735 –1738.
    [26] Douglas S. Johnson, “Probing Devices in a TLM 0.8um CMOS Process”
    [27] Tan, K.T.; Ong, S.H.; Yong, C.T., “Fault isolation on mixed signal device”,
    Physical and Failure Analysis of Integrated Circuits, 1995, Proceedings of the 1995 5th International Symposium, 1995, pp: 69 –74.
    [28] Jenkins, K.A., “Detecting and preventing measurement errors”, IEEE Design &Test of Computers, Volume: 14 Issue: 4, Oct.-Dec. 1997, pp: 78 –86.
    [29] Lee, W.T., “Engineering a device for electron-beam probing”, IEEE Design & Test of Computers, Volume: 6 Issue: 3, June 1989, pp: 36 -42, 44-49.
    [30] Schlumberger Corporation, “IDS Probe System Users Manual”, P/N: 57510260/Rev1.0, 1996, pp: 1-1, Appendix A.
    [31] Wolfgang, E.; Gorlich, S.; Plies, E., “Progress in electron-beam testing”, CompEuro '89., 'VLSI and Computer Peripherals. VLSI and Microelectronic Applications in Intelligent Peripherals and their Interconnection Networks', Proceedings. , 1989, pp: 5/110 -5/115.
    [32] Hui-Chuan Hung, “Several methods to debug complex ICs manufactured by submicron process”, Physical & Failure Analysis of Integrated Circuits, 1997.,Proceedings of the 1997 6th International Symposium on , 1997, pp: 234-237.
    [33] Schlumberger Corporation, “CAD Navigation Tools Users Manual”, P/N: 57510252/Rev1.0, 1996, pp: 1-1.
    [34] Hu, A.; Niijima, H., “New approach to integrate LSI design databases with e-beam tester”, Test Conference, 1990. Proceedings., International , 1990, pp: 1040 –1048.
    [35] Michael L. Bushnell, Vishwani D. Agrawal, “Essentials of Electronic Testing for Digital, Memory, and Mixed-Signal VLSI Circuits”, Kluwer Academic Publishers, Boston, Hardbound, ISBN 0-7923-7991-8, November 2000, pp: 24-34.
    [36] Credence Corporation, “SC Series Application Training Workbook”, PN: 061-6077-00, 1999, pp: DAY 1-2, 1-3.
    [37] Winbond Product Department De-capsulate Report.
    [38] Winbond Product Department Failure Analysis Report.
    [39] C.F.Lin, C.M.Chen, C.T.Liu, H.Y.Wang, I.M.Cheng and L.J.Liu, “The Failure of Tungsten Plug Contact to Ploy Gate Bridge in Conventional TEOS/BPSG ILD Process”, 2000, IEDMS, Dec. 20-21, 2000, A8, pp: 234-235.
    [40] Winbond Process FAB Department Failure Analysis Report.
    [41] Y. Tokunaga and J. Frosien, “High Performance Electron Beam Tester for Voltage Measurement on Unpassivated and Passivated Devices", in Proc. of the International Test Conf., Aug. 1989, pp. 917-922.
    [42] Sharad Prasad, Grand Lindberg, Hong Zhang, Steve Jacobson, Rafael Huerta, “Failure Analysis Of Multilevel High Density ASICs By Integrating E-Beam Tester And The Reactive Ion Etcher”, LSI LOGIC CORPORATION FREMONT CA.
    [43] Christopher G Talbot, Suresh Rajan, “A Logic Analyzer Tool That Cuts E-Beam Prober Acquisition Times”, Schlumberger Technologies ATE Diagnostic Systems Group, 1601 Technology Drive. San Jose, Ca 951110-1397.
    [44] Sartore, R.G.; Shastry, N.; Brahme, U.; Jefferson, K.; Halaviati, R., “Tutorial for computer aided diagnostic E-Beam testing of ASIC's”, ASIC Conference and Exhibit, 1991. Proceedings., Fourth Annual IEEE International , 1991, pp: T8 -1/1-7.
    [45] Kwang, K.; Wang, H.; Hu, A.; Asaki, M.; Niijima, H., “CAD driven high precision E-Beam positioning”, Test Conference, 1993. Proceedings., International , 1993, pp: 928 –935.
    [46] Talbot, C.G.; Rajan, S., “A logic analyzer tool that cuts e-beam prober acquisition times”, Test Conference, 1989. Proceedings. Meeting the Tests of Time., International , 1989, pp: 923 –927.
    [47] Kuji, N.; Matsumoto, K., “Marginal fault diagnosis based on e-beam static fault imaging with CAD interface”, Test Conference, 1990. Proceedings., International , 1990, pp: 1049 –1054.
    [48] Itazaki, N.; Sumioka, T.; Kajihara, S.; Kinoshita, K., “Automatic fault location using E-Beam and LSI testers”, Test Symposium, 1993., Proceedings of the Second Asian , 1993, pp: 255 –260.
    [49] Melgara, M.; Battu, M.; Garino, P.; Dowe, J.; Vernay, Y.J.; Marzouki, M.; Boland, F., “Automatic location of IC design errors using an E-Beam system”, Test Conference, 1988. Proceedings. New Frontiers in Testing, International, 1988, pp: 898 –907.

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