本研究以濃度1：1之硝酸鋅六水合物(Zinc nitrate hexahydrate)與六亞甲基四胺(HTMA)調配之水溶液，在濺鍍有氧化鋅種子層之聚醯亞胺(Polyimide)基板上，利用水溶液法成長一維氧化鋅奈米柱，並導入田口方法作為最大化奈米柱深寬比的實驗方法，建立直交表以簡化資料分析的工作，執行實驗且利用場發射掃描式電子顯微鏡、能量散射光譜儀觀察各組實驗奈米柱之結晶、微結構與成份，並探討各因子對於奈米柱深寬比之影響力與原因。依上述實驗結果得到在環境溫度105 °C、成長時間11小時、反應物濃度0.05 M、種子層厚度200 nm、濺鍍功率100 W的最大化參數下，有最大的奈米柱深寬比，因此再依此控制因子製作高深寬比之氧化鋅奈米柱。最後將上述條件所製作的兩片具有氧化鋅奈米柱結構之基板，上下貼合組裝，形成仿生交互鏈鎖結構之觸覺感測器，藉由施加壓力導致上下奈米柱之間接觸電阻發生改變作為感測機制，製作成一高靈敏度之觸覺感測器，並探討此高深寬比之氧化鋅奈米柱在感測器應用上的優勢。

In this study, an aqueous solution is prepared by mixing zinc nitrate hexahydrate and hexamethylenetetramine at 1:1 ratio of concentration. One-dimensional Zinc Oxide (ZnO) nanorods is synthesized on polyimide substrate by using the aqueous solution method. Taguchi method is introduced as an experiment method to maximize the aspect ratio of ZnO nanorods. Establish an orthogonal array to simplify the work of data analysis, based on the Taguchi method. The crystal structure and composition of the ZnO nanorods are observed by field emission scanning electron microscopy and energy-dispersive X-ray spectroscopy, respectively. Finally, the high aspect ratio ZnO nanorods are fabricated again under the maximum parameters, in which the ambient temperature is 105 °C, growth time is 11 hours, reactant concentration is 0.05 M, seed layer thickness is 200 nm and sputtering power is 100 W. To explore the advantages of high aspect ratio ZnO nanorod on sensor application, two substrates with ZnO nanorods are combined to each other to form a tactile sensor with interlocked structure. In experiments, applied force induces a change of the contact resistance between two interlocked ZnO nanorods, which is applied as sensing mechanism of the high sensitivity tactile sensor.

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