使用紅外線光譜儀與紫外光-可見光光譜儀來描述添加不同重量之poly (styrene-co-maleic anhydride)修飾JSR電子束阻劑。發現經修飾阻劑在主鏈上之聚合物結構稍有變化。使用光學薄膜測厚儀、n&k測厚儀、紅外線光譜儀評估旋塗在晶圓上阻劑薄膜厚度特性，依次量測厚度、孔隙度和震動光譜。我們分析結果顯示在相同轉速下厚度隨著添加量的增加而升高，而添加之修飾劑對阻劑熱穩定性並無不良影響。研究修飾之電子束阻劑在抗電漿蝕刻上，所使用的fluorine-containing電漿在ULSI應用上是對光罩與矽元件的蝕刻。研究結果得知修飾的電子束阻劑對抵抗fluorine-containing電漿蝕刻的能力大於未修飾阻劑，其靈敏度些微降低，對映比與原來的電子束阻劑相較並沒有太大的改變。
微生物處理微影製程廢水方面，以填充活性碳之流動床式生物反應器處理含PGMEA、IPA、EL、Phenol等有機物之水樣可得到良好之結果，處理之效能均可達到95﹪以上。

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