環保署即將公告『光電製品製造業空氣污染管制及排放標準』，因此對於光電業揮發性有機氣體的淨化排放管制將趨嚴謹，尤其是大尺寸面板的次世代光電業液晶顯示器製造廠。目前在光電業液晶顯示器製造廠最為普遍常用之揮發性有機氣體淨化設備為溫變式吸脫附系統--『沸石吸附劑型蜂巢狀平行通道吸附轉輪』及『真球狀活性碳吸附劑流體化床』，然而，對於這類溫變式吸脫附系統的研究與文獻探討非常匱乏。
本研究以次世代光電業彩色薄膜液晶顯示器基板製造製程排放之揮發性有機氣體作為主要的研究重點，並進而對此二種淨化設備的特性加以研究分析及其影響因素加以研討，藉此建立相關之經驗資料，俾利相關人員參考。主要有機物成份為異丙醇(IPA)、丙酮(Acetone)、單甲基醚丙二醇(PGME)、單甲基醚丙二醇乙酸酯(PGMEA)、環己酮(Cyclohexanone)、HMDS等矽化物與全溶於水之高沸點去光阻劑(Stripper;剝離液)成份-- 乙醇胺(MEA)、二甲基亞堸(DMSO)及二乙醇單丁醚(BDG)等。
由研究結果得知，在沸石轉輪方面:疏水性沸石轉輪對於被吸脫附VOCs的親合力(Affinity)的順序是PGMEA ≧ PGME >> IPA > Acetone，此順序又與VOCs的沸點高低及極性大小相穩合，此乃是競爭性吸附(Competitive adsorption)與吸附替代(Adsorption replacement)所致。同時研究中得知沸石轉輪並不符合單層吸附的Langmuir等溫吸附方程式,但符合D-A等溫吸附方程式及Freundlich等溫吸附方程式，且屬於Type I 的有利等溫吸附曲線(Favorable isotherm)。在適當的將通過沸石轉輪的線速度下降、轉輪加厚及提高脫附熱容量等，即可輕易的使沸石轉輪去除效率持續維持90%以上並符合即將公告的法規要求。
在活性碳流體化床方面，研究中發現在含有IPA或PGME之GBAC，當脫附溫度加熱超過250℃時會熱分解反應出Propene，超過350℃時其轉化率甚至分別可高達90%及50%，Propene最後將會累積而生成非定型碳並堵塞沸石的微孔洞;同時一些聚合物如MEA、Styrene或環己酮等將會因持續的吸脫附之溫變下而產生聚合也堵塞沸石的孔洞，加速GBAC的劣化，縮短使用壽命;另外環己酮極易於GBAC表面產生觸媒氧化放熱反應，因此，若應用活性碳流體化床的話必須先行預處理這些有害於活性碳的物質，方可進入流體化床內進行淨化處理。

The Environmental Protection Administration of Taiwan will soon enforce the ”Opto-Electronic Manufacturers□ Air Pollution Control and Emission Standard”. The VOCs emission quantity is thus expected to be controlled with special focuses on the next generation of TFT-LCD manufacturers. One of the most popular VOCs treatment equipments for the next generation of TFT-LCD manufacture fab is the thermal swing adsorber includes honeycomb zeolite rotor with thermal oxidizer and granular bean activated carbon (GBAC)fluidized bed with condenser unit. However limited information is available on these thermal swing absorbers in the literature.
This study intends to provide experimental data and discuss the performance of the thermal swing adsorbers of honeycomb zeolite rotor and granular bean activated carbon fluidized bed for the VOCs exhaust laden air that simulated the emission characteristics of an opto-electronic manufacturer□s fab. The major VOCs compounds are IPA、Acetone、PGME、 PGMEA 、HMDS、 Cyclohexanone and Strippers in the VOCs laden exhaust air.
The results of honeycomb zeolite rotor portion showed that the affinity of the high boiling point VOCs such as PGME and PGMEA on the zeolite rotor is much larger than that of the low boiling point VOCs such as IPA and acetone, it followed the order of PGMEA ≧ PGME>> IPA> acetone, that is caused by competitive adsorption and adsorption replacement effect. And the adsorption isotherm of zeolite rotor can be represented by D-A and Freundlich isotherms, but not Langmuir isotherm. Under proper operation conditions of reducing the superficial velocity and the concentrate ratio, and increasing the desorption temperature or the thickness of the rotor, the THC removal efficiency can be easy and well above 90% and thus meet the promulgating regulation.
And the results of granular bean activated carbon fluidized bed portion showed that IPA and PGME will pyrolysis to propene when desrob temperature higher than 250oC,the convert rate will be above 90% of IPA and 50% of PGME,finally this propene will carbonize to amorphous carbon and plug in the micro pores after repetitious thermal swing ; some polymer compounds as MEA 、styrene and cyclohexanone result polymerization when repetitious thermal swing on the GBAC, these compounds remain in the GBAC pores and reduces the adsorption capacity, and cyclohexanone can easily oxidization on the surface of GBAC, hence fluidized bed system need the pre-treatment for these harmful compounds pre-treating before entrance fluidized bed.

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