本研究主要是以化學氣相沈積法中的流動觸媒法(the floating catalyst method )來合成奈米碳管。流動觸媒法主要是將金屬化合物催化劑揮發後與碳氫化合物的蒸氣混合，經高溫熱裂解1373K到1473K反應形成奈米碳管。利用此製程並加以參數的控制，可以生產出高純度的雙層奈米碳管及單層奈米碳管，其產量可達每十分鐘七十毫克，這也意指此方法具有潛力，可發展量產高純度奈米碳管的製程。本研究所製造的奈米碳管分別作場發式掃描電子顯微鏡、高解析穿透式電子顯微鏡及拉曼光譜分析以判定其奈米結構。

In this study, the floating catalyst method was adopted to synthesize carbon nanotubes (CNTs). High purity single walled and double walled carbon nanotubes were obtained by pyrolyzing the hydrocarbon gas in the temperature range of 1373 K and 1473 K. By proper selecting the parameter, a high product rate up to 70mg/10mins can be achieved. The high productivity implies that this method has the potential to further develope a mass production route for fabricating high quality CNTs. In this work, the effects of catalyst precursor, temperature, pressure, and promoter/hydrocarbon mole ratio on the synthesis of CNTs are discussed. Furthermore Field Emission Scanning Electron Microscopy (FESEM), High Resolution Transmission Electron Microscopy (HRTEM) and Micro-Raman system were used to examine the microstructure of the fabricated CNTs.

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