當材料在奈米尺度時，會有不同於以往的尺寸效應，不論在光性、電性、磁性方面都有特殊的效果產生。鉬是一個重要的耐火族金屬元素，它有高熔點以及高導電性的特性。氧化鉬則常被使用於觸媒、感測器、發光及發電材料以及儲存材料，用途相當廣泛。在本研究中，利用微波電漿輔助化學氣相沈積法，合成氧化鉬的奈米結構。氧化鉬是以奈米板的形貌出現，厚度20-100奈米，寬度200-600奈米，長度1-2微米。不論是利用白金、金或是不鍍觸媒，都可以在矽基板上合成大量的氧化鉬。反應時間和通入的氧氣氣體流量對於氧化鉬生成的形貌有很大的影響。
掃描式電子顯微鏡可以幫我們了解到氧化鉬的形態以及成長機制；Ｘ光繞射和穿透式電子顯微鏡幫我們確認了氧化鉬的結構為斜方晶三氧化鉬。拉曼光譜分析和紅外線光譜分析幫我們確認了三氧化鉬的鍵結形態。陰極發光的量測可以了解到氧化鉬可發出紅橙色光。雖然使用觸媒能合成氧化鉬，但在掃描式電子顯微鏡中沒有發現觸媒，因此由橫截面的拍攝推論氣-固機制是被認為較有可能的成長機制。

When in nano-scale, materials bear different characteristics, such as optical, electrical, and magnetic properties. Molybdenum is an important refractory metal; it has a very high melting point and high electrical conductivity. Mo oxides are widely used in catalysts, sensors, photochromic and electrochromic materials. In this research, we synthesize Mo oxides nano structure by MPECVD (microwave plasma enhanced chemical vapor deposition). The morphology of Mo oxides is slab. Its thickness, width, and length are respectively 20~100nm, 200~600nm, and 1~2μm. Large amounts of single-crystal MoO3 nanoslabs are obtained on silicon wafer by using Pt and Au at catalysts or not using any catalysts. It has large effects on the morphology of MoO3 by changing reaction time and gas flowing rate.

By using scanning electron microscopy, we can see the morphology and growing mechanism of Mo oxides. X-ray and transmission electron microscopy indicated the structure of Mo oxides was MoO3 with orthorhombic structure. By Raman spectroscopy, we can tell the differences among three different kinds of Molybdenum-oxide bonding. Cathodoluminescene shows great red-orange peak at 622nm of MoO3. Although MoO3 can be synthesized by using catalysts, we can not find them in SEM. By observing the cross section of sample we conclude vapor-solid is the portable growing mechanism.

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