自組裝形成的多孔性陽極氧化鋁不但製程成本低、生產率高、面積大，且製程步驟簡單，可應用於製作規則的奈米結構。為了製作不同孔洞間距的陽極氧化鋁，在此實驗中，有別於一般所使用單種酸的電解液，電解拋光後的鋁箔在不同比例的草酸/硫酸的混合溶液中，以不同的外加電壓，經由二次電解步驟來製作不同孔洞間距的規則陽極氧化鋁。陽極氧化鋁孔洞的規則性是利用掃描式電子顯微鏡(SEM)觀察得知。在此面論文中，不同孔洞間距(82, 78, 66, 63,和58nm)的陽極氧化鋁以利用不同比例草酸/硫酸混合溶液在不同外加電壓(33, 29, 26, 24,和21V)下經陽極氧化方式製作出來。在此實驗中，也利用他種酸(硝酸、醋酸)來當作電解液。

此外，利用Al/Ti/Si基板及Al/Si基板的結構，經局部電化學陽極氧化的方式，點間距為96nm的氧化鈦奈米點及間距為65nm 氧化矽奈米點也成功地在此實驗中製作出來。而我也以超薄(約100nm)多孔氧化鋁當作模板，經濺鍍及蒸鍍的方式，分別製作出點間距為100nm的規則鉑及鎳奈米點。經由800°C的退火處理，鉑的奈米點會由圓盤形縮成圓球形。最後，在本實驗中，以高深寬比的多孔性陽極氧化鋁作模板，經電化學沈積的方式合成大範圍規則且俱形狀異向磁性質的鎳奈米線。此規則奈米線裸露出來的長度可利用在氫氧化鈉溶液選擇性蝕刻的時間長短來控制。由此實驗結果可知，其他不同孔洞間距的規則陽極氧化鋁可利用此方法備製且以陽極氧化鋁做模板可以廣範地應用於製作各種低維度的規則奈米材料。

The self-organized anodic aluminum oxide mask provides low cost, high throughput, large scale and fundamentally simple processes to creat periodic nanostructures. Camparing with using the tranditional electrolytes, electropolished Al foils were anodized by two-step anodization in sulfuric/oxalic acid mixture with different proportion as electrolyte at different applied voltages to induce the ordered structure in a wilder range of interpore distance. The morphologies of these samples were examined by scanning electron microscope (SEM). In the thesis, different interpore distances (82, 78, 66, 63, and 58 nm) of ordered porous alumina were carried out by anodization in different proportional sulfuric/oxalic acid mixture solution as electrolyte at specific voltages (33, 29, 26, 24, and 21V). Other acids as electrolyte were also used in the experiment.

On the other hand, the titanium oxide nanodots with 96nm interval and silicon oxide nanodots with 65nm interval were prepared successively from Al/Ti films on silicon substrate and Al film on silicon substrate by locally electrochemical anodization. Ordered Pt and Ni nanodots arrays with spacing distance of 100nm were fabricated using ultra-thin (~100nm) porous alumina as a mask by sputter deposition and evaporation deposition, respectively. After annealing Pt particles under 800°C, the shape of Pt nanostructure changes from disc to spherical-dot shape. Moreover, large ranged of highly ordered Ni nanowires with shape anisotropic magnetic properties were synthesized by electrodeposition by using high-aspect-ratio porous alumina as template. The length of appearance nanowire tips can be easily adjusted by wet etching in NaOH solution for suitable time. This approach offers considerable versatility in the choice of materials.

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