本論文以調變偏振紅外光反射式吸收光譜儀系統為主，結合殘餘氣體分析儀量測樣品腔內水氣分壓，且可以烘烤和輝光放電方法清洗樣品，研究鋁合金樣品表面水分子的吸附。在水分子信號定量之校正實驗中，利用液態氮冷卻鋁合金樣品，以便黏滯係數近似於1，配合殘餘氣體分析儀測得水氣分壓，帶入氣體動力學公式，以估計吸附在樣品表面的水分子層數，估計出此系統之紅外光吸收訊號對水分子層數的校正因子約為12±50%。
在本實驗中，也探討了4種不同處理方法(1)以酒精加工之原樣品(2)烘烤處理(3)氬氣輝光放電清洗(4)氦氣輝光放電清洗鋁合金表面吸附水分子數量之異同，結果顯示，鋁合金經過不同處理後，水氣吸附飽和層數有所差異，以酒精加工之原樣品的吸附飽和層數約為3.3層，烘烤處理約為3層，氬氣輝光放電約為1.5層，氦氣輝光放電約為1.2層，其誤差值約為50%。從XPS表面分析結果得知，發現樣品經過輝光放電後，表面含氧量下降，顯示表面含氧量較少時，在曝水時所吸收的水分子吸附層數也較少。

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