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研究生： 林志軒
Lin, Chih Hsuan
論文名稱： 用雙色飛秒雷射合成波形研究聚甲基丙烯酸甲酯中的光消蝕現象
Laser Ablation of Polymethylmethacrylate (PMMA) by Dual-Color Femtosecond Synthesized Waveforms
指導教授： 潘犀靈
Pan, Ci Ling
口試委員: 王立康
Wang, Li Karn
賴暎杰
Lai, Yin Chieh
謝嘉民
Shieh, Jia Min
施宙聰
Shy. Jow Tsong
黃衍介
Huang, Yen Chieh
學位類別： 博士
Doctor
系所名稱： 電機資訊學院 - 光電工程研究所
Institute of Photonics Technologies
論文出版年： 2015
畢業學年度： 103
語文別： 英文
論文頁數： 160
中文關鍵詞： 聚合物 、飛秒現象 、超快雷射
外文關鍵詞： Polymers, Femtosecond phenomena, Ultrafast lasers
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    • 我們首次研究用光解離作用(所謂中間區域Keldysh參數 r ~ 1.5) 的雷射消融透明物質現象。激發光源是雙色飛秒合成波形及相對相位可操控之鈦藍寶石雷射基頻光(w)以及倍頻光(2w)。樣品為聚甲基丙烯酸甲酯(PMMA)，對w及2w 光束均為透明。用單發和多發雷射消融PMMA，我們發現非常清晰的週期性消融區域變化。此外，用單色光消融時(800 nm 或400 mn)的孵化係數k ~ 0.67，而用雙色光合成激發時k ~ 0.83，這表示了光化學過程在用雙色光合成波形消融PMMA時作用較不明顯。

    We demonstrated experimentally for the first time laser breakdown (ablation) of transparent materials through photoinonization in the intermediate regime (Keldysh paramer, r ~ 1.5) through a study of single and multi-shot femtosecond laser ablation of polymethylmethacrylate (PMMA) by using dual-color synthesized waveforms. Clear modulations in ablated areas were observed by changing the relative phase of the fundamental (ω) and second-harmonic (2ω) output of the exciting laser. Such modulation as well as the dependence of the ablation thresholds on the relative phase between the ω and 2ω beams correlate well with the theoretically predicted phase dependence of the photoionization rate. The incubation coefficient changes from 0.67 for one-color excitation (800nm or 400nm) to 0.83 for the dual-color case. This indicates that photochemical processes are not as significant for excitation by the dual-color synthesized waveform.

    中文摘要 I Abstract II 致謝 III Table of Contents V List of Figures VIII List of Tables XVII Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Thesis highlights 5 Chapter 2 Theory 7 2.1 Photoexcitation processes 7 2.1.1 Photochemical effect 8 2.1.2 Photothermal effect 9 2.1.3 Photophysical effect 11 2.2 Femtosecond ablation dynamics in intermediate region 11 2.2.1 Keldysh parameter 18 2.2.2 Inverse Bremsstrahlung absorption 21 2.2.3 Two-temperature model for free electron heating 23 2.2.4 Ablation threshold 27 2.3 Multishot ablation 30 2.3.1 Incubation effect 31 2.4 Evolution-Fokker Planck equation 32 2.5 Multiphoton effect 33 2.6 Gaussian beam measurement 36 Chapter 3 Experimental setup 38 3.1 Laser source 38 3.1.1 Laser stability and beam quality 41 3.2 Second harmonic generation 47 3.3 GVM compensating crystal 49 3.4 Power ratio experimental setup 61 3.5 Single and dual-color experimental setup 67 3.5.1 Optical components’ setup 67 3.5.2 Wedge prisms’ setup 69 Chapter 4 Results and Discussion 73 4.1 Characteristics of PMMA 73 4.2 Spatial and Temporal measurement 76 4.3 Single color ablation 78 4.3.1 Single shot 800 nm femtosecond laser ablation 78 4.3.2 Single shot 400 nm femtosecond laser ablation 81 4.3.3 Multishot 800 nm femtosecond laser ablation 82 4.3.4 Multishot 400 nm femtosecond laser ablation 86 4.4 Dual color ablation 89 4.4.1 Single shot dual color ablation 92 4.4.2 20 shots dual color ablation 97 4.4.3 50 shots dual color ablation 102 4.4.4 80 shots dual color ablation 106 4.4.5 Summary 110 4.5 Dual color power ratio experiment 112 4.5.1 Polarization-dependent of dual color ablation 120 Chapter 5 Conclusions and Future Work 122 5.1 Summary and conclusion 122 5.2 Future work 123 References 124 Publication list 134

    1. S. Baudach, J. Bonse, and W. Krautek, "Ablation experiments on polyimide with femtosecond laser pulses," Applied Physics a-Materials Science & Processing 69, S395-S398 (1999)
    2. S. Baudach, J. Bonse, J. Kruger, and W. Kautek, "Ultrashort pulse laser ablation of polycarbonate and polymethylmethacrylate," Applied Surface Science 154, 555-560 (2000)
    3. P.P. Rajeev, M. Gertsvolf, E. Simova, C. Hnatovsky, R.S. Taylor, V.R. Bhardwaj, D.M. Rayner, and P.B. Corkum, "Memory in nonlinear ionization of transparent solids," Physical Review Letters 97(25), 4 (2006)
    4. N. Sanner, O. Uteza, B. Bussiere, G. Coustillier, A. Leray, T. Itina, and M. Sentis, "Measurement of femtosecond laser-induced damage and ablation thresholds in dielectrics," Applied Physics a-Materials Science & Processing 94(4), 889-897 (2009)
    5. Y.P. Deng, X.H. Xie, H. Xiong, Y.X. Leng, C.F. Cheng, H.H. Lu, R.X. Li, and Z.Z. Xu, "Optical breakdown for silica and silicon with double femtosecond laser pulses," Optics Express 13(8), 3096-3103 (2005)
    6. I.H. Chowdhury, X. Xu, and A.M. Weiner, "Ultrafast two-color ablation of fused silica," Applied Physics a-Materials Science & Processing 83(1), 49-52 (2006)
    7. S. Zoppel, R. Merz, J. Zehetner, and G.A. Reider, "Enhancement of laser ablation yield by two color excitation," Applied Physics a-Materials Science & Processing 81(4), 847-850 (2005)
    8. T.J. Derrien, T. Sarnet, M. Sentis, and T.E. Itina, "Application of a two-temperature model for the investigation of the periodic structure formation on Si surface in femtosecond laser interactions," Journal of Optoelectronics and Advanced Materials 12(3), 610-615 (2010)
    9. M.D. Perry, B.C. Stuart, P.S. Banks, M.D. Feit, V. Yanovsky, and A.M. Rubenchik, "Ultrashort-pulse laser machining of dielectric materials," Journal of Applied Physics 85(9), 6803-6810 (1999)
    10. B. Chimier, O. Uteza, N. Sanner, M. Sentis, T. Itina, P. Lassonde, F. Legare, F. Vidal, and J.C. Kieffer, "Damage and ablation thresholds of fused-silica in femtosecond regime," Physical Review B 84(9), (2011)
    11. E. Schwarz and G.A. Reider, "Laser-induced plasma by two-color excitation," Applied Physics B-Lasers and Optics 107(1), 23-30 (2012)
    12. X. He, J.M. Dahlstrom, R. Rakowski, C.M. Heyl, A. Persson, J. Mauritsson, and A. L'Huillier, "Interference effects in two-color high-order harmonic generation," Physical Review A 82(3), 4 (2010)
    13. M. Li, W.X. Li, Y. Shi, P.F. Lu, H.F. Pan, and H.P. Zeng, "Verification of the physical mechanism of THz generation by dual-color ultrashort laser pulses," Applied Physics Letters 101(16), 3 (2012)
    14. X. Xie, J. Dai, and X.-C. Zhang, "Coherent control of THz wave generation in ambient air," Physical Review Letters 96(7), 075005 (2006)
    15. C.H. Lin, C.S. Yang, A. Zaytsev, K.C. Teng, T.H. Her, and C.L. Pan, "Ablation of polymethylmethacrylate by two-color femtosecond synthesized waveform," CLEO: Science and Innovations. San Jose, California United States, Laser-Driven Dynamics in Materials (STh4B) (2014)
    16. A.W. Miziolek, V. Palleschi, and I. Schechter, Laser induced breakdown spectroscopy. Cambridge University Press. (2006)
    17. D.B. Chrisey and G.K. Hubler, "Pulsed laser deposition of thin films," (1994)
    18. M. Bolle and S. Lazare, "Large scale excimer laser production of submicron periodic structures on polymer surfaces," Applied surface science 69(1), 31-37 (1993)
    19. Y. Kawamura, K. Toyoda, and S. Namba, "Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser," Applied Physics Letters 40(5), 374-375 (1982)
    20. R. Srinivasan and V. Mayne‐Banton, "Self‐developing photoetching of poly (ethylene terephthalate) films by far‐ultraviolet excimer laser radiation," Applied Physics Letters 41(6), 576-578 (1982)
    21. T.-F. Hong, W.-J. Ju, M.-C. Wu, C.-H. Tai, C.-H. Tsai, and L.-M. Fu, "Rapid prototyping of PMMA microfluidic chips utilizing a CO2 laser," Microfluidics and nanofluidics 9(6), 1125-1133 (2010)
    22. D. Gomez, F. Tekniker, I. Goenaga, I. Lizuain, and M. Ozaita, "Femtosecond laser ablation for microfluidics," Optical Engineering 44(5), 8 (2005)
    23. R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, and I.V. Hertel. Advanced ultrafast laser material processing using temporal pulse shaping. in LAMP 2002: International Congress on Laser Advanced Materials Processing. of Conference.: International Society for Optics and Photonics. (2003)
    24. S.R. Cain, "A PHOTOTHERMAL MODEL FOR POLYMER ABLATION - CHEMICAL MODIFICATION," Journal of Physical Chemistry 97(29), 7572-7577 (1993)
    25. R.R. Gattass and E. Mazur, "Femtosecond laser micromachining in transparent materials," Nature Photonics 2(4), 219-225 (2008)
    26. B.C. Stuart, M.D. Feit, A.M. Rubenchik, B.W. Shore, and M.D. Perry, "LASER-INDUCED DAMAGE IN DIELECTRICS WITH NANOSECOND TO SUBPICOSECOND PULSES," Physical Review Letters 74(12), 2248-2251 (1995)
    27. M. Lenzner, J. Kruger, S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, and F. Krausz, "Femtosecond optical breakdown in dielectrics," Physical Review Letters 80(18), 4076-4079 (1998)
    28. M. Li, S. Menon, J.P. Nibarger, and G.N. Gibson, "Ultrafast electron dynamics in femtosecond optical breakdown of dielectrics," Physical Review Letters 82(11), 2394-2397 (1999)
    29. D.W. Schumacher, F. Weihe, H.G. Muller, and P.H. Bucksbaum, "PHASE DEPENDENCE OF INTENSE FIELD-IONIZATION - A STUDY USING 2 COLORS," Physical Review Letters 73(10), 1344-1347 (1994)
    30. R.M. Potvliege and P.H.G. Smith, "2-COLOR MULTIPHOTON IONIZATION OF HYDROGEN BY AN INTENSE LASER FIELD AND ONE OF ITS HARMONICS," Journal of Physics B-Atomic Molecular and Optical Physics 25(11), 2501-2516 (1992)
    31. P.B. Corkum, N.H. Burnett, and F. Brunel, "ABOVE-THRESHOLD IONIZATION IN THE LONG-WAVELENGTH LIMIT," Physical Review Letters 62(11), 1259-1262 (1989)
    32. A.C. Tien, S. Backus, H. Kapteyn, M. Murnane, and G. Mourou, "Short-pulse laser damage in transparent materials as a function of pulse duration," Physical Review Letters 82(19), 3883-3886 (1999)
    33. D.W. Schumacher and P.H. Bucksbaum, "Phase dependence of intense-field ionization," Physical Review A 54(5), 4271-4278 (1996)
    34. R. Sauerbrey and G.H. Pettit, "THEORY FOR THE ETCHING OF ORGANIC MATERIALS BY ULTRAVIOLET-LASER PULSES," Applied Physics Letters 55(5), 421-423 (1989)
    35. A.V. Sokolov, D.R. Walker, D.D. Yavuz, G.Y. Yin, and S.E. Harris, "Femtosecond light source for phase-controlled multiphoton ionization," Physical Review Letters 87(3), 4 (2001)
    36. H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, "ABLATION OF POLYMER-FILMS BY A FEMTOSECOND HIGH-PEAK-POWER TI SAPPHIRE LASER AT 798-NM," Applied Physics Letters 65(14), 1850-1852 (1994)
    37. G.H. Pettit and R. Sauerbrey, "PULSED ULTRAVIOLET-LASER ABLATION," Applied Physics a-Materials Science & Processing 56(1), 51-63 (1993)
    38. C.B. Schaffer, A. Brodeur, and E. Mazur, "Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses," Measurement Science & Technology 12(11), 1784-1794 (2001)
    39. S.C. Jones, P. Braunlich, R.T. Casper, X.A. Shen, and P. Kelly, "RECENT PROGRESS ON LASER-INDUCED MODIFICATIONS AND INTRINSIC BULK DAMAGE OF WIDE-GAP OPTICAL-MATERIALS," Optical Engineering 28(10), 1039-1068 (1989)
    40. T.H. Fedynyshyn, R.R. Kunz, R.F. Sinta, R.B. Goodman, and S.P. Doran, "Polymer photochemistry at advanced optical wavelengths," Journal of Vacuum Science & Technology B 18(6), 3332-3339 (2000)
    41. D.J. Krajnovich, "Incubation and photoablation of poly(methyl methacrylate) at 248 nm. New insight into the reaction mechanism using photofragment translational spectroscopy," Journal of Physical Chemistry A 101(11), 2033-2039 (1997)
    42. S. Preuss, H.C. Langowski, T. Damm, and M. Stuke, "INCUBATION ABLATION PATTERNING OF POLYMER SURFACES WITH SUB-MU-M EDGE DEFINITION FOR OPTICAL STORAGE DEVICES," Applied Physics a-Materials Science & Processing 54(4), 360-362 (1992)
    43. L.V. Keldysh, "IONIZATION IN FIELD OF A STRONG ELECTROMAGNETIC WAVE," Soviet Physics Jetp-Ussr 20(5), 1307-& (1965)
    44. P. Balling and J. Schou, "Femtosecond-laser ablation dynamics of dielectrics: basics and applications for thin films," Reports on Progress in Physics 76(3), 39 (2013)
    45. P.J.S. Alexandra Baum, Walter Perrie, Martin Sharp, Ken G. Watkins, David Jones, Riju Issac, Dino A. Jaroszynski, "NUV and NIR Femtosecond Laser Modification of PMMA," LPM20007-the 8th International Symposium on Laser Precision Microfabrication, 1-5 (2007)
    46. K.L.N. Deepak, S.V. Rao, and D.N. Rao, "Femtosecond laser micro fabrication in polymers towards memory devices and microfluidic applications," Laser-Induced Damage in Optical Materials: 2011 8190, 13 (2011)
    47. M.J. DeWitt and R.J. Levis, "Calculating the Keldysh adiabaticity parameter for atomic, diatomic, and polyatomic molecules," The Journal of chemical physics 108(18), 7739-7742 (1998)
    48. T. Brabec and F. Krausz, "Nonlinear optical pulse propagation in the single-cycle regime," Physical Review Letters 78(17), 3282 (1997)
    49. L. Schlessinger and J. Wright, "Inverse-bremsstrahlung absorption rate in an intense laser field," Physical Review A 20(5), 1934 (1979)
    50. A. Vogel, J. Noack, G. Hüttman, and G. Paltauf, "Mechanisms of femtosecond laser nanosurgery of cells and tissues," Applied Physics B 81(8), 1015-1047 (2005)
    51. L. Jiang and H.-L. Tsai, "A plasma model combined with an improved two-temperature equation for ultrafast laser ablation of dielectrics," Journal of Applied Physics 104(9), 093101 (2008)
    52. N. Singh, "Two-temperature model of nonequilibrium electron relaxation: A review," International journal of modern physics b 24(09), 1141-1158 (2010)
    53. J. Cheng, C.S. Liu, S. Shang, D. Liu, W. Perrie, G. Dearden, and K. Watkins, "A review of ultrafast laser materials micromachining," Optics and Laser Technology 46, 88-102 (2013)
    54. P. Mannion, J. Magee, E. Coyne, and G.M. O'Connor. Ablation thresholds in ultrafast laser micromachining of common metals in air. in Opto Ireland. of Conference.: International Society for Optics and Photonics. (2003)
    55. E. Gamaly, A. Rode, B. Luther-Davies, and V. Tikhonchuk, "Ablation of solids by femtosecond lasers: Ablation mechanism and ablation thresholds for metals and dielectrics," Physics of Plasmas (1994-present) 9(3), 949-957 (2002)
    56. B.C. Stuart, M.D. Feit, S. Herman, A.M. Rubenchik, B.W. Shore, and M.D. Perry, "Nanosecond-to-femtosecond laser-induced breakdown in dielectrics," Physical Review B 53(4), 1749-1761 (1996)
    57. V.M. Graubner, R. Jordan, O. Nuyken, T. Lippert, M. Hauer, B. Schnyder, and A. Wokaun, "Incubation and ablation behavior of poly(dimethylsiloxane) for 266 nm irradiation," Applied Surface Science 197, 786-790 (2002)
    58. D. Ashkenasi, M. Lorenz, R. Stoian, and A. Rosenfeld, "Surface damage threshold and structuring of dielectrics using femtosecond laser pulses: the role of incubation," Applied Surface Science 150(1-4), 101-106 (1999)
    59. G.B. Blanchet, P. Cotts, and C.R. Fincher, "Incubation: Subthreshold ablation of poly-(methyl methacrylate) and the nature of the decomposition pathways," Journal of Applied Physics 88(5), 2975-2978 (2000)
    60. C.S. Yang, C.H. Lin, A. Zaytsev, K.C. Teng, T.H. Her, and C.L. Pan, "Femtosecond laser ablation of polymethylmethacrylate via dual-color synthesized waveform," Applied Physics Letters 106(5), 051902 (2015)
    61. A. Gupta, R. Liang, F.D. Tsay, and J. Moacanin, "CHARACTERIZATION OF A DISSOCIATIVE EXCITED-STATE IN THE SOLID-STATE - PHOTOCHEMISTRY OF POLY(METHYL METHACRYLATE) - PHOTOCHEMICAL PROCESSES IN POLYMERIC SYSTEMS .5," Macromolecules 13(6), 1696-1700 (1980)
    62. T. Kaino, "ABSORPTION LOSSES OF LOW-LOSS PLASTIC OPTICAL FIBERS," Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers 24(12), 1661-1665 (1985)
    63. H. Schmidt, J. Ihlemann, B. Wolff-Rottke, K. Luther, and J. Troe, "Ultraviolet laser ablation of polymers: spot size, pulse duration, and plume attenuation effects explained," Journal of Applied Physics 83(10), 5458-5468 (1998)
    64. S. Lazare and V. Granier, "ULTRAVIOLET-LASER PHOTOABLATION OF POLYMERS - A REVIEW AND RECENT RESULTS," Laser Chemistry 10(1), 25-40 (1989)
    65. R. Srinivasan, E. Sutcliffe, and B. Braren, "ABLATION AND ETCHING OF POLYMETHYLMETHACRYLATE BY VERY SHORT (160 FS) ULTRAVIOLET (308 NM) LASER-PULSES," Applied Physics Letters 51(16), 1285-1287 (1987)
    66. R. Srinivasan, "ABLATION OF POLYMERS AND BIOLOGICAL TISSUE BY ULTRAVIOLET-LASERS," Science 234(4776), 559-565 (1986)
    67. A.A. Serafetinides, M. Makropoulou, E. Fabrikesi, E. Spyratou, C. Bacharis, R.R. Thomson, and A.K. Kar, "Ultrashort laser ablation of PMMA and intraocular lenses," Applied Physics a-Materials Science & Processing 93(1), 111-116 (2008)
    68. C. De Marco, S.M. Eaton, R. Suriano, S. Turri, M. Levi, R. Ramponi, G. Cerullo, and R. Osellame, "Surface Properties of Femtosecond Laser Ablated PMMA," Acs Applied Materials & Interfaces 2(8), 2377-2384 (2010)
    69. K.J. BAUDACH S., KAUTEK W., "Femtosecond Laser Processing of Soft Materials," The Review of Laser Engineering 29(11), 5 (2001)
    70. J. Kruger, S. Martin, H. Madebach, L. Urech, T. Lippert, A. Wokaun, and W. Kautek, "Femto- and nanosecond laser treatment of doped polymethylmethacrylate," Applied Surface Science 247(1-4), 406-411 (2005)
    71. M. Okoshi and N. Inoue, "Laser ablation of polymers using 395 nm and 790 nm femtosecond lasers," Applied Physics a-Materials Science & Processing 79(4-6), 841-844 (2004)
    72. J.R. Nam, K.S. Lim, and S.C. Jeoung, "Femtosecond laser ablation of polymethylmethacrylate doped with dye molecules and formation of a grating structure," Journal of the Korean Physical Society 52(5), 1661-1664 (2008)
    73. D. Klinger, R. Sobierajski, R. Nietubyc, J. Krzywinski, J. Pelka, L. Juha, M. Jurek, D. Zymierska, S. Guizard, and H. Merdji, "Surface modification of polymethylmethacrylate irradiated with 60 fs single laser pulses," Radiation Physics and Chemistry 78, S71-S74 (2009)
    74. J.M. Guay, A. Villafranca, F. Baset, K. Popov, L. Ramunno, and V.R. Bhardwaj, "Polarization-dependent femtosecond laser ablation of poly-methyl methacrylate," New Journal of Physics 14, (2012)
    75. F. Baset, K. Popov, A. Villafranca, J.M. Guay, Z. Al-Rekabi, A.E. Pelling, L. Ramunno, and R. Bhardwaj, "Femtosecond laser induced surface swelling in poly-methyl methacrylate," Optics Express 21(10), 12527-12538 (2013)
    76. S. Zoppel, J. Zehetner, and G.A. Reider, "Two color laser ablation: Enhanced yield, improved machining," Applied Surface Science 253(19), 7692-7695 (2007)
    77. S. Kuper and M. Stuke, "FEMTOSECOND UV EXCIMER LASER ABLATION," Applied Physics B-Photophysics and Laser Chemistry 44(4), 199-204 (1987)
    78. B.C. Stuart, M.D. Feit, S. Herman, A.M. Rubenchik, B.W. Shore, and M.D. Perry, "Optical ablation by high-power short-pulse lasers," Journal of the Optical Society of America B-Optical Physics 13(2), 459-468 (1996)

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