本實驗分為兩部分，第一部分為了去除矽酸鈉中的鈉離子，將溶液經過SK1BH陽離子交換數脂過濾形成H2SiO3，使用固定氯化鋁溶液體積加入不同比例的H2SiO3來形成AlSiO3，來塗佈於太陽能電池背部，透過高溫退火來形成氧化鋁薄膜，產生鈍化的效果。實驗中進行少數載子壽命量測實驗，找到最佳退火溫度，再使用XPS縱深分析來檢測薄膜的元素與厚度。

第二部分要找出最佳退火溫度，分別將氧化鋁薄膜進行高溫退火與低溫退火，分別將不同退火溫度進行外部量子效率與效率的量測。SEM量測中使用兩種不同鋁漿來進行實驗，實驗組部分使用PERC鋁漿，參考組部分使用一般鋁漿。以氧化鋁薄膜做為鈍化層，最佳效率退火參數為550℃、10分鐘，使用背部柵狀網版來使背部形成局部背部電場，正面使用致嘉科技公司提供的銀漿漿料來進行電池的製作，最後PERC太陽能電池效率達到12.6%。

In order to remove Na^+ ions in the sodium silicate, the solution was filtered through the SK1BH cation exchange resin to form H2SiO3. An amount of H2SiO3 solution was added to a fixed volume of AlCl3 solution, and the mixed solution was coated on the rear side of a solar cell, and then dried to form a film containing AlSiO3. Afterwards this film went through two steps of thermal processes. In the experiment, lifetime measurements were performed to find the optimum annealing temperature, and XPS measurement was used to estimate the elements and thickness of the deposited film.

The AlSiO3 film was, respectively, subjected to high temperature annealing and low temperature annealing. The EQE and the I-V curve were measured at different annealing temperatures. In the SEM measurement, two kinds of aluminum pastes were used. The experimental group was that using a PERC aluminum paste, and the reference group was that using a normal aluminum paste. We used our aluminum oxide layer as the rear side passivation layer, and the optimum annealing temperature is 550℃ for 10 minutes. The back-side grid-pattern aluminum paste was screen printed, and was found to form local surface field after co-fired with the front-side silver paste. Finally, we got a conversion efficiency of 12.6% for the PERC silicon solar cell in comparison with that of 10.8% for the reference cell.

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