以超臨界流體去除晶圓上之光阻｜國立清華大學博碩士論文庫

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研究生：	丁耀柏 Yau-Bo Ding
論文名稱：	以超臨界流體去除晶圓上之光阻 Photoresist Stripping by Supercritical Fluid
指導教授：	談駿嵩
口試委員:
學位類別：	碩士 Master
系所名稱：	工學院 - 化學工程學系 Department of Chemical Engineering
論文出版年：	2005
畢業學年度：	93
語文別：	中文
論文頁數：	91
中文關鍵詞：	光阻、超臨界流體
相關次數：	點閱：3 下載：0
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當半導體元件尺寸愈接近奈米等級時，使用傳統的濕式或乾式清洗的方式進行光阻劑的去除將愈來愈難。不僅如此，傳統去除光阻之方法不僅十分耗費日益珍貴的水資源，也需要使用十分大量且具有危險性的化學物質。而超臨界流體幾乎沒有表面張力且黏度極低，使得超臨界流體能更貼近物體表面，因而與現有的技術相比，更能滲入高深寬比的溝渠將光阻劑完全去除。而且以超臨界二氧化碳作為光阻去除時，由於容易取得且安全並符合環保要求，對於化學藥劑的減量也有相當程度的增益。
本研究是使用超臨界二氧化碳作為載體，利用其可膨潤(Swelling)光阻高分子的特性，再搭配共溶劑對光阻高分子產生氧化、溶解、侵蝕等作用，來破壞高分子結構之完整性，此外亦利用半連續式與批式增減壓之操作來加強上述之效應，進一步的將光阻剝除於晶圓的表面，達到剝除光阻的目的。
本研究亦採用了直接噴灑的操作方式，藉由其高動量及共溶液與光阻層直接接觸的效果來對光阻進行剝除。結果顯示對酚醛樹脂光阻與壓克力樹脂光阻中的剝除效果皆十分理想，能夠在短時間內即達到將光阻層大部分剝除的效果。

摘要                                  Ⅰ
目錄                                  Ⅱ
表目錄                             Ⅳ
圖目錄                        Ⅴ
第一章 緒論                               1
第二章 文獻回顧                               4
    2-1超臨界流體簡介                      4
        2-2光阻簡介             5
             2-3現行的光阻去除技術    8
    2-4 目前清洗方法所遇到之問題         9
    2-5 SCORR製程介紹                      11
    2-6 基底                               14
    2-7 共溶劑                      15
    2-8 操作方式                      16
    2-9 操作溫度與壓力                      17
    2-10 Snow 簡介                      19
    2-10-1 Snow生成原理             19
    2-10-2 Snow 清洗機制             20
第三章 實驗方法                          40
    3-1 光阻剝除實驗                      40
    3-1-1 實驗前置步驟                      40
    3-1-2 非直接噴灑連續式流動實驗    41
    3-1-3 非直接噴灑增減壓混合式實驗    41
    3-1-4 直接噴灑實驗                      42
    3-2   分析方法                      43
    3-3   實驗儀器                      43
    3-4 實驗藥品與晶圓樣品             45

第四章 實驗結果與討論                      53
    4-1 酚醛樹脂光阻實驗結果             53
    4-1-1 非直接噴灑操作實驗結果    53
    4-1-1-1 不同共溶劑之實驗結果    53
    4-1-1-2 不同高低壓滯留時間之影響    56
    4-1-2 直接噴灑操作實驗結果             56
    4-1-2-1 不同共溶劑下對於實驗之結果    57
    4-1-2-2 不同溫度下對於實驗之結果    58
    4-1-2-3 不同壓力下對於實驗之結果    58
    4-1-2-4 不同噴頭角度下對於實驗之結果    59
    4-2壓克力樹脂型光阻實驗結果             59
    4-2-1直接噴灑操作實驗結果             60
第五章 結論                               85
參考文獻                                        87

                                

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