對於半導體晶圓製造而言，影響產出量及良率的因素有很多，其中之一便是等候時間限制。在特定製程間會有等候時間之限制，前製程完成後需於特定等候時間限制內進入後製程，超過此一時限會產生品質問題，需進行重工損耗產能。但是晶圓生產所具有的加工特性，如批量加工、重工、回流、等候時間限制、及漫長的生產週期，都增加了生產管理的複雜度，這使得發展一套方法來減少重工並提高產出變得相當困難。如果一個批量在來到特定的製程段前端，能事先預知此批量進行加工後是否會超過等候時間限制，則可避免重工及報廢的發生，減少產能的浪費而提高產出。有鑑於此，有必要發展一套在此複雜的環境中，能提高產量的批量放行法則。
本論文針對半導體生產製程中的某段製程，加工步驟與步驟間具有等候時間限制，在多產品、多途程、多工作站、平行加工機台的環境，且具有重工及回流的特性下，提出以模擬為基礎的批量放行法則，目的在預防晶圓在加工過程中，因超過等候時間限制所造成重工或報廢，除了能節省生產成本，也提高了良率和產出量。
經過模擬實驗的結果分析，發現以模擬為基礎的批量放行法，在不同的環境設置下，均比先進先出法，更能提高產量。從此結果可知以模擬為基礎的批量放行法，在具有等候時間限制下，對於產出具有一定的效益。

As far as the wafer fabrication process is concerned, there are many factors affecting the throughput and yield rate. One of them is the “Queue-Time-Limit”. Certain process steps have the queue-time-limit, which means a lot needs to begin the following process step within certain time limit after it completes its operation of the previous process step. If a lot exceeds the queue-time-limit, quality issues will occur and the lot needs to be reworked. This will waste the machine capacity. The characteristics of the wafer fabrication process, like rework, re-entrant, queue-time-limit, and long production cycle time, make the production management difficult. If a lot arrives for a certain process step, the manager can prevent the lot from rework if he can foresee whether the lot will exceed queue-time-limit or not in advance. Once the rework can be reduced, the throughput of the fab will be increased. Therefore, it is necessary to develop a lot permission rule to determine whether a lot should go or not in advance in this complicated production environment.
This research focuses on certain process steps having the queue-time-limit between some steps of the whole wafer production steps,. We propose a methodology called simulation-based lot permission rule (SBLP) in a multi-product, multi-route, multi-workstation, multi-machine environment with rework and re-entrant features. The purpose of SBLP is to prevent the lot from rework, saving the capacities of machines, thus to increase throughput.
After simulation experiments, the results show that SBLP outruns FCFS in many environment settings like different demand-to-capacity ratios and different queue-time-limit levels. Therefore, we conclude that SBLP has significant effects on throughput.

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