本文將對應力不穩定(stress instability)之應用、破裂導致微結構(fracture-induced structuring，FIS)之殘留表面應力、薄膜/基材系統之殘留應力、加馬射線材料改質與其退火動力學及破裂導致微結構之機制，進行一系列之奈米科技相關研究探討。
首先以應力不穩定方式在PDMS(polydimethylsiloxane)基材上製作金薄膜之週期性波紋(wrinkling)微結構，由於該Au/PDMS波紋表面上同時具有裂縫與類差排之缺陷，故得以破裂力學理論研究裂縫在Au/PDMS波紋表面之傳播受類差排的影響。結果顯示裂縫與類差排間的交互作用是由類差排所產生的內部應力場所造成，我們並以冪次法則求得裂縫傳播速度與交互作用所產生的裂縫擴展力之間的經驗關係式。證實該方式可做為差排理論與破裂理論之實驗佐證的應用。
第二部份中先初步探討破裂導致微結構之微奈米結構成型現象，再進一步以表面應力理論(surface stress theory)推導分析，推導出表觀(apparent)表面應力、微結構空間週期與薄膜膜厚之間關係的解析解，分析殘留表面壓應力對此一高分子薄膜表面形貌演化的影響。並將破裂導致微結構的實驗數據帶入理論之解析解，計算表觀表面應力與膜厚之間的相關性；其結果顯示表觀表面應力的大小隨著膜厚的縮減而下降，最後當膜厚趨近於零時，表觀表面應力將達到定值。若將表觀表面應力之值與高分子薄膜表面能進行比較，發現表面能之值是相對上很小的，顯見高分子薄膜表面能並非影響高分子薄膜在破裂導致微結構中形成表面形貌演化的影響因素。
再來由於薄膜/基材系統中的殘留應力在奈米技術中亦是相當重要的，故我們用微機電系統(microelectromechanical，MEMS)加工方式製作氮化矽(silicon nitride，SiNx)微懸臂梁(microcantilever)，然後在兩種不同溫度中以蒸鍍方式鍍上微奈米尺度膜厚之鋁薄膜後，以曲率量測的方式研究鋁/氮化矽(Al/SiNx)之薄膜/基材系統的殘留應力。發現室溫鍍鋁之微懸臂梁因鋁薄膜中的殘留壓應力而向氮化矽基材方向偏折；而105°C鍍鋁之微懸臂梁則會在薄膜對基材厚度比大於等於0.31時，在鋁薄膜中產生殘留張應力使得微懸臂梁向鋁薄膜方向偏折。其它力學上的特性如中性軸與彎曲軸也有一併探討。
材料改質的研究則是以照射加馬射線(gamma-ray)來進行。我們使用電子順磁共振光譜(electron paramagnetic resonance，EPR)研究不同的加馬射線劑量照射後，對排聚苯乙烯(syndiotactic polystyrene，sPS)之自由基的形成與溫度相依的退火衰退機制。EPR光譜分析顯示sPS經加馬射線照射後有三種自由基形成，分別為三級苯基自由基(tertiary benzyl radical)、苯自由基(phenyl radical)與碳□超氧自由基(carbon-superoxide-centered radical)；且此三種自由基皆遵循一階退火動力學機制，並以動力學理論分析計算這三種自由基之活化能。
最後我們研究破裂導致微結構之條紋(grating)週期性微結構的破裂機制，實驗證實高分子薄膜上條紋週期性微結構之破裂方向遵循由外加分離負載(separating-load)所產生的平面最大剪應力的方向；並探討局部應力與其變動對條紋週期性微結構的空間週期與方向之影響。本部份亦探討破裂導致微結構之破裂成型特性，例如經加馬射線進行材料改質後之效應。並經由適當的分離負載之型式與高分子型狀/邊界條件之設計，以破裂導致不穩定方式製做出四分之ㄧ同心圓形條紋週期性微結構；證實本研究已可操控破裂導致微結構在高分子薄膜上的方向。期望破裂導致微結構得以更廣泛的應用在奈米科技。

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