這項工作展示了基於氮化鋁的壓電加速度計及其基於電壓放大器配置的介面電路，用於振動監
測系統。從微小到宏觀尺度的振動，在系統、設備或機器的構成中都起著重要作用，因此檢測
和早期診斷有助於預防性維護。為了實現這一點，開發一個整合性振動監測模組是必要的。在
這項工作中，實現了兩種不同類型的樑設計，並使用 COMSOL Multiphysics 進行有限單元模
擬。為了對它們的靈敏度性能進行公平比較，z 軸頻率保持在相同的 28kHz，傳統設計的靈敏
度為 1.3mV/g，而雙樑設計達到了 2.2mV/g。
該加速度計是通過內部製程實現的，製造的佈局使用 L-Edit 軟件設計，其中所有外部電極相
互連接，所有內部電極也相互連接，並有一個接地電極。製造的設備釋放後，其 z 軸模式被
實現，並使用 LDV 測量觀察到共振頻率。壓電加速度計的介面電路通常有兩種結構，即電荷
放大器和電壓放大器。在這項工作中，介面電路的實現是使用電壓放大器，設計的電壓放大器
分為單電源結構和雙電源結構。電路設計是使用 LTSpice 軟件進行的，並通過分析交流和瞬
態響應來模擬增益和帶寬，模擬了增益為 100、頻寬下限為 40Hz、上限為 14.2kHz 的情況。
為進行實際驗證，在印刷電路板上實現了兩種電壓放大器模式，並使用示波器和鎖相放大器進
行測量，以驗證模擬結果。
MEMS 和單電源放大器配置的介面電路一起連接在 PCB 上，使用振動台測量系統測量
其性能，在不同的 g 值下線性獲得模組的輸出靈敏度為 12.22mV/g。使用黏土增加模
組的剛性，將共振峰從 1kHz 移至 2kHz。使用信號分析儀分析噪聲底，獲得噪聲底值
為 70.6dBm 或 295μg/√Hz。
基於 AlN 的壓電加速度計和介面電路的開發已通過不同的測量方法進行了實現、模擬
和驗證。

This work presents the realization of Aluminium Nitride based piezoelectric accelerometer and
interface circuit based on voltage amplifier configuration for vibration monitoring system,
vibration for small micro scale to macro can play a major role in the composure of a system,
device or machine, thus detection and early diagnosis help in preventive maintenance. To
realise this development of a compact vibration monitoring module is required. In this work
two different types of beam design are realised and finite element simulation is carried out
using COMSOL Multiphysics, to have a fair comparison between their sensitivity
performances the z-axis frequency is kept same at a value of 28𝑘𝐻𝑧 with sensitivity of
conventional at 1.3𝑚𝑉/𝑔 and a value of 2.2𝑚𝑉/𝑔 is obtained for the dual beam design.
The designed accelerometer is realised by the in-house fabrication process, the layout for the
fabrication is designed using L-Edit software, where all the external electrodes and connected
together and all the inner electrodes are connected together and an electrode for connecting the
ground. The fabricated devices are released and their z-axis mode is realised and resonance
frequency is observed using LDV measurement. The interface circuit for piezoelectric
accelerometer is generally of two topologies, which are charge and voltage amplifier. In this
work the interface circuit realisation is done using the voltage amplifier topology, the designed
voltage amplifier is of two types which are single supply topology and dual supply topology.
The design of the circuits is done using LTSpice software and simulation for gain of 100 and
bandwidth of lower cut-off value of 40𝐻𝑧 and higher cut-off value of 14.2𝑘𝐻𝑧 is performed
by analysing AC and transient response, to have practical verification, the two voltage amplifier
modes are realised on printed circuit board and measurement results using oscilloscope and
Lock-In is done to verify the simulation results. The MEMS and interface circuit with single
supply amplifier configuration together is connected on PCB and their performance is
measured using shaker measurement system with output sensitivity of 12.22𝑚𝑉/𝑔 of the
module is obtained linearly under different g. The implement of clay is done to add more
rigidity to the module which shifts the resonance peak from 1𝑘𝐻𝑧 to 2𝑘𝐻𝑧. The noise floor is
analysed using the signal analyser which provide the noise floor value of 70.6𝑑𝐵𝑚 or
295𝜇𝑔/√𝐻𝑧 is obtained.
The development of AIN based piezoelectric accelerometer and interface circuit is realised and
simulated and verified using different measurement approach.

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