本論文旨在以設計鎖相迴路並製作出一個讓微掃描鏡面穩定成像之電路。成功展示利用鎖相迴路輸出並經由高壓放大器驅動微掃描鏡面，並由感測電路得知微掃描鏡面之共振頻率。由量測之結果證明鎖相迴路具有在一定的頻寬下鎖頻並藉由此特性將可在不同環境或是製程誤差下，結構共振頻率都會有所偏移之情況下，穩定影像。
此論文中，鎖相迴路具備前述所提到的一定的頻寬下都可以鎖頻，規格為電壓操作在5V、電流為2.56mA以及鎖相迴路頻寬為42.5-46.5KHz。此晶片面積大小為2x2 mm2。微掃描鏡面快軸掃描軸其共振頻為45.6KHz。
鎖相迴路方面，以類比式與數位式的設計做為此次的研究架構，主要是由相位偵測器(Phase Detector)、壓控震盪器(VCO)、除頻器(÷ N)以及低通濾波器(Low Pass Filter)所組成。
關鍵字:鎖相迴路、微掃描鏡面

This paper design and produce a phase-locked loop allows stable imaging of scanning micromirror circuit. Successfully demonstrated the use of phase-locked loop output via high-voltage amplifier to drive scanning micromirror and sensed that micromirror of the resonance frequency. The measured results show that the phase-locked loop has locked in a certain bandwidths and this feature will be available in different environments or process error, the images will stable.
That a phase-locked loop mentioned above have certain bandwidths can be locked, voltage operation at 5V, current of 2.56mA and a phase-locked loop bandwidth is 42.5-46.5KHz. This chip area size is 2x2 mm2. Fast scan axis scanning micromirror its resonant frequency of 45.6KHz.
PLL that analog and digital design as the research framework, mainly by the phase detector (Phase Detector), voltage-controlled oscillator (VCO), divider (÷ N) and the low pass filter formed.
Keywords: phase-locked loop, scanning micromirror

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