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研究生： 彭胤瑋
Peng, Yin-Wei
論文名稱： 高效率矽晶太陽能電池之設計、製造、特性分析及關鍵製程開發
Design, Fabrication, Characteristics Analysis and Key Technology Development of High Efficiency Silicon Solar Cells
指導教授： 甘炯耀
Gan, Jon-Yiew
口試委員: 李紫原
Lee, Chi-Young
余沛慈
Yu, Peichen
陳昇暉
Chen, Sheng-Hui
黃崇傑
Huang, Chorng-Jye
學位類別： 博士
Doctor
系所名稱： 工學院 - 材料科學工程學系
Materials Science and Engineering
論文出版年： 2019
畢業學年度： 108
語文別： 中文
論文頁數： 122
中文關鍵詞： 高效率矽晶太陽能電池 、鈍化射極與背面電池 、交趾式太陽能電池 、網印
外文關鍵詞： high-efficiency c-Si solar cells, PERC, IBC, screen printing
相關次數： 點閱：3  下載：0 
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    • 隨著綠能紀元的到來，我們似乎可以預見太陽能光伏產業未來的繁景。而為了加速光伏產業的進程，產界與學界都不斷地在尋求創新的高效電池結構以及具有成本競爭力的電池製程，以期在成本上得以對抗現行的燃煤發電。從學理的角度來看，如果太陽能模組可以結合一套優異的儲能系統，那麼全世界的能源需求都能夠由太陽能光伏來負擔。若以20%的太陽能模組為例，要滿足全球的能源需求僅需小於2%地球土地的安置面積就能夠達成。但就像現行所有的商品化產品一樣，成本的考量對光伏產業而言也總是排在第一順位。對太陽能光伏系統來說，它的建置成本有一部份是取決於組成模組的單片太陽能電池的效率，而要降低單片電池製造成本的最佳手段就是提升電池本身的效率。簡而言之，一個具有經濟效應的太陽能發電系統需要由高效且低成本的太陽能電池來組成。

    本論文的主題有以下幾項：(1)推演出單接面電池與堆疊型電池的理論效率極限；(2)利用主流的PERC電池技術製作高效率的n型IBC電池；(3)檢驗IBC解析方程與量測數據之間的兼容性；(4)多晶矽鈍化接觸結構的製作與模擬分析。

    本論文對現今光伏產業的重要貢獻在於，我們證明了高效率的IBC電池可以透過便宜的網印技術製作出來。透過採用主流的PERC電池生產技術，我們製備出了有效面積為100公分平方且光電轉換效率超過22%的網印型IBC電池。這在所有含有Al合金化射極的IBC電池的相關報導中，我們所製備的perc-IBC的電池性能在目前位居首位。另外，我們也發覺perc-IBC電池的一些重要特性(如JSC、VOC、RS)都可以透過解析方程進行解構，並獲得很好的一致性。此外，我們也透過計算出ρC-J0之間的權衡關係來找出多晶矽鈍化接觸結構的有效應用區間，同時，鈍化接觸結構的長時間穩定性則透過光電導衰減法的量測手段進行監測。

    With the advent of the green age, the prosperity of solar photovoltaics (PV) can be well imagined. To further quicken the pace of solar PV progress, scientists and researchers are seeking innovative ideas and cost-competitive fabrication process for high-efficiency cells to fight existing coal-generated electricity. In principle, combining with an outstanding energy storage solution, the worldwide energy need can be fully met by solar PV. If we choose a solar module with an efficiency of 20% to build a solar PV system, it takes only less than 2% of Earth’s land area to fulfill the global energy need. Like other business activities, the price or the manufacturing costs are always the primary consideration for solar PV industry. And because the cost of solar PV systems is partly determined by the cost of solar cells, therefore to continue the success story of this solar PV working horse, the most certain way to reduce the production costs is to increase solar cell’s power conversion efficiencies. Briefly, an economical solar power systems require high efficiency, low-cost solar cells.

    This thesis covers some topics: (1) derivation of the theoretical efficiency limit for single-junction and multi-junction silicon solar cells based on Shockley-Queissier model; (2) design, fabrication, and characterization of the high efficiency n-Si IBC solar cells using mainstream PERC (passivated emitter and rear contact) process; (3) examination of the compatibility between the electrical characteristics of IBC solar cells and the physics-based analytical model; and (4) fabrication and simulation of the polysilicon passivating contacts.

    One of the important contributions of this thesis to solar PV research field is to prove that the high-efficiency IBC solar cells can be achieved with the economic friendly screen-printing technique. By exploiting PERC process for cell fabrication, we fabricate a proof-of-concept 100 cm2 SP-IBC solar cell with a conversion efficiency over 22%. This device performance is at present the best reported for back-contacted solar cells with Al-alloyed emitter based on traditional IBC schemes. Moreover, a good agreement is found between the measured data and the analytical model and therefore the developed model can serve as a powerful tool for further optimization study of the electrode pattern layout. Subsequently, the useful application range of passivating contacts is identified by a subtle relationship between the specific contact resistance (ρC) and the saturation current density (J0). Concurrently, the passivation stability of passivating contacts is monitored by photoconductance decay (PCD) measurement and shown here. This allows us to assess whether the passivating contacts are suitable for long-term usage.

    摘要 I Abstract II 致謝辭 III 總目錄 V 圖目錄 VII 表目錄 X 第一章 論文簡介與研究動機 1 1.1 前言 1 1.2 研究動機與論文導論 2 第二章 高效率矽晶太陽能電池之概述與展望 8 2.1 太陽能電池之理論極限計算－SHOCKLEY-QUEISSER LIMIT 8 2.1.1 短路電流密度極限 9 2.1.2 復合電流密度極限 12 2.1.3 開路電壓極限 14 2.1.4 填充因子極限 15 2.1.5 轉換效率極限 18 2.2 現行高效率矽晶太陽能電池之回顧與現況發展 22 2.2.1 鈍化射極與背面電池(Passivated Emitter and Rear Cell, PERC) 22 2.2.2 穿隧氧化層鈍化接觸電池(Tunnel Oxide Passivated Contact, TOPCon) 23 2.2.3 異質接面電池(Heterojunction with Intrinsic Thin layer, HIT) 25 2.2.4 交趾式背接觸電池(Interdigitated Back Contact, IBC) 25 2.2.5 異質接面背接觸電池(Heterojunction with interdigitated Back Contacts, HBC) 26 2.3 總結與展望 27 第三章 矽基堆疊型太陽能電池 29 3.1 堆疊型太陽能電池 29 3.2 雙層矽基堆疊型太陽能電池 33 3.3 總結與現行光伏產業的突破口 40 第四章 PERC-IBC電池之設計、製造與光電特性鑑定 42 4.1 前言 42 4.2 實驗 43 4.3 結果 48 4.3.1 電池的表面鈍化特性與晶片生命週期檢測 48 4.3.2 電池特性 50 4.4 分析與討論 52 4.4.1 p-IBC和n-IBC的比較 52 4.4.2 J01與 J02的的估算與驗證 52 4.4.3 RS與 RSH的的估算與驗證 55 4.4.4 JL的估算與驗證 57 4.4.5 perc-IBC電池的展望 62 4.5總結 63 第五章 多晶矽鈍化接觸結構之製作與模擬研究 64 5.1 前言 64 5.1.1 鈍化接觸技術之發展緣由與概述 64 5.1.2 鈍化接觸技術之理論背景 66 5.2 界面氧化層完整性對復合電流J0與特徵接觸電阻ρC的影響 67 5.2.1 氧化層厚度對ρC的影響 67 5.2.2 氧化層厚度對J0的影響 71 5.2.3 非完整氧化層的ρC-J0關係 73 5.3 鈍化接觸結構的長期穩定性 77 5.4 總結79 第六章 結論 80 參考文獻 82 Appendix A: Effective Lifetime Measurements in Silicon for Photovoltaic Applications 95 Appendix B: Analytical Model for Interdigitated Back Contact Silicon Solar Cells 107

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