摘要

由於弱相位物的低影像對比，造成生物試片或是輕元素材料試片不易在穿透式電子顯微鏡下觀察，雖然在傳統TEM下可藉著大量的離焦方法來提升影像對比，但會喪失解析度導致影像模糊，故發展靜電式相位板在保有解析度的情況下提升影像上的相位對比。我們的靜電式相位板是由Au/Si3N4/Au/Si3N4/Au五層所構成的單根懸臂樑結構，經由外加電壓的控制，將於相位板內部形成一均勻靜電場，並且改變穿透電子束π/2相位，進而提升影像上的對比。
在2006年，我們的靜電式相位板首先成功的分辨出SiONx與SiO2的介面，並且於2009年間再度提升了鐵蛋白的影像對比，但不論是薄膜式相位板或靜電式相位板，電荷累積皆是目前實驗上所遭遇到的最大問題。在本篇論文中，我們歸納出會導致靜電式相位板電荷累積的三個因素：二次電子的產生、電子束與Si3N4的作用以及汙染物的生成， 並針對這三種因素提出方法來一一改善，務求使電荷累積的問題不再產生。

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