壓電致動器具有位移解析度高、運動響應快、低耗能等特性，時常被用在奈米級的精密定位。但其固有的非線性特性，會使控制系統響應變差，甚至不穩定。因此本文將建構壓電致動器模型，以補償其非線性項的影響。造成壓電致動器有非線性特性的因素有兩個：磁滯效應與潛變效應。本文將利用麥斯威爾磁滯模型與鍵結圖來建構磁滯模型，並利用伯格模型來建構潛變模型。基於磁滯效應與潛變效應耦合的觀念下，將此二模型結合成壓電致動器模型，以能同時補償潛變效應和磁滯效應所引起的非線性特性。

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