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研究生: 鄧茂英
Teng Mao-ying
論文名稱: 以有機催化劑成長奈米碳管之研究
Study on the growth of carbon nanotubes prepared by organic catalyst
指導教授: 劉國雄
Liu Kuo-Shung
林諭男
Lin I-Nan
口試委員:
學位類別: 博士
Doctor
系所名稱: 工學院 - 材料科學工程學系
Materials Science and Engineering
論文出版年: 2005
畢業學年度: 93
語文別: 中文
論文頁數: 145
中文關鍵詞: 奈米碳管有機催化劑鑽石膜鑽石粉末
外文關鍵詞: carbon nanotube, organic catalyst, diamond film, diamond particle
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  • 本論文主要是利用有機催化劑的方式,來催化成長奈米碳管,不同的過渡金屬催化劑會表現出不同之效果,而同一種催化劑亦會因為一些外在環境狀況的不同而有不同之催化能力。
    在本論文中,利用鑽石做為成長奈米碳管(碳纖維)的碳源,這裡的鑽石包括了鑽石粉末以及鑽石膜兩種。在含有鑽石的基材上添加催化劑(過渡金屬元素)來成長奈米碳管(碳纖維)。在取得的鑽石膜和購買的奈米鑽石粉末試片分別濺鍍上鐵鈷合金和旋鍍上有機催化劑,最後置於900℃以上的高溫中退火形成奈米碳管(碳纖維),再進行特性的研究。本研究將更進一步評估黃光微影製程來做奈米碳管(碳纖維)的選區成長。
    成長出來的奈米碳管(碳纖維)其外徑大部分為10奈米至30奈米之間,且其管壁上方皆可發現有催化劑,催化劑顆粒的大小與管徑成正相關。利用鑽石膜所成長出的奈米碳纖維較短且直;而奈米鑽石粉末所成長出的奈米碳纖維則較長且彎曲。
    鑽石退火後其場發射有增強的現象,這應該是因為奈米碳纖維的場發射較鑽石因負電子親和力所產生的場發射特性好,故推論奈米碳管(碳纖維)的形成有助於場發射特性的提升。


    第一章 緒論…………………………………………………………1 1.1奈米碳管簡介…………………………………………………1 1.2奈米碳管的結構………………………………………………1 1.3奈米碳管的特性………………………………………………2 1.4奈米碳管的主要製程…………………………………………2 1.4.1弧光放電法 (arc-discharge method)………………3 1.4.2雷射熱昇華法…………………………………………4 1.4.3化學氣相沉積法………………………………………4 1.5奈米碳管的應用………………………………………………5 1.5.1場發射顯示器(FED)…………………………………6 1.5.2場效電晶體(Field-effect transistor)…………7 1.5.3奈米導線(Nanowire)………………………………7 1.5.4強化複合材料…………………………………………8 1.5.5儲氫材料………………………………………………8 1.5.6顯微鏡的掃描探針……………………………………8 第二章 文獻回顧…………………………………………………21 2.1奈米碳管發現之前…………………………………………21 2.2奈米碳管的發現……………………………………………22 2.2奈米碳管的發現之後………………………………………22 第三章利用鑽石膜成長奈米碳管…………………………28 3.1鑽石簡介……………………………………………………28 3.1.1簡介…………………………………………………28 3.1.2鑽石薄膜的特性……………………………………29 3.1.2.1硬度(Hardness)…………………………………29 3.1.2.2熱傳導係數(Thermal conductivity)…………30 3.1.2.3化學反應性(Chemical reactivity)……………30 3.1.2.4密度(Density)……………………………………30 3.1.2.5光學性質(Optical properties)………………30 3.1.2.6電子特性…………………………………………31 3.1.2.7鑽石的負電子親和力特性………………………31 3.1.3鑽石薄膜之合成方法與理論………………………33 3.1.3.1鑽石薄膜之合成方法……………………………33 3.1.3.2鑽石膜成核理論…………………………………34 3.1.3.2.1結構及相圖…………………………………34 3.1.3.2.2早期孕核和成長方式………………………34 3.1.4電子場發射理論……………………………………35 3.1.5鑽石薄膜在場發射特性上之應用…………………38 3.2實驗裝置……………………………………………………41 3.2.1石英管狀熱處理爐(Tube Furnace)…………………41 3.2.2掃描式電子微顯微鏡(SEM)…………………………41 3.2.3拉曼光譜(Raman spectrum)…………………………41 3.2.4場發射電特性之量測…………………………………42 3-3實驗流程及實驗步驟……………………………………43 3.3.1實驗流程………………………………………………43 3.3.2實驗步驟………………………………………………43 3-4研究結果與討論…………………………………………44 3.4.1濺鍍鐵鈷合金…………………………………………44 3.4.2旋鍍有機催化劑………………………………………45 第四章利用鑽石顆粒成長奈米碳管………………………72 4.1鑽石顆粒……………………………………………………72 4.2實驗裝置……………………………………………………77 4.2.1管狀石英熱處理爐(Tube Furnace)…………………77 4.2.2熱重分析儀(TGA)……………………………………77 4.2.3掃描式電子顯微鏡(SEM)……………………………78 4.2.4穿透式電子顯微鏡(TEM)……………………………78 4.2.5場發射電性量測(FE)…………………………………78 4.2.6拉曼特性光譜量測(Raman Spectroscopy)…………79 4.3實驗流程與實驗步驟………………………………………81 4.3.1催化溶液之製備………………………………………81 4.3.2混合…………………………………………………82 4.3.3旋鍍…………………………………………………82 4.3.4軟烤…………………………………………………82 4.3.5高溫管狀爐退火…………………………………83 4.3.6碳奈米纖維之選區成長…………………………83 4.4結果與討論…………………………………………………84 4.4.1添加奈米鑽石顆粒……………………………………84 4.4.1.1均勻度之影響…………………………………86 4.4.1.2時間溫度變化與場發射間之關係……………87 4.4.1.3場發射性能之增加……………………………88 4.4.1.4選區成長碳奈米纖維…………………………88 4.4.2添加石墨顆粒成長奈米碳管…………………………89 第五章 結論與未來展望……………………………………125 參考文獻……………………………………………………………127 個人學經歷………………………………………………………143 發表論文……………………………………………………………144

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