本研究探討電容式觸覺感測器之最佳化電極形狀，期待提升感測器受到剪力時的靈敏度。電容式觸覺感測器，因為反應較快，耐用性高且具有多點觸控、不受溫度干擾等優點，廣泛應用於穿戴式裝置、生醫微元件、機器人等。電容式觸覺感測器常用於正向力及剪力的量測，有提高靈敏度之需求。電容式觸覺感測器的性能與電極形狀的設計息息相關，但過去的文獻，幾乎未見研究電極正多邊形與電容式觸覺感測器性能關係。因此，本論文研究在固定電極面積之下，探討各種多邊形電極之下的剪力靈敏度與準確度。本研究分析各種正多邊形電極的電容感測器之感測靈敏度，並製作三種正多邊形的電容式觸覺感測器，分析、比較各種正多邊形電極的形狀感測靈敏度與準確度，以及各電極在相同重疊電極面積與上下電極間的錯位距離時的靈敏度趨勢。本研究結果顯示，三角形電極電容式觸覺感測器，相較於常用的正方形電極電容式觸覺感測器，在不損失空間使用率與損失些微的正向力靈敏度下，其剪切力靈敏度提升為正方形的1.3倍。

This study studies the optimal electrode shape of capacitive tactile sensor and looks forward to increasing the sensitivity of the sensor when it is subjected to shear. Capacitive tactile sensor is widely used in wearable devices, biomedical micro-components, robots, etc. because of their fast response, high durability, multi-touch, and temperature-free interference. Capacitive tactile sensor is often used for the measurement of positive and shear force. The performance of capacitive tactile sensors is closely related to the design of the electrode shape, but in the past literature, there has been little research on the performance relationship between the electrode regular polygon and the shear force sensitivity. Therefore, this thesis studies the shear sensitivity and accuracy under various polygonal electrodes and the fixed electrode area. This study produces three kinds of regular polygon capacitive tactile sensors to analyze and compare the sensitivity and accuracy. Normal force sensitivity is the same when the overlapped electrode area and the misalignment distance between the upper and lower electrodes are the same. The results of this study show that the triangular electrode capacitive tactile sensor improves the shear force sensitivity compared to the commonly used square electrode capacitive tactile sensor without loss of space utilization and loss of slight positive force sensitivity.

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