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研究生: 潘宗侑
Pan, Tsung-Yu
論文名稱: 鎳鎢合金上的高自旋軌道矩
High spin orbit torque on NiW alloy
指導教授: 賴志煌
Lai, Chih-Huang
口試委員: 林秀豪
Lin, Hsiu-Hau
謝嘉民
Shieh, Jia-Min
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學工程學系
Materials Science and Engineering
論文出版年: 2022
畢業學年度: 110
語文別: 中文
論文頁數: 35
中文關鍵詞: 電流驅動翻轉
外文關鍵詞: Tungsten, SOT
相關次數: 點閱:3下載:0
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  • 透過自旋軌道矩(spin-orbit torque, SOT)來翻轉鐵磁層的磁矩是新一代磁阻式隨機存取記憶體(magnetic random access memory, MRAM)的寫入機制,這樣的機制能夠使寫入電流不通過磁性元件本身,也能達成寫入的目的,能夠有效地增加元件耐久度與翻轉速度,是更具有潛力的非揮發性記憶體,可以應用於神經網路計算、邊緣運算等領域。但SOT-MRAM的選擇電晶體的面積與其翻轉電流密度成正比,如果翻轉電流太大,會導致記憶體的密度無法繼續微縮,因此研究如何降低翻轉電流密度是很重要的一個課題。
    用來產生SOT的5d重金屬中,鎢擁有最大的自旋霍爾角,然而這樣的鎢必須要是β相才能有這麼大的自旋霍爾角,而要形成β相的鎢有一定的製程難度,其是需要在夠薄的厚度下才存在的亞穩態。
    在本實驗中發現鎳鎢合金具有很強的自旋霍爾效應,在一系列SOT翻轉量測中的翻轉電流密度都落在106A/cm2的等級,而對其進行等效場量測得知鎳鎢合金的自旋霍爾角都大於β相的鎢,並且鎳鎢合金相較β相的鎢容易製成,種種實驗結果說明鎳鎢合金在SOT材料上面具有非常高的潛力,有助於提高SOT-MRAM的效能。


    Reversing the magnetic moment of the ferromagnetic layer through spin-orbit torque (SOT) is the writing mechanism of the new generation of magnetic random access memory (MRAM). The purpose is to effectively increase the durability and turnover speed of components, and it is a more potential non-volatile memory that can be used in neural network computing, edge computing and other fields.
    However, the area of the selection transistor of SOT-MRAM is proportional to its inversion current density. If the inversion current is too large, the density of the memory will not be able to continue to shrink. Therefore, it is very important to study how to reduce the inversion current density.
    Among the 5d heavy metals used to generate SOT, tungsten has the largest spin Hall angle. However, such tungsten must be β-phase to have such a large spin Hall angle, and it is difficult to form β-phase tungsten, which is a metastable state that needs to exist at a sufficiently thin thickness.
    In this experiment, it is found that the nickel-tungsten alloy has a strong spin Hall effect, and the inversion current density in a series of SOT inversion measurements falls at the level of 106A/cm2, and the effective field measurement of it shows that the spin Hall angle of nickel-tungsten alloys is larger than that of β-phase tungsten, and nickel-tungsten alloys are easier to make than β-phase tungsten. Various experimental results show that nickel-tungsten alloys have very high potential on SOT materials, which is helpful for improve the performance of SOT-MRAM.

    Abstract i 摘要 iii 目錄 iv 1 第一章 前言 1 2 第二章 文獻回顧 4 2.1 穿隧磁阻 4 2.2 自旋軌道矩 5 2.2.1 Rashba效應 5 2.2.2 自旋霍爾效應 7 2.2.3 Field like torque, FLT 與damping like torque, DLT 8 2.2.4 自旋軌道矩的發展 10 2.3 SOT電流翻轉 10 2.4 臨界電流密度 12 2.5 β相的鎢 13 3 第三章 實驗儀器介紹 14 3.1 高真空濺鍍機(HV sputtering system) 14 3.2 黃光微影製程 (Photolithography) 15 3.3 離子束蝕刻機(ion beam etching) 15 3.4 震動樣品磁測儀(Vibrating Sample Magnetometer) 16 3.5 X-射線繞射分析儀(X-ray diffraction) 17 3.6 原子力顯微鏡(atomic force microscope) 18 3.7 聚焦極磁光克爾效應 (FMOKE) 19 4 第四章 實驗結果與討論 21 4.1 Ni90W10的垂直系統 21 4.1.1 SOT量測 22 4.1.2 不同厚度之下的SOT 23 4.1.3 不同外加場之下的SOT 24 4.1.4 不同電流脈衝之下的SOT 24 4.1.5 垂直等效場量測 25 4.2 Ni1-xWx不同成分比例下的水平系統 26 4.2.1 不同成分下的電阻率與XRD圖 26 4.2.2 不同成分下的Jc 27 4.2.3 水平等效場量測 28 4.3 不同氣壓下的Ni90W10 29 4.3.1 不同工作氣壓下的電阻率和XRD圖 29 4.3.2 不同工作氣壓下的Jc 31 4.3.3 等效場量測 32 5 第五章 結論 33 參考文獻 34

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