本論文主要是研究廣角入射X光波導管之干涉效應。一般X光波導管是選用小角度(掠角)入射或者是從波導管前方正向入射，然而我們在此提供了另一種方式為廣角(大角度)入射波導管，使得入射方向不受掠角及小角度之限制。我們的方法是使用四吋矽晶圓，其垂直方向為[0 0 1]，晶圓切口方向為[1 1 0]。在矽晶圓上蝕刻高度為250μm、長度為2cm，寬度各為5μm，10μm，50μm，100μm並且上下兩面及側邊均鍍金的波導管。在光子能量為8878eV時，利用矽(113)原子面產生表面的繞射光，其繞射光沿著表面方向，即[1 1 0]方向（即波導管方向）行進並在出口處2θ方向上作強度的掃瞄，以分析X光在波導管內干涉現象。我們發現當光子能量在8878eV上下350eV的範圍內，2θ掃瞄均出現干涉圖形。
在理論分析上，我們利用動力繞射理論及直角座標動力繞射算法，得到在隨入射波導管的入射光能量增大時，波導管的干涉條紋越明顯且中央亮紋與第一亮紋的比值也越來越小，此與實驗一致。其物理機制主要來自於金-矽-金(Au-Si-Au)波導管中，基本上(113)的繞射是由兩個模組(mode)的波所形成，而此二波的作用造成實驗上所觀測到的干涉條紋。此外，光子能量可調整的範圍 8878 ± 350 eV。

The research of this thesis is an investigation of interference effects in wide-angle incident X-ray waveguides. Usually, the conventional waveguides make an incident X-ray beam couple into a waveguide from the side or the front of a waveguide at grazing or normal incident condition. However, this incident geometry cannot be applied to cases involving a large-angle incident X-ray beam. For solving this problem, here we propose to use a surface diffraction beam of (113) reflection to guide X-rays at wide-angle incidence. Using the micro-electronic lithographic process , we etched a 4-inch [001] silicon wafer with a stripe structure along [110]. Each stripe was 250μm in height, 2cm in length, and the width varying from 5μm to 100μm. The etched wafer was then plated with gold by thermal evaporation to about 300nm in thickness on the top and bottom sides of the crystal. The stripe surrounded by gold films acted as an X-ray waveguide. In the diffraction experiment, we guided the 8878eV photons at the incident angle of 50.48 deg. into the waveguide via the (113) surface reflection. The surface diffracted (113) beam then propagated in the [110] direction. Subsequently, 2θscans of the (113) at the exit of waveguide were performed and X-ray interference fringes coming from the waveguide were detected for the photon energies ranging 8878eV ± 350eV.
For theoretical analysis, we used the dynamical theory of X-ray diffraction in a Cartesian coordinate system to calculate mode of wave-propagation, wavevectors, wavefield amplitudes, and intensities. We found that when the photon energy increased, the intensity ratio between the zeroth-order maximum (the central bright band) and the first-order maximum decreased and the interference effect became more pronounced. This result was qualitatively in good agreement with the experiment. The physical mechanism is that in this Au-Si-Au sandwich waveguide structure the diffraction beam of (113) consists of two modes of wave-propagation dominant in the waveguide and the interaction of the two modes gives the interference patterns observed in the experiment. Moreover, the tunable photon energy range of this kind X-ray waveguides is 8878eV ± 350eV.

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