簡易檢索 / 詳目顯示

回結果列表
研究生： 顏珮珍
PEI-CHEN YEN
論文名稱： 摻雜PZT微粉的SiO2光波導材料製作與特性研究
Preparation and Properties of PZT Micro-Powder Doped SiO2 Waveguide Material
指導教授： 蔡春鴻
CHUEN-HORNG TSAI
口試委員:
學位類別： 碩士
Master
系所名稱： 原子科學院 - 工程與系統科學系
Department of Engineering and System Science
論文出版年： 2002
畢業學年度： 90
語文別： 中文
論文頁數： 63
中文關鍵詞： 溶膠-凝膠法 、鋯鈦酸鉛 、二氧化矽 、摻雜 、電光效應
外文關鍵詞： sol-gel, PZT, SiO2, doped, electro-optical effect
相關次數： 點閱：4  下載：0 
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報

    • 由於鋯鈦酸鉛（lead-zirconate-tinate, 簡稱PZT）鐵電陶瓷材料具備高折射率及強電光效應的特性，因此可藉由外加電場的調變，造成所需的折射率改變量，使它應用在電光調製（Electro-optical Modulation, 簡稱E.O.M.）元件上極具潛力，如光交換器（Optical Switch）、布拉格波導光柵（Bragg Waveguide Grating）。
    本論文研究主要以溶膠-凝膠法配製摻有非晶形PZT微粉或結晶形PZT微粉的SiO2溶膠，利用旋鍍法將溶液旋鍍在矽基板或石英基板上，以傳統爐管退火或快速退火方式進行700℃的熱處理後，成為光學薄膜。利用橢圓偏光儀對此薄膜進行厚度、折射率及消散係數的量測，並使用掃瞄式電子顯微鏡（SEM）配合能量散佈光譜儀（EDS）、電子背向繞射儀（EBSD）觀察PZT粒子在膜中的分佈及結晶情形，探討其材料特性。

    由實驗結果得知，在摻雜結晶形PZT微粉的SiO2薄膜中，PZT粒子會有較好的鑲埋性，並具有典型的鈣鈦礦結構（perovskite structure）；同時，薄膜的光學消散係數低，與沒有摻雜的SiO2薄膜比較起來，有合理的折射率改變量。

    With its high refractive index and strong electro-optic properties, lead-zirconate-tinate (PZT) has a good potential of being a electro-optical modulation device, such as optical switch and Bragg waveguide grating, by utilizing its tunability of the refractive index.
    In this study, the PZT powder doped silica films on silicon or quartz substrate were prepared by a modified TEOS sol-gel process. The films were then annealed by conventional furnace or rapid thermal annealing method at 700℃ respectively, and were examined by field emission scanning electron microscope and spectro-ellipsometer.

    The crystallized PZT powder doped silica films followed by annealing treatment revealed good embedded adhesion, typical perovskite structure, low extinction coefficient, and reasonable refractive index change.

    一、緒論.................................................1 二、文獻回顧.............................................6 2.1 微粉的製備方法.....................................6 2.2 水熱晶化法.........................................8 2.3 溶膠-凝膠法的理論背景..............................9 2.3.1 溶膠-凝膠法的基本原理.......................10 2.3.2 溶膠-凝膠法的主要影響因素...................11 2.3.3 溶膠-凝膠法的覆膜過程.......................18 2.4 PZT的電光特性.....................................22 三、實驗方法............................................29 3.1 PZT微粉的製備.....................................29 3.2 非晶形PZT微粉的結晶化.............................30 3.3 配製摻有PZT微粉的SiO2溶膠.........................30 3.4 旋鍍SiO2薄膜......................................32 3.4.1 矽基板的清洗準備............................32 3.4.2 旋鍍薄膜....................................32 3.5 製備三種薄膜夾層結構：TiO2／PZT／TiO2、SiO2／PZT／SiO2、 SiO2／TiO2／PZT／TiO2／SiO2.......................33 3.5.1 配製TiO2溶膠................................33 3.5.2 旋鍍夾層薄膜結構............................33 3.6 熱處理............................................34 3.7 電極製作..........................................34 3.8 特性分析..........................................35 3.8.1 動態雷射散射儀..............................35 3.8.2 X光繞射分析儀...............................36 3.8.3 能量散佈光譜儀..............................36 3.8.4 電子背向繞射儀..............................37 3.8.5 紫外光/可見光/近紅外光分光光譜儀............37 3.8.6 反射式橢圓偏光儀............................38 3.8.7 差分式穿透橢圓偏光儀........................38 四、結果與討論..........................................43 4.1 PZT微粉的特性.....................................43 4.2 於SiO2溶膠中PZT微粉所摻雜的量.....................43 4.3 摻雜非晶形PZT微粉的SiO2薄膜之X光繞射結晶分析......45 4.4 三種薄膜夾層結構之X光繞射結晶分析.................45 4.5 摻雜非晶形PZT微粉的SiO2薄膜之SEM分析..............46 4.6 摻雜結晶形PZT微粉的SiO2薄膜之SEM分析..............47 4.7 薄膜之光學性質分析................................48 五、結論................................................59 參考文獻................................................60

    1. D.R. Uhlmann, G. Teowee, J.M. Boulton, S. Motakef, S.C. Lee, “Electrical and optical properties of chemically derived ferroelectric films,” Journal of Non-Crystalline Solids, 147锄, 1992, 409-423.
    2. Zhai Jiwei, Yao Xi, Zhang Liangying, “The optical waveguide characteristics of highly orientated sol-gel derived polycrystalline ferroelectric PZT thin films,” Ceramics International, 27, 2001, 585-589.
    3. B.G. Potter Jr, M.B. Sinclair, D. Dimos, B.A. Tuttle, R.W. Schwartz, “Electro-optical and optical evaluation of Pb(Zr, Ti)O3 thin films using waveguide refractometry,” Journal of Non-Crystalline Solids, 178, 1994, 69-76.
    4. Changho Lee, Vasili Spirin, Hanwook Song, Kwangsoo No, “Drying temperature effects on microstructure, electrical properties and electro-optic coefficients of sol-gel derived PZT thin films,” Thin Solid Films, 1999, 242-249.
    5. Giancarlo C. Righini, Stefano Pelli, “Sol-gel glass waveguides,” Journal of Sol-Gel Science and Technology, 8, 1997, 991-997.
    6. A. S. Holmes, R. R. A. Syms, Ming Li, and Mino Green, “Fabrication of buried channel waveguides on Silicon substrates using spin-on glass,” Appl. Optics, 32, No.25, 1993, 4916-4921.
    7. Wenxiu Que, Z. Sun, Y.Zhou, Y. L. Lam, S. D. Cheng, Y. C. Chan and C. H. Kam, “Preparation of hard optical coatings based on an organic/inorganic composite by sol-gel method,” Materials Letters, 42, 2000, 326-330.
    8. 張光偉, 蘇忠傑, “平面光波導材料與製程,” 化工資訊, 2000.11, 27-35.
    9. Atsuo Yasumori, Hiroshi Matsumoto, Shigeo Hayashi, Kiyoshi Okada, “Magneto-optical properties of silica gel containing magnetite fine particles,” Journal of Sol-Gel Science and Technology, 18, 2000, 249-258.
    10. Hongbing Chen, Congshan Zhu, Fuxi Gan, “Preparation and optical properties of Sb2S3 microcrystallite doped silica glasses by the sol-gel process,” Journal of Sol-Gel Science and Technology, 12, 1998, 181-184.
    11. Yai-Yei Huang, Kuo-Shung Liu, I-Nan Lin, Preparation and Properties of PZT Ferroelectric Thick Films by Nanopowder-Metalorganic Decomposition Process, M.S. Thesis, National Tsing-Hua University, 1999.
    12. Maria Traianidis, Christian Courtois, Anne Leriche, Bernard Thierry, “Hydrothermal synthesis of lead zirconium titanate (PZT) powders and their characteristics,” Journal of the European Ceramic Society, 19, 1999, 1023-1026.
    13. U. D. Lin, F. S. Yen, “Effects of gel particle size on the hydrothermal synthesis of PLZT oxides powders,” Journal of the Ceramic Society, 2, No.1, 1998, 10-20.
    14. Jooho Moon, Jeffrey A. Kerchner, Henrik Krarup, James H. Adair, “Hydrothermal synthesis of ferroelectric perovskites from chemically modified titanium isopropoxide and acetate salts,” J. Mater. Res., 14, No. 2, 1999, 425-435.
    15. Seung-Beom Cho, Magdalena Oledzka, Richard E. Riman, “Hydrothermal synthesis of acicular lead zirconate titanate (PZT),” Journal of Crystal Growth, 226, 2001, 313-326.
    16. B. Su, C. B. Ponton, T. W. Button, “Hydrothermal and electrophoretic deposition of lead zirconate titanate (PZT) films,” Journal of the European Ceramic Society, 21, 2001, 1539-1542.
    17. Q. W. Chen, Y. T. Qian et al., J. Mater. Lett. 22, 1995, 85-87.
    18. Qian Yitai et. al., J. Mater. Chem. 3, 1993, 203-205
    19. 劉伯元,黃銳,趙安赤, “非金屬奈米材料,” 中國粉體技術, 2001.
    20. C. J. Brinker and G. W. Scherer, “Sol-gel Science: The physics and chemistry of sol-gel processing,” Academic Press, Boston, 1990.
    21. Wee-Yih Lim, Nyan-Hwa Tai, I-Nan Lin, SiO2 film prepared by supercritical fluid drying for optical waveguides application, M.S. Thesis, National Tsing-Hua University, 2001.
    22. A. H. Boonstra and T. N. M. bernards, “The dependence of the gelation time on the hydrolysis time in a two-step SiO2 sol-gel process,” J. of Non-Crystalline Solids, 105, 1998, 207-213.
    23. L. Nikolic, L. Radonjuc, “Effect of the silica sol-gel coatings on the properties of glass substrate,” Ceramics International, 24, 1998, 547-552.
    24. A. H. Boonstra and J. M. E. Baken, “Relation between the acidity and reactivity of a TEOS, Ethanol and water mixture,” J. of Non-Crystalline Solids, 122, 1990, 171-182.
    25. C. J. Brinker, K. D. Keefer, D. W. Schaefer and C. S. Ashley, “Sol-gel transition in simple silicates,” J. of Non-Crystalline Solids, 48, 1982, 47-64.
    26. Biing-Yow Wu, A.S.T. Chiang, “Sol-gel coating and its applications,” Chinese Journal of Materials Science, 28, No. 3, 1996, 169-181.
    27. S. V. Nitta, A. Jain, P. C. Wayner, Jr., W. N. Gill, and J. L. Plawsky, “Effect of sol rheology on the uniformity of spin-on silica xerogel films,” Journal of apply Phys, 86, No.10, 1999, 5870-5878.
    28. B. Samuneva, V. Kozhukharov, Ch. Trapalis, R. Kranold, “Sol-gel processing of titanium-containing thin coatings,” Journal of Materials Science, 28, 1993, 2353-2360.
    29. 廖忠賢, 黃志青, “電子背向繞射系統之介紹-掃瞄式電子顯微鏡的新利器,” 科儀新知, 103, 1998, 43-51.
    30. R. Swanepoel, “Determination of the thickness and optical constants of amorphous silicon,” J. Phys. E：Sci. Instrum., 16, 1983, 1214-1222.
    31. 李金宏, “橢圓偏光儀(Ellipsometer)簡介,” 量測資訊, 66, 1999, 38-43.
    32. Nasir Abdul Basit, Hong Koo Kim, Jean Blachere, “Growth of highly oriented Pb(Zr, Ti)O3 films on MgO-buffered oxidized Si substrates and its application to ferroelectric nonvolatile memory field-effect transistors,” Applied Physics Letters, 73, No. 26, 1998, 3941-3943.
    33. Sung-Gap Lee, Kyoung-Tae Kim, Young-Hie Lee, “Characterization of lead zirconate titanate heterolayered thin films prepared on Pt/Ti/SiO2/Si substrate by the sol-gel method,” Thin Solid Films, 372, 2000, 45-49.
    34. C.C. Chang, C.H. Hwang, “XRD analysis of PZT thin films on Si substrates by rapid thermal annealing process,” Chinese Journal of Materials Science, 31, 4, 1999, 220-225.
    35. G.H. Haertling, C.E. Land, “Hot-pressed (Pb,La) (Zr,Ti)O3 ferroelectric ceramics for electrooptic applications”, Journal of the American Ceramic Society, 54, 1, 1971, 1-11.

    無法下載圖示 全文公開日期 本全文未授權公開 (校內網路)
    全文公開日期 本全文未授權公開 (校外網路)
    全文公開日期 本全文未授權公開 (國家圖書館：臺灣博碩士論文系統)
    QR CODE