本實驗利用化學液相沈積法(chemical solution deposition，CSD)在Pt/Ti/SiO2/Si基板上鍍製鋯酸鉛鋇(Pb1-xBaxZrO3，PBZ)順電相薄膜，就以下幾種參數去探討其對薄膜電性的影響：(1)改變鉛鋇比例：以x = 0.8、0.6、0.4成分去探討不同鉛鋇比例對電性有何影響，由結果得知其介電常數、調變值和優異值(FoM)隨著Ba含量的增加而降低，而x = 0.4 的PBZ薄膜，在熱處理溫度750℃有最佳的電性：在頻率100kHz下，介電常數約150，在頻率1MHz、外加電場475kV/cm下，調變值約45%， FoM值約60；(2)熱處理溫度：以x=0.4成分的PBZ薄膜，探討熱處理溫度從650~750℃對電性有何影響，由結果得知其介電常數、調變值和FoM值隨著熱處理溫度增加而增加，顯示薄膜結晶性越好，其電性也越佳；(3)不同膜厚：以鍍覆2、4、6、8層來改變薄膜厚度來探討其對介電常數和調變值有何影響，其薄膜厚度分別為0.12、0.21、0.3、0.4μm，由結果得知其介電常數和調變值大致上隨著膜厚增加而增加，FoM值卻降低，；(4)改變熱處理方式：以分層RTA，之後再進行爐管熱處理，探討不同的熱處理方式對介電常數和調變值有何影響，由結果得知其介電常數、調變值和FoM值隨著爐管熱處理溫度增加而增加，但其幅度比一般熱處理方式來得小，顯示影響電性的主要因素為RTA的溫度。

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