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研究生: 李艾嬛
Lee, Ai-Huan
論文名稱: 梯形截面脊狀光波導之BeamProp模擬
Numerical Simulation of Optical Waveguides with Trapezoidal Cross Sections
指導教授: 王立康
Wang, Likarn
口試委員: 施閔雄
Shih, Min-Hsiung
李瑞光
Lee, Ray-Kuang
王立康
Wang, Likarn
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 光電工程研究所
Institute of Photonics Technologies
論文出版年: 2013
畢業學年度: 101
語文別: 中文
論文頁數: 43
中文關鍵詞: 梯形截面脊狀光波導
外文關鍵詞: Trapezoidal Cross Section, Optical Rib Waveguide
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  • 本篇論文提出一個準確且簡便的方法使用BeamProp模擬梯形脊狀光波導,我們成功使用舒瓦茲-克里斯多福轉換(Schwarz-Christoffel Transformation)將梯形波導結構等效成一般矩形截面脊狀光波導,並且將等效之場形轉回梯形坐標系。由此可見,不論截面形狀如何,我們都可利用Schwarz-Christoffel Transformation來做BeamProp模擬,故未來在研究乾蝕刻之側壁光學損耗上,亦可應用此方法模擬。


    封面……………………………………………………………………………………………….……...I 致謝……………………………………………………………………………………………….…....IV 摘要……………………………………………………………………………………………….….…V 目錄…………………………………………………………………………………………………..…VI 圖目錄………………………………………………………………………………………………..VIII 表目錄………………………………………………………………………………………………....XI 第一章 導論………………………………………………………………………………..........1 1-0 前言………………………………………………………………………………………1 1-1 脊狀波導(rib waveguide)結構特性……..……………………………….1 1-2 濕蝕刻對矽光學波導的影響……………………………………………….2 1-3 文獻回顧…………………………………………………………….………………..5 1-4 研究動機………………………………………………………………………………8 1-5 論文架構………………………………………………………………….…………..9 第二章 模擬理論基礎………………………………………………………………………..11 2-0 前言……………………………………………………………………………………..11 2-1 光束傳播法(BPM, Beam Propagation Method)……………………11 2-2 保角映射(Conformal Mapping)……….……………………….………….13 2-3 舒瓦茲-克里斯多福Matlab工具箱(SC Toolbox, Schwarz-Christoffel Toolbox)………………………………………………………………..19 2-4 梯形截面脊狀波導完整模擬流程介紹……………………………….23 第三章 非對稱梯形截面脊狀矽光學波導的計算……………………………..26 3-0 前言……………………………………………………………………………………..26 3-1 非對稱梯形截面脊狀矽光學波導介紹……………………………….26 3-2 非對稱梯形截面脊狀矽光學波導計算……………………………….27 第四章 對稱梯形截面脊狀矽光學波導的計算…………………………………30 4-0 前言……………………………………………………………………………………..30 4-1 對稱梯形截面脊狀矽光學波導介紹…………………………………..30 4-2 對稱梯形截面脊狀矽光學波導計算…………………………………..31 第五章 等效波導折射率分布………………………………………………………….…34 5-0 前言…………………………………………….……………………………………….34 5-1 理論基礎……………………………………………………………………………..34 5-2 模擬結果………………………………………………………………….………….34 5-3 色散關係(Dispersion Relation)…….……………………………….……..35 第六章 結論與未來展望……………………………………………………………………37 參考文獻…………………………………………………………………………………………….39 附錄…………………………………………………………………………………………………….41

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