研究生: |
陳品妏 Chen, Ping Wen |
---|---|
論文名稱: |
以複合鍍膜系統製備仿生二氧化鈦/聚亞醯安多層薄膜之強化機制與多功能性質探討 Toughening Mechanisms and Multi-functionalities of Bio-inspired Titanium dioxide/Polyimide Multilayered Coatings via Hybrid Deposition |
指導教授: |
杜正恭
Duh, Jenq Gong |
口試委員: |
陳柏宇
吳芳賓 杜正恭 Chen, Po Yu Wu, Fan Bean |
學位類別: |
碩士 Master |
系所名稱: |
工學院 - 材料科學工程學系 Materials Science and Engineering |
論文出版年: | 2016 |
畢業學年度: | 104 |
語文別: | 英文 |
論文頁數: | 154 |
中文關鍵詞: | 仿生 、多層薄膜 、磨潤性質 、抗腐蝕特性 、破裂韌性 、韌性強化機制 |
外文關鍵詞: | bio-inspiration, multilayered thin film, wear property, corrosion resistance, fracture toughness, toughening mechanism |
相關次數: | 點閱:1 下載:0 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
鮑魚殼層主要由無機碳酸鈣組成,然而其韌性遠高於純碳酸鈣,此優異之機械性質乃起因於無機質與有機質所組成之類層狀結構。受鮑魚殼啟發進而發展出混合多層薄膜,本研究係採用反應式磁控濺鍍與脈衝雷射蒸鍍組成之複合系統製備出一有機/無機多層薄膜。此仿生多層薄膜主要由單層厚度分別為100 nm及150 nm之二氧化鈦(titanium dioxide)及厚度由5 nm至30 nm之聚亞醯安(polyimide)組成,利用原子力顯微鏡、掃描式電子顯微鏡與X光繞射分析薄膜性質,鮑魚殼及多層薄膜之機械性質以奈米壓痕及刮痕儀進行分析,分別經由恆電位電流儀與球對盤磨耗試驗分析薄膜之腐蝕與磨耗特性。復利用基板法以及奈米壓痕法評估薄膜破裂韌性,並深入探討其破裂機制以及多層介面間現象。
實驗結果顯示,儘管經過脫蛋白製程之鮑魚殼硬度由6.9降至4.2 GPa,其值仍在相關研究結果範圍且接近純碳酸鈣,表示蛋白質並不會影響鮑魚殼之硬度等機械性質。而在有機/無機多層膜之硬度量測結果中亦可發現,當高分子層體積比少於5%時其硬度與純無機成分相似,隨高分子厚度增加,楊式係數及硬度隨之降低。同時從刮痕試驗結果可得知高分子層增厚會降低介面強度。經磨耗試驗後100TiO2-20PI之摩擦係數降至0.4,表示高分子層所提供之荷重剪切區域可有效降低多層薄膜摩擦係數。此外,非晶態高分子層可阻斷腐蝕液藉經介擴散至基材的通道,遂使100TiO2-20PI薄膜顯現較佳抗腐蝕特性。於不同厚度周期下,單層高分子厚度10 nm 時多層薄膜可有效提升破裂韌性,當單層二氧化鈦層為100 nm,薄膜最高韌性可達3.2 MPa∙m1/2,而膜中若層數較多則對於強化破裂韌性有正向效果。
本研究以二氧化鈦與聚亞醯安多層複合薄膜,調控不同週期厚度以達到一定程度之硬度、優異抗磨耗、抗腐蝕及破裂韌性,並以深入探討性質提升之機制為目的,以期提供未來仿生薄膜之設計參考。
Abalone shells are composed mainly of minerals (i.e. calcite), yet it is much tougher as compared to that of calcite. The excellent mechanical property of nacre is attributed to its organized layered-like structure consisting of aragonite platelets and organic materials. Consequently, a hybrid multilayered configuration is inspired from nacre, and a hybrid system combining radio frequency (RF) sputtering and pulsed laser deposition (PLD) is established to synthesize the bio-inspired organic/inorganic layers sequentially in present work. The bio-inspired multilayered thin films are composed of an inorganic layer of 100 nm- and 150 nm-thick TiO2 as well as an organic layer of polyimide (PI) ranging from 5 to 30 nm. Thin films are characterized by an atomic force microscopy (AFM), scanning electron microscopy (SEM) and X-ray diffraction (XRD). Mechanical properties of thin films and nacres are evaluated using nanoindenter and scratch tester. The electrochemical and ball-on-disk wear testers are used to conduct the corrosion and tribological properties of thin films, respectively. The fracture toughness of thin films is characterized via substrate indentation and nano-indentation methods, and the fracture mechanisms and interface phenomenon have also been discussed.
The hardness of deproteined shell decreases to 4.2 from 6.9 GPa after deproteinized process, yet the values are still in range of literature (4~9 GPa) and close to those of calcite around 7 GPa. It means that the protein does not affect the mechanical properties of nacre. The interesting result of multilayers for hardness measurement also shows similar trend to shell while the polymer thickness is less than 5 % organic layer. Then, the hardness and elastic modulus significantly decrease with increasing PI thickness. Based on the results of adhesion test, it can be confirmed the thinner polymer in multilayer, the stronger interface strength. The wear test illustrates that a minimum coefficient of friction around 0.4 is found in 20 nm-thick PI in 100 nm-thick TiO2 series. The tribological enhancement is resulted from the shear zone provided by polymer layer under loads. Meanwhile, thicker PI in multilayered coating blocks the path for corrosion solution so that the 20 nm-thick PI exhibits better corrosion resistance. For fracture toughness, 10 nm-thick PI layer in all multilayers shows better fracture toughness. 100TiO2/10PI multilayer even reveals the maximum fracture toughness of 3.2 MPa∙m1/2, suggesting that more layers in coatings also provide positive contribution on fracture toughness.
The bilayer thickness of hybrid multilayered thin films developed in this study with adequate hardness, good anti-wear ability, corrosion resistance, and better fracture toughness can be used as a guideline for designing bio-inspired thin films.
[1] B. J. F. Bruet, H. J. Qi, M. C. Boyce, R. Panas, K. Tai, L. Frick, et al., "Nanoscale Morphology and Indentation of Individual Nacre Tablets from the Gastropod Mollusc Trochus Niloticus," Journal of Materials Research, vol. 20, pp. 2400-2419, 2005.
[2] P. Y. Chen, J. McKittrick, and M. A. Meyers, "Biological materials: Functional adaptations and bioinspired designs," Progress in Materials Science, vol. 57, pp. 1492-1704, Nov 2012.
[3] G. Mayer, "Rigid biological systems as models for synthetic composites," Science, vol. 310, pp. 1144-1147, Nov 18 2005.
[4] A. P. Jackson, J. F. V. Vincent, and R. M. Turner, "The Mechanical Design of Nacre," Proceedings of the Royal Society of London B: Biological Sciences, vol. 234, pp. 415-440, 1988.
[5] R. Menig, M. H. Meyers, M. A. Meyers, and K. S. Vecchio, "Quasi-static and dynamic mechanical response of Haliotis rufescens (abalone) shells," Acta Materialia, vol. 48, pp. 2383-2398, // 2000.
[6] J. D. Currey, "Mechanical-Properties of Mother of Pearl in Tension," Proceedings of the Royal Society Series B-Biological Sciences, vol. 196, pp. 443-463, 1977.
[7] K. E. Tanner, "Small But Extremely Tough," Science, vol. 336, pp. 1237-1238, Jun 8 2012.
[8] M. Sarikaya, C. Tamerler, A. K. Y. Jen, K. Schulten, and F. Baneyx, "Molecular biomimetics: nanotechnology through biology," Nature Materials, vol. 2, pp. 577-585, Sep 2003.
[9] M. A. Meyers, P. Y. Chen, A. Y. M. Lin, and Y. Seki, "Biological materials: Structure and mechanical properties," Progress in Materials Science, vol. 53, pp. 1-206, Jan 2008.
[10] S. Weiner and L. Addadi, "Design strategies in mineralized biological materials," Journal of Materials Chemistry, vol. 7, pp. 689-702, 1997.
[11] R. Z. Wang, Z. Suo, A. G. Evans, N. Yao, and I. A. Aksay, "Deformation mechanisms in nacre," Journal of Materials Research, vol. 16, pp. 2485-2493, Sep 2001.
[12] M. A. Meyers, J. McKittrick, and P. Y. Chen, "Structural Biological Materials: Critical Mechanics-Materials Connections," Science, vol. 339, pp. 773-779, Feb 15 2013.
[13] C. M. J. Shigley, and T. Brown, Standard Handbook of Machine Design, 3 ed.: McGraw-Hill, 2004.
[14] P. Fratzl, H. S. Gupta, F. D. Fischer, and O. Kolednik, "Hindered Crack Propagation in Materials with Periodically Varying Young's Modulus—Lessons from Biological Materials," Advanced Materials, vol. 19, pp. 2657-2661, 2007.
[15] M. F. Ashby, L. J. Gibson, U. Wegst, and R. Olive, "The Mechanical Properties of Natural Materials. I. Material Property Charts," Proceedings: Mathematical and Physical Sciences, vol. 450, pp. 123-140, 1995.
[16] P. Fratzl, H. S. Gupta, E. P. Paschalis, and P. Roschger, "Structure and mechanical quality of the collagen-mineral nano-composite in bone," Journal of Materials Chemistry, vol. 14, pp. 2115-2123, 2004.
[17] H. D. Espinosa, J. E. Rim, F. Barthelat, and M. J. Buehler, "Merger of structure and material in nacre and bone – Perspectives on de novo biomimetic materials," Progress in Materials Science, vol. 54, pp. 1059-1100, 11// 2009.
[18] R. O. Ritchie, "The conflicts between strength and toughness," Nat Mater, vol. 10, pp. 817-822, 11//print 2011.
[19] X. D. Li, W. C. Chang, Y. J. Chao, R. Z. Wang, and M. Chang, "Nanoscale structural and mechanical characterization of a natural nanocomposite material: The shell of red abalone," Nano Letters, vol. 4, pp. 613-617, Apr 2004.
[20] J. D. Currey and J. D. Taylor, "The mechanical behaviour of some molluscan hard tissues," Journal of Zoology, vol. 173, pp. 395-406, 1974.
[21] F. Barthelat, C. M. Li, C. Comi, and H. D. Espinosa, "Mechanical properties of nacre constituents and their impact on mechanical performance," Journal of Materials Research, vol. 21, pp. 1977-1986, Aug 2006.
[22] F. Song, A. K. Soh, and Y. L. Bai, "Structural and mechanical properties of the organic matrix layers of nacre," Biomaterials, vol. 24, pp. 3623-3631, Sep 2003.
[23] B. J. F. Bruet, H. J. Qi, M. C. Boyce, R. Panas, K. Tai, L. Frick, et al., "Nanoscale morphology and indentation of individual nacre tablets from the gastropod mollusc Trochus niloticus," Journal of Materials Research, vol. 20, pp. 2400-2419, Sep 2005.
[24] A. P. Jackson, J. F. V. Vincent, and R. M. Turner, "Comparison of Nacre with Other Ceramic Composites," Journal of Materials Science, vol. 25, pp. 3173-3178, Jul 1990.
[25] H. M. Leung and S. K. Sinha, "Scratch and indentation tests on seashells," Tribology International, vol. 42, pp. 40-49, 1// 2009.
[26] A. Lin and M. A. Meyers, "Growth and structure in abalone shell," Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing, vol. 390, pp. 27-41, Jan 15 2005.
[27] A. Y. M. Lin, M. A. Meyers, and K. S. Vecchio, "Mechanical properties and structure of Strombus gigas, Tridacna gigas, and Haliotis rufescens sea shells: A comparative study," Materials Science & Engineering C-Biomimetic and Supramolecular Systems, vol. 26, pp. 1380-1389, Sep 2006.
[28] F. Tuba, L. Oláh, and P. Nagy, "Characterization of the fracture properties of aragonite- and calcite-filled poly(ε-caprolactone) by the essential work of fracture method," Journal of Applied Polymer Science, vol. 120, pp. 2587-2595, 2011.
[29] H. Kakisawa and T. Sumitomo, "The toughening mechanism of nacre and structural materials inspired by nacre," Science and Technology of Advanced Materials, vol. 12, Dec 2011.
[30] R. O. Ritchie, "The conflicts between strength and toughness," Nature Materials, vol. 10, pp. 817-822, Nov 2011.
[31] R. Chen, C.-a. Wang, Y. Huang, and H. Le, "An efficient biomimetic process for fabrication of artificial nacre with ordered-nanostructure," Materials Science and Engineering: C, vol. 28, pp. 218-222, 3/10/ 2008.
[32] Z. Burghard, L. Zini, V. Srot, P. Bellina, P. A. van Aken, and J. Bill, "Toughening through Nature-Adapted Nanoscale Design," Nano Letters, vol. 9, pp. 4103-4108, Dec 2009.
[33] O. Kolednik, J. Predan, F. D. Fischer, and P. Fratzl, "Bioinspired Design Criteria for Damage-Resistant Materials with Periodically Varying Microstructure," Advanced Functional Materials, vol. 21, pp. 3634-3641, 2011.
[34] R. A. Pethrick, "Advanced surface coatings Edited by D. S. Rickerby and A. Matthews Blackie & Son Ltd, Glasgow, 1991. pp. 368, price £65.00. ISBN 0–21 6–92899–0," Polymer International, vol. 27, pp. 208-208, 1992.
[35] P. Sigmund, "Sputtering by ion bombardment theoretical concepts," in Sputtering by Particle Bombardment I. vol. 47, R. Behrisch, Ed., ed: Springer Berlin Heidelberg, 1981, pp. 9-71.
[36] P. D. Townsend, Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley. London ; New York: Academic Press, 1976.
[37] M. Ohring, Materials Science of Thin Films, 2 ed.: Academic Press, 2001.
[38] E. Hollands and D. S. Campbell, "The Mechanism of Reactive Sputtering," Journal of Materials Science, vol. 3, pp. 544-552, Sep 1968.
[39] D. H. Lowndes, D. B. Geohegan, A. A. Puretzky, D. P. Norton, and C. M. Rouleau, "Synthesis of novel thin-film materials by pulsed laser deposition," Science, vol. 273, pp. 898-903, Aug 16 1996.
[40] M. N. R. Ashfold, F. Claeyssens, G. M. Fuge, and S. J. Henley, "Pulsed laser ablation and deposition of thin films," Chemical Society Reviews, vol. 33, pp. 23-31, Jan 10 2004.
[41] H. M. Christen and G. Eres, "Recent advances in pulsed-laser deposition of complex oxides," Journal of Physics-Condensed Matter, vol. 20, Jul 2 2008.
[42] P. R. Willmott and J. R. Huber, "Pulsed laser vaporization and deposition," Reviews of Modern Physics, vol. 72, pp. 315-328, Jan 2000.
[43] S. G. Hansen and T. E. Robitaille, "Formation of Polymer-Films by Pulsed Laser Evaporation," Applied Physics Letters, vol. 52, pp. 81-83, Jan 4 1988.
[44] Y. Tsuboi, H. Adachi, E. Yamamoto, and A. Itaya, "Pulsed laser deposition of poly(tetrafluoroethylene), poly(methylmethacrylate), and polycarbonate utilizing anthracene-photosensitized ablation," Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers, vol. 41, pp. 885-890, Feb 2002.
[45] M. Karlik, "Atomic structure of grown-in antiphase boundaries (APB2) in the Fe-28Al-5Cr (at.%) alloy," Materials Science and Engineering: A, vol. 234–236, pp. 212-215, 8/30/ 1997.
[46] M. F. T. Okamoto, K. Takizawa, Corros. Eng., vol. 45, p. 425, 1996.
[47] J.-Y. Chen, G.-P. Yu, and J.-H. Huang, "Corrosion behavior and adhesion of ion-plated TiN films on AISI 304 steel," Materials Chemistry and Physics, vol. 65, pp. 310-315, 8/15/ 2000.
[48] J. B. Kim, B. S. Jun, and S. M. Lee, "Improvement of capacity and cyclability of Fe/Si multilayer thin film anodes for lithium rechargeable batteries," Electrochimica Acta, vol. 50, pp. 3390-3394, May 30 2005.
[49] J. P. Chu and Y. C. Wang, "Sputter-deposited Cu/Cu(O) multilayers exhibiting enhanced strength and tunable modulus," Acta Materialia, vol. 58, pp. 6371-6378, Nov 2010.
[50] S. A. Barnett and A. Madan, "Hardness and stability of metal-nitride nanoscale multilayers," Scripta Materialia, vol. 50, pp. 739-744, Mar 2004.
[51] W. D. Sproul, "Reactive sputter deposition of polycrystalline nitride and oxide superlattice coatings," Surface & Coatings Technology, vol. 86, pp. 170-176, Dec 1 1996.
[52] M. Stueber, H. Holleck, H. Leiste, K. Seemann, S. Ulrich, and C. Ziebert, "Concepts for the design of advanced nanoscale PVD multilayer protective thin films," Journal of Alloys and Compounds, vol. 483, pp. 321-333, Aug 26 2009.
[53] D.-G. Kim, T.-Y. Seong, and Y.-J. Baik, "Effects of annealing on the microstructures and mechanical properties of TiN/AlN nano-multilayer films prepared by ion-beam assisted deposition," Surface and Coatings Technology, vol. 153, pp. 79-83, 4/1/ 2002.
[54] Y.-Z. Tsai and J.-G. Duh, "Thermal stability and microstructure characterization of CrN/WN multilayer coatings fabricated by ion-beam assisted deposition," Surface and Coatings Technology, vol. 200, pp. 1683-1689, 11/21/ 2005.
[55] P. C. Yashar and W. D. Sproul, "Nanometer scale multilayered hard coatings," Vacuum, vol. 55, pp. 179-190, Dec 1999.
[56] H. Holleck and V. Schier, "Multilayer PVD coatings for wear protection," Surface and Coatings Technology, vol. 76–77, Part 1, pp. 328-336, 11// 1995.
[57] J. S. Koehler, "Attempt to Design a Strong Solid," Physical Review B, vol. 2, pp. 547-551, 07/15/ 1970.
[58] S. L. Lehoczky, "Strength enhancement in thin-layered Al-Cu laminates," Journal of Applied Physics, vol. 49, pp. 5479-5485, 1978.
[59] S. L. Lehoczky, "Retardation of dislocation generation and motion in thin-layered metal laminates," Physical Review Letters, vol. 41, pp. 1814-1818, 1978.
[60] O. S. I. Fayomi, A. P. I. Popoola, and C. A. Loto, "Tribo-Mechanical Investigation and Anti-Corrosion Properties of Zn-TiO2 Thin Film Composite Coatings from Electrolytic Chloride Bath," International Journal of Electrochemical Science, vol. 9, pp. 3885-3903, Jul 2014.
[61] Y.-C. Huang, T.-Y. Lo, C.-G. Chao, and W.-T. Whang, "Anti-corrosion characteristics of polyimide/h-boron nitride composite films with different polymer configurations," Surface and Coatings Technology, vol. 260, pp. 113-117, 12/15/ 2014.
[62] H. A. Jehn, "Improvement of the corrosion resistance of PVD hard coating–substrate systems," Surface and Coatings Technology, vol. 125, pp. 212-217, 3// 2000.
[63] C. Liu, Q. Bi, A. Leyland, and A. Matthews, "An electrochemical impedance spectroscopy study of the corrosion behaviour of PVD coated steels in 0.5 N NaCl aqueous solution: Part I. Establishment of equivalent circuits for EIS data modelling," Corrosion Science, vol. 45, pp. 1243-1256, 6// 2003.
[64] B. F. Chen, W. L. Pan, G. P. Yu, J. Hwang, and J. H. Huang, "On the corrosion behavior of TiN-coated AISI D2 steel," Surface and Coatings Technology, vol. 111, pp. 16-21, 1/10/ 1999.
[65] C. H. Chang, Z. H. Wen, S. K. Wang, and C. Y. Duh, "Capnellenes from the formosan soft coral Capnella imbricata," Journal of Natural Products, vol. 71, pp. 619-621, 2008.
[66] H. C. Barshilia, B. Deepthi, A. S. Arun Prabhu, and K. S. Rajam, "Superhard nanocomposite coatings of TiN/Si3N4 prepared by reactive direct current unbalanced magnetron sputtering," Surface and Coatings Technology, vol. 201, pp. 329-337, 2006.
[67] A. Flink, T. Larsson, J. Sjölén, L. Karlsson, and L. Hultman, "Influence of Si on the microstructure of arc evaporated (Ti,Si)N thin films; evidence for cubic solid solutions and their thermal stability," Surface and Coatings Technology, vol. 200, pp. 1535-1542, 11/21/ 2005.
[68] C. Liu, Q. Bi, H. Ziegele, A. Leyland, and A. Matthews, "Structure and corrosion properties of PVD Cr-N coatings," Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films, vol. 20, pp. 772-780, May-Jun 2002.
[69] C. Mendibide, J. Fontaine, P. Steyer, and C. Esnouf, "Dry Sliding Wear Model of Nanometer Scale Multilayered TiN/CrN PVD Hard Coatings," Tribology Letters, vol. 17, pp. 779-789, 2004/11/01 2004.
[70] O. Olea-Mejia, W. Brostow, and E. Buchman, "Wear Resistance and Wear Mechanisms in Polymer plus Metal Composites," Journal of Nanoscience and Nanotechnology, vol. 10, pp. 8254-8259, Dec 2010.
[71] M. H. Cho, S. Bahadur, and J. W. Anderegg, "Design of experiments approach to the study of tribological performance of Cu-concentrate-filled PPS composites," Tribology International, vol. 39, pp. 1436-1446, 11// 2006.
[72] J. Fustes, A. Gomes, and M. I. da Silva Pereira, "Electrodeposition of Zn–TiO2 nanocomposite films—effect of bath composition," Journal of Solid State Electrochemistry, vol. 12, pp. 1435-1443, 2008/11/01 2008.
[73] E. Rahmani, A. Ahmadpour, and M. Zebarjad, "Tribological properties of multilayer nanostructure TiO2 thin film doped by SiO2," Journal of Sol-Gel Science and Technology, vol. 63, pp. 65-71, 2012/07/01 2012.
[74] M. D. Bermúdez, F. J. Carrión-Vilches, and G. Martínez-Nicolás, "Wear of liquid crystal-additivated polymers against steel," Journal of Applied Polymer Science, vol. 74, pp. 831-837, 1999.
[75] M. D. Bermúdez, F. J. Carrión-Vilches, I. Martínez-Mateo, and G. Martínez-Nicolás, "Comparative study of the tribological properties of polyamide 6 filled with molybdenum disulfide and liquid crystalline additives," Journal of Applied Polymer Science, vol. 81, pp. 2426-2432, 2001.
[76] H. Unal, A. Mimaroglu, and V. Serdar, "Dry sliding performance of thermoplastics against reinforced unsaturated polyester (BMC): In use in electrical contact breakers components," Wear, vol. 261, pp. 841-847, 10/20/ 2006.
[77] W. C. Oliver and G. M. Pharr, "An Improved Technique for Determining Hardness and Elastic-Modulus Using Load and Displacement Sensing Indentation Experiments," Journal of Materials Research, vol. 7, pp. 1564-1583, Jun 1992.
[78] C.-M. Cheng and Y.-T. Cheng, "On the initial unloading slope in indentation of elastic-plastic solids by an indenter with an axisymmetric smooth profile," Applied Physics Letters, vol. 71, pp. 2623-2625, 1997.
[79] J. Meneve, D. Havermans, K. Vercammen, H. Haefke, Y. Gerbig, and E. Pfluger, "Mechanical properties and tribological behaviour of state-of-the-art diamond-like carbon coatings," Advanced Engineering Materials, vol. 3, pp. 163-166, Mar 2001.
[80] P. R. Chalker, S. J. Bull, and D. S. Rickerby, "A Review of the Methods for the Evaluation of Coating-Substrate Adhesion," Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing, vol. 140, pp. 583-592, Jul 7 1991.
[81] J. M. Bennett, L. Mattsson, M. P. Keane, and L. Karlsson, "Test of Strip Coating Materials for Protecting Optics," Applied Optics, vol. 28, pp. 1018-1026, Mar 1 1989.
[82] T. R. Thomas, Rough surfaces, 2 ed.: Imperial College, 1999.
[83] A. Marmur, "Thermodynamic Aspects of Contact-Angle Hysteresis," Advances in Colloid and Interface Science, vol. 50, pp. 121-141, May 13 1994.
[84] D. K. Owens and R. C. Wendt, "Estimation of Surface Free Energy of Polymers," Journal of Applied Polymer Science, vol. 13, pp. 1741-&, 1969.
[85] G. Dieter, Mechanical Metallurgy, 3 ed.: McGraw-Hill Education, 1986.
[86] E. W. Wong, P. E. Sheehan, and C. M. Lieber, "Nanobeam mechanics: Elasticity, strength, and toughness of nanorods and nanotubes," Science, vol. 277, pp. 1971-1975, Sep 26 1997.
[87] H. Hosokawa, A. V. Desai, and M. A. Haque, "Plane stress fracture toughness of freestanding nanoscale thin films," Thin Solid Films, vol. 516, pp. 6444-6447, Jul 31 2008.
[88] G. M. Pharr, "Measurement of mechanical properties by ultra-low load indentation," Materials Science and Engineering a-Structural Materials Properties Microstructure and Processing, vol. 253, pp. 151-159, Sep 30 1998.
[89] B. R. Lawn, A. G. Evans, and D. B. Marshall, "Elastic-Plastic Indentation Damage in Ceramics - the Median-Radial Crack System," Journal of the American Ceramic Society, vol. 63, pp. 574-581, 1980.
[90] A. G. Evans and E. A. Charles, "Fracture Toughness Determinations by Indentation," Journal of the American Ceramic Society, vol. 59, pp. 371-372, 1976.
[91] D. S. Harding, W. C. Oliver, and G. M. Pharr, "Cracking during nanoindentation and its use in the measurement of fracture toughness," Thin Films: Stresses and Mechanical Properties V, vol. 356, pp. 663-668, 1995.
[92] Z. H. Xia, W. A. Curtin, and B. W. Sheldon, "A new method to evaluate the fracture toughness of thin films," Acta Materialia, vol. 52, pp. 3507-3517, Jul 12 2004.
[93] M. Jirout and J. Musil, "Effect of addition of Cu into ZrOx film on its properties," Surface & Coatings Technology, vol. 200, pp. 6792-6800, Aug 1 2006.
[94] G. G. Stoney, "The tension of metallic films deposited by electrolysis," Proceedings of the Royal Society of London Series a-Containing Papers of a Mathematical and Physical Character, vol. 82, pp. 172-175, May 1909.
[95] D. E. N. J. I. Goldstein, P. Echlin, D. C. Joy, C. E. Lyman, L. Sawyer, J. Michael, and E. Lifshin, Scanning Electron Microscopy and X-ray Microanalysis, 3 ed.: Plenum, 2003.
[96] V. S. Sastri, "Corrosion Inhibitors: Principles and Applications," Anti-Corrosion Methods and Materials, vol. 49, p. null, 2002.
[97] K. S. Katti, B. Mohanty, and D. R. Katti, "Nanomechanical properties of nacre," Journal of Materials Research, vol. 21, pp. 1237-1242, May 2006.
[98] A. L. Patterson, "The Scherrer formula for x-ray particle size determination," Physical Review, vol. 56, pp. 978-982, Nov 1939.
[99] G. Kumar, H. X. Tang, and J. Schroers, "Nanomoulding with amorphous metals," Nature, vol. 457, pp. 868-872, Feb 12 2009.
[100] A. Tetelin, L. Blanc, G. Tortissier, C. Boissiere, C. Dejous, and D. Rebiere, "Guided SH-SAW Characterization of Elasticity Variations of Mesoporous TiO2 Sensitive Films during Humidity Sorption," 2010 Ieee Sensors, pp. 2136-2140, 2010.
[101] P. M. Hergenrother, K. A. Watson, J. G. Smith, J. W. Connell, and R. Yokota, "Polyimides from 2,3,3 ',4 '-biphenyltetracarboxylic dianhydride and aromatic diamines," Polymer, vol. 43, pp. 5077-5093, Sep 2002.
[102] Q. Sun, B. Schindelholz, M. Knirr, A. Schmid, and K. Zinn, "Complex genetic interactions among four receptor tyrosine phosphatases regulate axon guidance in Drosophila," Molecular and Cellular Neurosciences, vol. 17, pp. 274-291, 2001.
[103] R. Wang, K. Hashimoto, A. Fujishima, M. Chikuni, E. Kojima, A. Kitamura, et al., "Photogeneration of Highly Amphiphilic TiO2 Surfaces," Advanced Materials, vol. 10, pp. 135-138, 1998.
[104] Y. V. Pleskov, "A. Fujishima, K. Hashimoto, and T. Watanabe, TiO2 photocatalysis: Fundamentals and applications, Tokyo: Bks, Inc., 1999," Russian Journal of Electrochemistry, vol. 35, pp. 1137-1138, Oct 1999.
[105] S.-Y. Maeng, D.-K. Lee, J.-W. Choi, H.-J. Kim, C.-Y. Kang, N. Sahn, et al., "Design and fabrication of multilayer actuator using floating electrode," Materials Chemistry and Physics, vol. 90, pp. 405-410, 4/15/ 2005.
[106] B. Shoykhet, M. A. Grinfeld, and P. M. Hazzledine, "Internal stresses and strains in coherent multilayers," Acta Materialia, vol. 46, pp. 3761-3766, 1998.
[107] Y. Chen, Y. Liu, C. Sun, K. Y. Yu, M. Song, H. Wang, et al., "Microstructure and strengthening mechanisms in Cu/Fe multilayers," Acta Materialia, vol. 60, pp. 6312-6321, 10// 2012.
[108] J. M. Castanho and M. T. Vieira, "Effect of ductile layers in mechanical behaviour of TiAlN thin coatings," Journal of Materials Processing Technology, vol. 143-144, pp. 352-357, 2003.
[109] H. Gao, B. Ji, I. L. Jäger, E. Arzt, and P. Fratzl, "Materials become insensitive to flaws at nanoscale: Lessons from nature," Proceedings of the National Academy of Sciences of the United States of America, vol. 100, pp. 5597-5600, 05/05
[110] C. L. Malik, S. M. Stover, R. B. Martin, and J. C. Gibeling, "Equine cortical bone exhibits rising R-curve fracture mechanics," Journal of Biomechanics, vol. 36, pp. 191-198, 2/ 2003.