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研究生: 蘇宏銘
Su,Hung-Ming
論文名稱: 以核反應法分析真空中水氣吸附之研究
Investigating Water Adsorption on Vacuum Surface by Nuclear Reaction Analysis
指導教授: 陳俊榮
Chen,June-Rong
口試委員:
學位類別: 碩士
Master
系所名稱: 原子科學院 - 生醫工程與環境科學系
Department of Biomedical Engineering and Environmental Sciences
論文出版年: 2008
畢業學年度: 97
語文別: 中文
論文頁數: 94
中文關鍵詞: 核反應分析法絕熱膨脹效應真空
相關次數: 點閱:4下載:0
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  • 摘要
    利用1H(19F,αγ)16O核反應分析技術研究絕熱膨脹效應水氣吸附現象。實驗中遭逢的問題有二次電子影響離子電流量測與氣體阻擋本領造成能量損失而未達共振能量。本文設計離子束引出管和改變入射離子能量方法,研究測試改善的效果並進行分析比較。
    離子電流量測時因二次電子干擾量測準確性,使用離子束引出管於實驗腔氣壓為10-6mbar環境下,藉由A段加-100V偏壓以避免管路上的二次電子撞擊樣品而被量測;B段加-120V即可有效抑制離子束撞擊樣品表面產生之二次電子,本實驗結果得到一個氟離子撞擊樣品表面約會產生16個二次電子。能量損失估計實驗,結果顯示實驗腔曝入氦氣0.26mbar和0.52mbar時,離子束能量損失分別為59.4keV與133keV,並藉由能量損失與氣壓模擬計算得到等效長度之比較,證實能量損失來自於氣體的阻擋本領。
    本文最後使用氬氣直流輝光放電清洗藉以降低樣品背景值,結果顯示放電離子劑量累積至3.3×1019ion/cm2時,可降低樣品背景訊號達85%。絕熱膨脹效應實驗結果方面,證明曝入氣體(氦氣或氮氣)與水氣混合後,抽氣造成的絕熱膨脹效應會增加水氣吸附於樣品表面。


    目錄 中文摘要--------------------------------------------------------------------------- i 英文摘要----------------------------------------------------------------------- ii 誌謝------------------------------------------------------------------------------ iii 目錄----------------------------------------------------------------------------- iv 表目錄-------------------------------------------------------------------------- vii 圖目錄-------------------------------------------------------------------------- viii 第一章、 引言---------------------------------------------------------------------1 第二章、 原理---------------------------------------------------------------------6 2.1. 氣體的吸附與脫附---------------------------------------------6 2.2. 核反應分析法---------------------------------------------------7 2.3. 絕熱膨脹---------------------------------------------------------8 2.4. 差分抽氣---------------------------------------------------------9 2.5. 輝光放電清洗--------------------------------------------------10 2.6. 荷電粒子的阻擋本領-----------------------------------------11 第三章、 實驗系統與步驟----------------------------------------------------13 3.1. 實驗系統--------------------------------------------------------13 3.1.1. 串極式靜電加速9SDH-2--------------------------13 3.1.2. 差分抽氣系統---------------------------------------15 3.1.3. 加瑪射線偵檢系統---------------------------------17 3.1.4. 實驗腔------------------------------------------------18 3.2. 實驗前準備步驟-----------------------------------------------19 3.2.1. 樣品準備---------------------------------------------19 3.2.2. 離子束準直------------------------------------------20 3.3. 實驗系統測試--------------------------------------------------21 3.3.1. 聚醯亞胺薄膜靶材實驗---------------------------21 3.3.2. 能量校正實驗---------------------------------------22 3.3.3. 絕熱膨脹效應之溫度量測實驗------------------22 3.4. 實驗步驟--------------------------------------------------------23 3.4.1. 離子電流量測---------------------------------------23 3.4.2. 高氣壓造成能量損失之影響---------------------24 3.4.3. 絕熱膨脹效應實驗---------------------------------25 3.4.3.1. 降低實驗背景值----------------------26 3.4.3.2. 氮氣與氦氣絕熱膨脹效果比較----27 第四章、 實驗結果與討論----------------------------------------------------29 4.1. 離子電流量測------------------------------------------------29 4.1.1. 加裝離子束引出管及加偏壓之影響-----------29 4.1.2. 使用磁鐵減少散射電子之干擾-----------------31 4.2. 離子束穿過氣體之能量損失------------------------------33 4.2.1. 不同氣壓下共振能量之測量------------------33 4.2.2. 阻擋本領與能量損失---------------------------34 4.2.3. 實驗管路氣壓分布與平均氣壓計算---------34 4.2.4. 等效長度計算------------------------------------36 4.3. 絕熱膨脹效應實驗------------------------------------------38 4.3.1. 降低實驗背景值---------------------------------39 4.3.2. 氮氣與氦氣絕熱膨脹效果比較---------------40 4.3.3. 樣品表面水氣吸附量---------------------------41 第五章、 結論--------------------------------------------------------------------43 參考文獻--------------------------------------------------------------------------46 附表--------------------------------------------------------------------------------51 附圖-----------------------------------------------------------------------------60

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