摘要
本論文研究之六維運動量測裝置(six-DOFs Motion Measurement Device)具Linapod平行連桿機構，包含三大部分：滑軌組件、下平板以及六根固定長度之連接桿。滑軌組件含有六根平行軌道環繞於主軸外側，各自搭載一球接頭與光學尺讀頭，軌道背面安裝有光學尺，下平板上則固定有六個球接頭，使用六根連接桿一對一連接滑軌上之滑塊與下平板對應之球接頭。滑軌組件與主軸固定，而下平板則安裝在工作台上。當機器驅動，使滑軌組件與下平板有相對運動時，該運動將推動各支滑軌上的滑塊，而對應之光學尺量測出各滑塊之位置，透過機構正轉換，得出滑軌組件與下平板間的六維相對關係。
本論文以此Linapod六維運動量測裝置為基礎，研究增加其精確度與可靠度之方法。改進方法可大致區分為兩類：機構元件改進及起始化輔具設計。機構元件之改進旨在善前一代系統之機構穩定性，使各機構參數不受環境溫度及機台震動影響；起始化輔具設計則能更精確地鑑定六維運動量測裝置的機構參數，以提升系統之精度。
本研究另外將Linapod平行機構之六維運動量測裝置安裝於三軸CNC工具機上，構成六維位置與指向直接回授之封閉機構鏈CNC工具機，以之進行工件加工，驗證加工精度以及改善效果。

Abstract
This six-DOFs Motion Measurement Device (MMD) utilizes the Linapod parallel mechanism. It consists of three main parts: a slide and rail assembly, a lower plate and six connecting rods with fixed length. The slide and rail assembly contains six parallel rails surrounding and jointed to the spindle housing. Each rail has its own optical linear encoder with the scale attached to the back side of the rail and the read head mounted on the slide. The lower plate has six ball joints built into it. Through the connecting rods, each ball joint on the lower plate is connected to another one on a slide of the rail assembly, thus completing the Linapod parallel mechanism. Whenever there’s relative motion between the rail assembly and the lower plate, the rods cause the slides to move. The motions of the slides are measured by the read heads. With the read heads monitoring and feeding back the positions of the slides, the six-DOF relationship between the rail assembly and the lower plate can be solved through forward kinematic transformation.
This thesis is based on the six-DOFs Motion Measurement Device Linapod parallel mechanism, and the aim is to enhance the accuracy and reliability of the MMD device with two approaches: the improvement of component design and the usage of new calibration equipment. The improved of component design aims to make this Linapod parallel mechanism more stable when subjected to temperature change or vibration. The newly designed calibration equipment allows more accurate identification of kinematic parameters.
This thesis also applies this Linapod parallel mechanism onto a three axis machine tool, to close the kinematic chain from the tool to the work piece, the sensor for the detecting of the six-DOF relationship between tool and work piece. With such a device as feedback sensor for the, parts are machined and inspected to validate the accuracy improvement.

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