可攜式電子元件中，電源供應器一直是最大的一個元件。由於電源供應器包含了磁性元件，例如變壓器和電感器，因此，縮小此磁性元件對於可攜式電子元件的尺寸縮小是有幫助的。
本研究主要論述微型變壓器之設計、製作與量測。本研究選擇螺線型結構設計及製作微型變壓器，此微型變壓器利用微機電製程技術中的面型加工技術、厚光阻製程和微電鍍製程製作。微型變壓器的結構為在磁鐵的兩端以微電鍍的技術電鍍銅線圈。實驗中，使用的基材為4吋矽晶圓，為了減少基材產生的基材損耗，因此，在4吋矽晶圓上長1μm的二氧化矽做為絕緣層，整個元件的支撐結構使用負光阻SU-8，磁鐵使用可室溫製作的Ni80Fe20。元件之結構參數為一次側線圈和二次側線圈數皆為20圈，銅線圈之線寬大小為80μm ，銅線圈厚度為3μm，元件之半徑為890μm，元件尺寸大小為2.01mm×2.01mm×0.03mm。在電源供應中，微型變壓器主要用途為做訊號之傳遞，因此，本研究利用Agilent 54624A示波器和Agilent 33220A波形產生器對微型變壓器的低頻(1MHz~10MHz)電壓傳輸比率和訊號傳遞時的失真現象作量測，利用Agilent E8631A網路分析儀對微型變壓器的高頻(10MHz~50MHz)電壓傳輸比率作量測。

[1] R. J. Huljak, V. J. Thottuvelil, A. J. Marsh, B. A. Miller, "Where are power supplied headed ? ", Proc. 5th IEEE APEC, Feb 2000 , pp10-17.

[2] R. Soohoo, “Magnetic thin film inductor for integrated circuit application,” IEEE Trans. Magn., vol. MAG-15, pp. 1803–1805, Nov. 1979.

[3] K. Mizuguchi and K. Yamasawa, “An on-board-type micro-switching converter with MHz band-operation,” IEEE Trans. Magn., vol. 9, no. 2, pp. 174–178, 1994
.
[4] T. Sato, M. Tomita, A. Sawabe, T. Inoue, T. Mizoguchi, and M. Sahashi, “A magnetic thin film inductor and its application to a MHz switching dc-dc converter,” IEEE Trans. Magn., vol. 30, pp. 217–223, Mar. 1994.

[5] T Sato, M. Hasegawa, T. Mizoguchi, and M. Sahashi, “Study of high power planar inductor,” IEEE Trans. Magn., vol. 27, pp. 5277–5279, Nov. 1991.

[6] J. Park and M. Allen, “A comparison of micromachined inductors with different magnetic core materials,” in Proc. IEEE 46th Electron. Comp. Technol. Conf., Orlando, FL, 1996, pp. 375–381.

[7] 楊嘉麗，“新興科技介紹-微機電技術”，財團法人資訊工業策進會資訊市場情報中心 ，2003年12月

[8] Masato Mino, Toshiaki Yachi, Akio Tago, Keiichi Yanagisawa, and Kazuhiko Sakakibara, “A New Planar Microtransformer for Use in Micro-Switching Converters,” IEEE TRANSACTIONS ON MAGNETICS, VOL. 28, NO. 4, JULY 1992

[9] Jae Yeong Park, and Mark G. Allen, “Integrated Electroplated Micromachined Magnetic Devices Using Low Temperature Fabrication Processes,” IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING,, VOL. 23, NO. 1, JANUARY 2000

[10] Eui-Jung Yun, Myunghee Jung, ChaeIl Cheon, and Hyoung Gin Nam, “Microfabrication and Characteristics of Low-Power High-Performance Magnetic Thin-Film Transformers,” IEEE TRANSACTIONS ON MAGNETICS, VOL. 40, NO. 1, JANUARY 2004

[11] Richard J. Rassel, C. Fred Hiatt, John DeCramer, and Stephen A. Campbell, “Fabrication and Characterization of a Solenoid-Type Microtransformer,” IEEE TRANSACTIONS ON MAGNETICS, VOL. 39, NO. 1, JANUARY 2003

[12] Robert W. Erickson ,and Dragan Maksimovic, “Fundamentals of Power Electronics,” Chapter13, Springer, 2001

[13] Hugh Hildreth Skilling, “Electrical Engineering Circuits,” 2nded, p.330-348,1965.

[14] Fu Keung Wong, "High Frequency Transformer for Switching Mode Power Supplies", Chapter 1, Doctoral thesis, School of Microelectronic Engineering Faculty of Engineering and Information Technology Griffith University, Brisbane, Australia, March 2004

[15] Gapped core current transformer characteristics and Performance, IEEE Transactions on Power Delivery, Vol 5, No. 4. November 1990

[16] 張正宏，“射頻網路分析儀之原理與實驗”，P2，民國89年10月23日

[17] 徐永珍，“高頻量測技術與實驗上課講義”，清華大學電子工程研究所，2007.9

[18] Quantum Design Co. Ltd.

[19] Philip H. Rieger, “Electrochemistry”, Chapman&Hall, 1994.

[20] Wendy C. Grande and Jan B. Talbot, “Electrodeposition of Thin Films of Nickel-Iron:I Experiment”, Journal of The Electrochemical Society, vol. 140, No. 3, 1993, pp 669-674.

[21]Wendy C. Grande and Jan B. Talbot, “Electrodeposition of Thin Films of Nickel-Iron:II Experiment”, Journal of The Electrochemical Society, vol. 140, No. 3, 1993, pp 675-681. [22] Clariant data sheet, “AZ9200 Thick Film Photoresist”.

[23] Vcoe□de□ra, B Le Goff, and N Fabre, “Potentialities of a new positive photoresist for the realization of thick moulds”, J Micromesh. Microeng. 9 No 2 (June 1999) 173-175.

[24] S Roth, L Dellmann, G-A Racine and N F de Rooij, “High aspect ratio UV photolithography for electroplated structures”, J. Micromesh. Microeng. 9 No 2(June 1999) 105-108.

[25] 經濟部技術處產業技術知識服務計畫整理編輯群， “電漿技術應用市場專題研究”， 經濟部技術處產業技術知識服務計畫專案辦公室，2004

[26]Michael Quirk, Julian Serda, “Semiconductor Manufacturing Technology”, Chapter 12, Prentice Hall, 2006.3

[27]Hong Xiao, “Introduction to Semiconductor Manufacturing Technology”, Prentice Hall, 2001

[28]田浩延，“方解石極性選擇繞射式光學元件設計與製作”，pp.31，中央大學光電工程研究所碩士論文，2003.7

[29] “ Agilent 4284A4285A Precision LCR Meter Family’’ Agilent technology , 2004.7

[30] “ Agilent Technologies Impedance Measurement Handbook ’’ , Chapter 3, Agilent technology, 2006.7

[31] Colonel Wm. T. Mclyman, “Transformer and Inductor Design Handbook , Third Edition”, Chapter 1, Kg Magnetics, Inc. 2004

[32] D Flynn, R S Dhariwal and M P Y Desnulliez, “A design study of microscale magnetic components for operation in the MHz frequency range”, Journal of Micromechanics and Microengineering, 16, pp.1811- 1818, 2006

[33]IC Design Magazine編輯群，“方型螺旋電感模擬與量測”， Chip123 Technology Co., Ltd. 2001.8