以ALD成長氧化鋅鎵透明導電薄膜應用於紫光發光二極體上

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研究生：	李忠諺
論文名稱：	以ALD成長氧化鋅鎵透明導電薄膜應用於紫光發光二極體上 GZO Transparent Conductive Layer Grown by ALD on Violet Light-Emitting Diodes
指導教授：	吳孟奇
口試委員:	何充隆劉埃森楊智超
學位類別：	碩士 Master
系所名稱：	電機資訊學院 - 電子工程研究所 Institute of Electronics Engineering
論文出版年：	2013
畢業學年度：	101
語文別：	英文
論文頁數：	74
中文關鍵詞：	原子層沉積、氧化鋅鎵透明導電薄膜、紫光發光二極體
外文關鍵詞：	gallium-doped ZnO (GZO), Violet LEDs, InGaN/GaN
相關次數：	點閱：2 下載：0
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近年來，氧化鋅鎵(GZO)已逐漸成為一個受矚目的透明導電薄膜材料，並且被應用於氮化銦鎵(InGaN)系列的發光二極體(LEDs)上。而GZO本身是屬於寬能隙n-type的半導體氧化物，透過我們研究所得到的結果，發現經由ALD (atomic-layer-deposition)成長厚度為250 nm的GZO薄膜具有高的摻雜濃度(~1×1021 cm-3)及低電阻率(~4×10-4 Ω-cm)的特性，此外，ALD-GZO薄膜在可見光波段有高達約90%的穿透率。
為了改善GZO薄膜在短波長的穿透率，我們透過快速熱擴散(rapid-thermal diffusion)的新方法，將鋅(Zn)與鎂(Mg)以driven-in的方式摻入ALD-GZO薄膜裡面，藉由紫外光可見光光譜儀量測結果，發現ALD-GZO薄膜在摻入Zn與Mg後其吸收邊界有明顯的藍移現象，並且其能隙也隨之增加。
另外，我們使用鎳/金(Ni/Au)來做為LEDs的p-GaN接觸電極，藉由調整Ni的厚度以及熱退火的溫度來獲得Ni/Au與p-GaN之間最佳的歐姆接觸，並且根據CTLM (circular transmission line model)的理論求得其最佳之特徵接觸電阻值(specific contact resistance, ρc)為1.4×10-3 Ω•cm2。
接著我們將Zn與Mg摻入ALD-GZO薄膜來做為透明導電層應用在400 nm及380 nm的InGaN/GaN紫光LEDs上，發現其EL (electroluminescence)的發光強度在注入電流為20 mA的情況下，以Zn與Mg摻入ALD-GZO做為透明導電層的400 nm與380 nm的LEDs與單純只以ALD-GZO來做透明導電層的LEDs相比較，分別提升了約1.4及2.5倍的強度，並且其光輸出功率在注入電流為20 mA的情況下，400 nm與380 nm的LEDs分別從6.1 mW提升至7.7 mW，以及0.7 mW提升至1.9 mW，光輸出功率分別增強了27%與166%，結果顯示將Zn與Mg以driven-in的方式摻入ALD-GZO薄膜，對於應用在較短波長的紫光LEDs上，其發光強度有更明顯的改善效果。

In recent years, gallium-doped zinc oxide (GZO) has passed into a very popular material as transparent conductive oxide (TCO) films to apply on InGaN-based light-emitting diodes (LEDs). GZO is a wide band-gap and n-type semiconducting oxide, which can be used as a transparent contact. The results reveal that the atomic layer deposition (ALD)-GZO films with a thickness of 250 nm have an electron concentration of ~1 × 1021 cm-3, low resistivity of ~4 × 10-4 Ω-cm, and high transmittance (~90%) at the visible wavelengths.
In order to enhance the transmittance in short wavelengths of GZO films, we employed Zn and Mg driven-in ALD-GZO films via the novel method of rapid-thermal diffusion. The ultraviolet-visible spectrum shows a significant blue-shift of the absorption band edge and an increasing optical band gap for the Zn and Mg driven-in GZO films.
Additionally, we used circular transmission line model (CTLM) to perform the experiment of Ni/Au ohmic contact on p-GaN, and tried to adjust the thickness of Ni and annealing temperature to obtain optimum Ni/Au ohmic contact on p-GaN. We acquired the best specific contact resistance (ρc) is 1.4 × 10-3 Ω•cm2.
By means of Zn and Mg driven-in GZO as transparent conducting layer onto 400- and 380-nm InGaN/GaN, the electroluminescence intensity of 400- and 380-nm LEDs with Zn and Mg driven-in GZO films has nearly 1.4 and 2.5 times of magnitude stronger than the conventional LEDs only with GZO films at 20 mA. The 400- and 380-nm LEDs with Zn and Mg driven-in GZO films also reveal a light output power of 7.7 and 1.9 mW at 20 mA as compared to the conventional LEDs only with GZO films of 6.1 and 0.7 mW, respectively. The 400- and 380-nm LEDs also exhibit an enhancement of 27% and 166% in light output power. These results present that Zn and Mg driven-in ALD-GZO films have significant improvement for the light extraction on the shorter wavelengths for the violet and ultraviolet (UV) LEDs.

中 文 摘 要..........................................................................I
Abstract...........................................................................II
誌 謝..............................................................................III
Contents...........................................................................IV
List of Figure.....................................................................VI
List of Table......................................................................XI
Chapter 1. Introduction............................................................1
1-1 Development of III-nitride-based light-emitting diodes.........................1
1-2 Research motivation and purpose................................................3
Chapter 2. The Basis of Theory and Characterization Instruments....................7
2-1 Basic theory of light-emitting diodes..........................................7
2-2 The structure and characteristic of GZO films..................................9
2-3 Atomic layer deposition system.................................................10
2-4 Theory of current spreading layer..............................................11
2-5 Ni/Au ohmic contact on p-GaN...................................................12
2-6 Theory of circular transmission line model.....................................13
2-7 Characterization instruments...................................................15
2-7-1 I-V and C-V characteristic measurement systems...............................15
2-7-2 Electroluminescence (E-L) measurement system.................................15
2-7-3 Luminous Intensity (L-I) measurement.........................................16
2-7-4 Divergence angle measurement system..........................................17
Chapter 3. LEDs Device Structure and Fabrication...................................27
3-1 Epitaxial structure design concept.............................................27
3-2 The design of Mask.............................................................27
3-3 Zn and Mg driven-in ALD-GZO films..............................................28
3-4 Experimental process of CTLM...................................................28
3-5 Experiment process of violet LEDs..............................................29
Chapter 4. Result and Discussion...................................................39
4-1 Electro-optical characteristics of Zn and Mg driven-in ALD-GZO films...........39
4-1-1 Effect of post-annealing temperature on the ALD- GZO films...................39
4-1-2 Effect of driven-in temperature and driven-in source on the ALD-GZO films....40
4-2 The characteristics analysis of Ni/Au ohmic contact on p-GaN...................43
4-3 Electro-optical characteristics of violet LEDs.................................45
4-3-1 I-V characteristics analysis of violet LEDs..................................46
4-3-2 C-V characteristics analysis of violet LEDs..................................48
4-3-3 Electroluminescence (EL) spectrum of violet LEDs.............................49
4-3-4 Luminous Intensity (L-I) of violet LEDs......................................50
4-3-5 Near-field light intensity of violet LEDs....................................51
4-3-6 Divergence angle of violet LEDs..............................................51
4-3-7 Frequency response of violet LEDs............................................51
Chapter 5. Conclusions.............................................................70
References.........................................................................71
                                

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