本研究提出的新型三軸致動微型機械臂，透過了體型微加工製程（Bulk Micromachining Process）加以製作，為一體成型的結構；其主體結構可分為三軸移動平台以及微型鑷夾兩部分。其中，三軸移動平台在致動時，由於在各個致動方向的運動皆不相互干擾，因此具有多自由度的精密運動能力。而微型鑷夾的彈簧設計，也使得弧狀軌跡的問題有所改善，因此在夾取物體的定位精度上將有所提昇。
隨著微機電系統（MEMS）技術的蓬勃發展，各種微元件如雨後春筍般，陸續的被研究發表。微元件包含了微致動器與微感測器；將各式微元件組裝整合成多功能的模組後，其應用會更為廣泛。新型的三軸致動微型機械臂，正具備了可精密操控與多自由度的特性，對於各項精密的微元件組裝工作而言，將有相當大的助益。

近年來生物醫學界，在人類基因圖譜的研究上有突破性的發展，準確的生醫檢測技術可說是功不可沒，然而細胞的操控技術更是其中的核心關鍵。新型三軸致動微型機械臂，除了可應用於精密的微元件組裝工作之外，更具有操控生物細胞的潛力；如此不僅對於各項生醫檢測有所幫助，還可將其應用面推廣至顯微手術的精密化。

In this study, a novel three-axis driven micro robot arm was design and fabricated. The robot arm consists of a three-axis position stage and a micro gripper. Moreover, the structures of this robot arm were monolithically integrated using bulk micromachining process on (111) silicon wafer. Hence, its in-plane and out-of-plane positions are precisely controlled by two comb drive actuators and a vertical comb, respectively.
In applications, the robot arm can be exploited as a manipulator in the area of Nano and Bio technologies. For instance, it will be useful to assemble the micro and nano components. The robot arm also has the potential to manipulate cells and conducting microsurgery.

1. K. Ikuta, T. Kato, S. Nagata, “Development and experimental verification of micro active forceps for microsurgery, “ Micro Machine and Human Science, 1996, Proceedings of the Seventh International Symposium, Nagoya, Japan, Oct, 1996, pp 229 –234.
2. K. Ikuta, T. Kato, S. Nagata, “Micro active forceps with optical fiber scope for intra-ocular microsurgery, “ Micro Electro Mechanical Systems, MEMS '96, San Diego, CA, Feb, 1996, pp 456 –461.
3. P. Brett, G. Tritto, and Ma Xianghong, “Design considerations for micro-surgical tools, “ Engineering in Medicine and Biology Society, 2001. Proceedings of the 23rd Annual International Conference of the IEEE, 2, 2001, pp 1374 –1376.
4. C. J. Kim, M. G. Lim, R. S. Muller, A. P. Pisano, “ Polysilicon microgripper ,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, Jun, 1990, pp 48 –51.
5. C. J. Kim, R. S. Muller, A. P. Pisano, “Overhung electrostatic microgripper,” Transducers '91. , San Francisco, CA, Jun, 1991, pp 610 –613.
6. C. J. Kim, R. S. Muller, A. P. Pisano, “Silicon-processed overhanging microgripper ,” Microelectromechanical Systems, 1, pp 31 –36, 1992.
7. P. B. Chu and S. J. Pister, “Analysis of closed-loop control of parallel-plate electrostatic microgrippers ,” Robotics and Automation, 1994. Proceedings., San Diego, CA, 1, May, 1994, pp 820 -825.
8. B. E. Volland, H. Heerlein, I. W. Rangelow, “Electrostatically driven microgripper,” Microelectronic Engineering, 61-62, pp 1015-1023, 2002.
9. M.C. Carrozza, P. Dario,B. Hannaford, A. Menciassi, “4-axis electromagnetic microgripper,” Robotics and Automation, 1999. Proceedings., Detroit, MI, May 1999, 4, pp 2899 –2904.
10. Y. Suzuki, “Flexible microgripper and its application to micromeasurement of mechanical and thermal properties,” MEMS '96, Proceedings., San Diego, CA, Feb, 1996, pp 406 –411.
11. M. C. Carrozza, A. Menciassi, G. Tiezzi, and P. Dario, “The development of a LIGA-microfabricated gripper for micromanipulation tasks,” J. Micromech. Microeng., 8 No 2, pp 141-143, Jun, 1998.
12. S. Ballandras, S. Basrour, D. Hauden,L. Robert, “Mechanical characterization of microgrippers realized by LIGA technique ,” Transducers'97, Chicago, IL, Jun, 1997, 1, pp 16-19.
13. R. Salim , H. Wurmus , A. Harnisch , and D. H. Senberg, ” Microgrippers created in microstructurable glass,” Microsystem Technologies., 4, pp 32-34, Jan, 1997.
14. M. Kohl, E. Just, W. Pfleging, S. Miyazaki, “SMA microgripper with integrated antagonism,” Sensors and Actuators., A83, pp 208-213, May 2000.
15. Manfred Kohl, Berthold Krevet, and Elmar Just , “SMA Microgripper System,” Transducers'01, Munich, Germany, Jun, 2001, pp. 646-652.
16. P. L. Abraham, R.C. Dino, A. K. Peter, L. Stacy, T. Jimmy, and M. Allen Northrup, “A Practical Microgripper by Fine Alignment,Eutectic Bonding and SMA Actuation,” Transducers'95, Stockholm, Sweden, Jun, 1995, pp368-371.
17. W. H. Chu and M. Mehregany, “Microfabricated Tweezers with a Large Gripping Force and a Large Range of Motion,” Solid-state Sensor and Actuator Workshop., Hilton Head, CA, Jun, 1994, pp 107-110.
18. G. Greitmann and R. A. Buser, “Tactile microgripper for automated handling of microparts,” Sensors and Actuators, A53, pp 410-415, 1996.
19. H. Du, C. Su, M. K. Lim. and W. L. Jin, “A micromachined thermally-driven gripper: a numerical and experimental study,” Smart Mater. Struct., 8, No. 5, pp 616-622, 1999.
20. C. S. Pan and W. Hsu, “An electro-thermally and laterally driven polysilicon microactuator,” J. Micromech. Microeng., 7, pp 7-13, 1997.
21. G. K. Chris and T. H. Roger, “Nickel-Filled Hexsil Thermally Actuated Tweezers,” Transducers’95, Stockholm, Sweden, Jun, 1995, pp 376-379.
22. R.T. Howe, C.G. Keller, “Hexsil tweezers for teleoperated micro-assembly,” Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, Nagoya , Japan, Jan, 1997, pp 72 –77.
23. J. Ok, M. Chu, C. J. Kim, ”Pneumatically driven microcage for micro-objects in biological liquid,” Micro Electro Mechanical Systems, 1999. MEMS '99, Orlando, FL, Jan, 1999, pp 459 –463.
24. S. Bütefisch, V. Seidemann, S. Büttgenbach, “Novel micro-pneumatic actuator for MEMS,” Sensors and Actuators A97-98, pp. 638-645, 2002.
25. V. Seidemann, S. Butefisch, S. Buttgenbach, ”Application and Investigation of In-Plane Compliant SU8-Structures for MEMS,” Transducers’01, Munich, Germany, Jun, 2001, pp 1616-1619.
26. S. Butefisch, V. Seidemann, S. Buttgenbach , “A new Micro Pneumatic Actuator for Micromechanical Systems,” Transducers’01, Munich, Germany, Jun, 2001 pp 722-725, 2001.
27. V. Seidemann, S. Bütefisch, S. Büttgenbach, “Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers,” Sensors and Actuators, A97-98, pp 457-461, 2002.
28. C. Bark,T. Binnenbose,G. Vogele, T. Weisener, M. Widmann, ”Gripping with low viscosity fluids,” Micro Electro Mechanical Systems, Heidelberg, Germany, Jan, 1998, pp 301–305.
29. A. Kochan, “European project develops “ice” gripper for micro-sized components,” Assembly Automation, 17, No. 2, pp 114–115, 1997.
30. M. Brunner, A. Weber,W. Zesch, ”Vacuum tool for handling microobjects with a NanoRobot ,“ Robotics and Automation., 2, pp 1761–1766, 1997.
31. W. H. Juan, K. Najafi, S. Pang, A. Selvakumar, “Vertical comb array microactuators,” Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings , Feb, 1995, pp 43-48.
32. J. A. Yeh, C.Y. Hui, and N. C. Tien, “Electrostatic Model for an Asymmetric Combdrive," Journal of Microelectromechanical Systems (JMEMS), 9, pp 126-135, 2000.
33. R. Legtenberg, A. W. Groeneveld, and M. Elwenspoek, ”Comb-drive actuators for large displacements ,” J. Micromech. Microeng., 6, No. 3, pp 320-329, 1996.
34. V. P. Jaecklin, C. linder, N.F. de Rooij,and J. M. Moret, ”Micromechanical comb actuators with low driving voltage,” J. Micromech. Microeng., 2, No. 4, pp250-255, 1992.
35. R. Bischof, V. P. Jaecklin, C. Linder,J. M. Moret, F. Rudolf, N.F. de Rooij, “Novel polysilicon comb actuators for xy-stages, “ Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings., Travemunde, Germany, Feb , 1992, pp 147–149.
36. P. Jaecklin, C.Linder, and N.F. de Rooij, “Line-addressable torsional micromirrors for light modulator arrays,” Sensors and Actuators, A41-42, 1994.
37. J. Hsieh, W. -J. Chen, and W. Fang, “Toward the Micromachined Vibrating Gyroscope Using (111) Silicon Wafer Process,” SPIE Micromachining and Microfabrication, San Francisco, CA, Oct, 2001, SPIE vol.4557, pp.40-48.
38. 謝哲偉、朱健誠、陳文誌、方維倫, “高深寬比BELST 製程於振動式微陀螺儀之應用” 中國機械工程學會第十八屆全國學術研討會, 台北, 九十年十二月.
39. J. Hsieh, C. -C. Chu, W. -J. Chen, and W. Fang, “Design and Fabrication of (111) SCS Micro Gyroscope”, 第五屆奈米工程及微系統技術研討會, 新竹, 九十年十二月.
40. 朱健誠,”高深寬比BELST製程於垂直靜電驅動微掃瞄面鏡之應用,” 國立清華大學動力機械系碩士論文, 2002.
41. R.S. Fearing, “Survey of sticking effects for micro parts handling,” Intelligent Robots and Systems 95. 'Human Robot Interaction and Cooperative Robots', Proceedings., Pittsburgh, PA, Aug, 1995, 2, pp212-217.
42. D. Ando, F. Arai, T. Fukuda, Y. Nonoda, T. Oota, ”Micro manipulation based on micro physics-strategy based on attractive force reduction and stress measurement,” Intelligent Robots and Systems 95. 'Human Robot Interaction and Cooperative Robots', Proceedings., Pittsburgh, PA, Aug, 1995, 2 , pp 236–241.
43. D. Ando, F. Arai, T. Fukuda, K. Itoigawa, H. Iwata, Y. Nonoda, “Micro endeffector with micro pyramids and integrated piezoresistive force sensor,” Intelligent Robots and Systems '96, IROS 96, Osaka, Japan, Nov, 1996, 2, pp 842-849.
44. D. Ando, F. Arai, T. Fukuda, “Adhesion forces reduction for micro manipulation based on micro physics,” Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings., San Diego, CA, Feb, 1996, pp 354–359.
45. F. Arai, T. Fukuda, Y. Nonoda, T. Oota, “New force measurement and micro grasping method using laser Raman spectrophotometer,” Robotics and Automation, 1996. Proceedings., Minneapolis, MN, Apr, 1996, 3, pp 2220-2225.
46. F. Arai, T. Fukuda, K. Itoigawa, H. Iwata, “Integrated micro endeffector for dexterous micromanipulation,” Micro Machine and Human Science, 1996., Proceedings of the Seventh International Symposium, Nagoya, Japan, Oct, 1996, pp 149-156.