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研究生: 林源祐
Yuan-Yu Lin
論文名稱: 有機共軛高分子發光二極體與SU-8波導整合之積體光學元件研究
Integration of PLED and SU-8 waveguide toward OEIC
指導教授: 洪勝富
Sheng-Fu Horng
孟心飛
Hsin-Fei Meng
口試委員:
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電子工程研究所
Institute of Electronics Engineering
論文出版年: 2005
畢業學年度: 93
語文別: 中文
論文頁數: 61
中文關鍵詞: 有機發光二極體光波導
外文關鍵詞: PLED, SU-8, waveguide
相關次數: 點閱:3下載:0
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  • 有機共軛高分子發光二極體被認為是下一世代的新興顯示技術,然而在發展上應該有多元的應用,因此本論文的目的是,希望於矽基板上將有機發光二極體與光波導整合,製作成積體光學元件能將電光轉換,未來可以應用於晶片間的資料傳輸。
    本論文利用有機共軛高分子發光二極體做為發光源,波導材料則是微機電常見的SU-8厚膜光阻,由於發光二極體正面的發光強度最大,所以只能採用堆疊的方式將發光二極體做在波導的上方,因為二極體所發出的光需要轉九十度的方向才能夠進入波導中,因此我們嘗試以不同方法做測試,希望達到光耦合的要求。
    經過許多的失敗經驗,我們找到一種可行的方法克服光耦合的難題,將二氧化矽顆粒摻雜於波導材料中,利用光散射的原理讓光以大角度散射耦合進入波導結構中,有不錯的導光效果,搭配高亮度的發光二極體,我們完成初步的元件結構。此外,我們做了其他的嘗試,例如:切割45度鏡面與光柵電極等方式,不過由於製程難度比較高,良率不佳。於是我們將主要的研究方向偏重在光散射結構的部分。
    完成初步的光耦合結構之後,我們可以進行接下來的工作,光調變器的製作以及發光波段的調整,相信經過更多的測試,我們的元件能夠更接近實用化的目標,應用於晶片間的資料傳遞。


    Conjugated polymer light-emitting diodes (PLEDs) was considered as the next generation's display technology; Moreover it may find more technological applications. In this thesis, we try to fabricate an OEIC integrating PLED with SU-8 waveguide on silicon substrate. It can be used for chip-to-chip data communication in future.
    We utilize PLED as the light source and SU-8 as waveguide. Top emission of PLED has the maximum luminescence intensity. For this reason, we have to make PLED above waveguide and couple light into the waveguide.
    After many approaches, we found a workable method by doping SiO2 particles in SU-8 as a diffuser sheet. The incident light reach the diffuser sheet and undergo a large angle scattering. And a fair amount of light is directed into the waveguide. We believe our device structure can be further improved and become pratical in future.

    目錄--------------------------------------------------------------------------I 圖目錄----------------------------------------------------------------------------------III 章節 頁數 第一章 序論-----------------------------------------------------------------1 1.1 研究背景----------------------------------------------------------------1 1.1.1 現今發展所面臨的問題--------------------------------------1 1.1.2 有機發光元件發展歷史--------------------------------------3 1.2 研究動機----------------------------------------------------------------4 1.2.1 有待解決問題與研究目的----------------------------------4 1.3 論文架構---------------------------------------------------------------5 第二章 實驗理論---------------------------------------------------------6 2.1 有機發光二極體-----------------------------------------------------6 2.1.1 共軛有機高分子的特性------------------------------------6 2.1.2 有機發光二極體結構---------------------------------------7 2.2 螢光理論--------------------------------------------------------------8 2.2.1 發光原理------------------------------------------------------8 2.3光波導理論-------------------------------------------------------------10 2.3.1光波導基礎理論---------------------------------------------------------11 2.3.2 TE 與TM 模態----------------------------------------------------------13 2.3.3 TE模態數-----------------------------------------------------------------14 2.3.4 TM模態數----------------------------------------------------------------15 2.4 電制吸收光理論---------------------------------------------------------------17 第三章 實驗架構-------------------------------------------------------------------18 3.1 元件結構------------------------------------------------------------------------18 3.2 元件製作------------------------------------------------------------------------20 第四章 結果分析與討論----------------------------------------------------------31 4.1 45度斜面之元件---------------------------------------------------------------31 4.2 光柵電極之元件---------------------------------------------------------------37 4.3 光擴散層之元件-------------------------------------------------------------40 第五章 總結--------------------------------------------------------------------------48 參考文獻------------------------------------------------------------------------------50 APPENDIX----------------------------------------------------------------------------52 後記------------------------------------------------------------------------------------61

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