In this thesis, the modified grating solar cells with porous silicon structure were fabricated by electrochemical etching (ECE). The morphology of the macropores was examined by the SEM analysis. The effects of HNO3 treatment and post oxidation annealing (POA) were investigated. The passivation techniques with TEOS and Al2O3 were also studied. The electrical properties of the modified grating solar cells were characterized through the dark and photo current-voltage (I-V) measurements.
The HNO3 treatment incorporated POA show positive effects on the Jsc improvement. The Jsc can achieve 36 ~ 38 mA/cm2. The devices with sputtered Al2O3 film show a little Voc improvement. By introduced the SiNx hard mask process (SMP), the Voc enhances to 0.54V and 0.58V, the maximal F. F. can reach 0.61 and 0.72 for high – ρ and low – ρ devices, respectively.

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