研究生: |
林素貞 |
---|---|
論文名稱: |
開發增加位移之雙軸致動模組及其應用於光學影像穩定系統 Develop Displacement Enhancement of Dual-axis Actuation Module for Optical Image Stabilization |
指導教授: | 方維倫 |
口試委員: |
吳名清
林弘毅 李昇憲 |
學位類別: |
碩士 Master |
系所名稱: |
工學院 - 動力機械工程學系 Department of Power Mechanical Engineering |
論文出版年: | 2013 |
畢業學年度: | 101 |
語文別: | 中文 |
論文頁數: | 88 |
中文關鍵詞: | 雙軸致動 、磁路設計 、大位移 |
相關次數: | 點閱:2 下載:0 |
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目前由於影像感測器之畫素縮小,手部震動導致影像模糊的情況更為嚴重,因此,影像穩定系統在現今被廣泛的發展。本文透過理論分析,了解元件所需的設計要求及參數,提出了大位移的雙軸致動模組,使之應用於光學影像穩定系統。以電磁致動器為基礎,利用磁路設計的概念使得元件產生線性的大位移輸出。另外,透過沿對角線對稱的磁場以及高剛性彈簧的解耦合能力,實現大位移雙軸致動模組。而製程方面,則是利用微機電技術製作出精密的移動平台,並且考量到後續與光學元件整合的部分,對於元件的載具有所規劃及設計。最後透過實驗量測,了解元件特性。驗證元件具有大位移、大致動力以及雙軸致動的能力。並且,透過與光學透鏡整合,利用雷射光束以及文字影像,了解元件應用光學穩定系統的成效。
[1] S. H. Kim, Y. Yee, J. Choi, H. Kwon, M. H. Ha, C. Oh, and J. U. Bu, “Integrated MEMS optical flying head with lens positioning actuator for small form factor optical data storage,” Sensors and Actuators A: Physical, 114, pp. 429–437, 2004.
[2] S. Hata, Y. Yamada, J. Ichihara, and A. Shimokohbe, “A Micro Lens Actuator for Optical Flying Head,” IEEE MEMS, Las Vegas, 2002, pp. 507-510.
[3] M. Wu and W.Fang, “Development of tracking and focusing micro-actuators for dual-stage optical pick-up head,” Journal of Optics A:Pure and Applied Optics, 8, S323-S329, 2006.
[4] R. R. A. Syms, H. Zou, J. Yao, D. Uttamchandani and J Stagg, “Scalable electrothermal MEMS actuator,” Journal of Micromechanics and Microengineering, 14, pp1633-1639, 2004.
[5] J. B. Chou, K. Yu, D.A. Horsley, S. Mathai, B. Yoxall, M. Tan, S.Y. Wang and M. C. Wu “Electrothermally actuated free space board-to-board optical interconnect with zero power hold,” Transducers’09, Denver, CO, June, 2009, pp2202-2205.
[6] R. C. Gutierrez, T. K. Tang, R. Calvet, and E. R. Fossum, “MEMS digital camera,” in Electronic Imaging, 2007, p. 65020K–65020K-8
[7] “DigitalOptics Corporation.” http://www.doc.com/Pages/home.aspx
[8] “Cambridge Mechatronic.” http://cambridgemechatronics.com/
[9] “OmniVision.” http://www.ovt.com/products/.
[10] “EDN.” http://www.edn.com/file/22408-47280.pdf.
[11] “Nikon.””http://www.nikon.com/
[12] J. C. Chiou, C. C. Hung, and C. Y. Lin, “Design, fabrication and actuation of a MEMS-based image stabilizer for photographic cell phone applications,” Journal of Micromechanics and Microengineering, 20, p.075025, 2010.
[13] H. C. Nathanson, W. E. Newell, R. A. Wickstrom, and J. R. Davis Jr., “The resonant gate transistor,” IEEE Trans. on Electorn Devices, ED-14, pp117,1967.
[14] W. C. Tang, T.-C. H. Nguyen, and R. H. Howe, “Laterally driven polysilicon resonant microstructure,” IEEE MEMS’89, Salt Lake City, UT, Feb., 1989, pp53-59.
[15] L. Gu, X. Li, H. Bao, B. Liu, Y. Wang, M. Liu, Z. Yang, and B. Cheng, “Single-wafer-process nano-positioning micromachining tecnology,” Journal of Micromechanics and Microengineering, 16, pp.1349-1357, 2006.
[16] K. Laszczyk, S. Bargiel, C. Gorecki, J. Krezel, P. Dziuban, M. Kujawinska, D. Callet, and S. Frank, “A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications,” Sensors and Actuators A: Physical, 163, pp.255-265, 2010.
[17] J.B.C Englen, M.A. Labtz, H.E. Routhuizen, L.Abelmann, and M.C. Elwenspoek, “Improved performance of large stroke comb-drive actuators by using a stepped finger shape,” Transducers, Denver, CO, USA, June, 2009
[18] G. Zhou and P. Dowd, “Tilted folded-beam suspension for extending the stable travel range of comb drive actuator,” Journal of Micromechanics and Microengineering, 13, pp.178-183, 2003.
[19] H.N. Kown, J.-H Lee, K. Takahashi, and H. Tishiyoshi, “MicroXY stages with spider-leg actuators for two dimensional optial scanning,” Sensors and Actuators A: Physical, 133-131, pp.468-477, 2006.
[20] W. Riethmuller and W. Benecke, “Thermal excited silicon microactuator,” IEEE Transactions on Electron Device, 35, pp.758-763, 1988
[21] G. Zhou and Philip Dowd, “Fabrication and test of thermal vertical bimorph actuator for movement in the wafer plane,” Journal of Micromechanics and Microengineering, 13, pp.178-183, 2001
[22] J. P. Yang, X. C. Deng and T. C. Chong “An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives,” Journal of Micromechanics and Microengineering, 15, pp.958-965, 2005
[23] H. Guckel, J. Klein, T. Christenson, K. Skrobis, M. Laudon and E. G. Lovell, “Thermo-magnetic metal flexure actuators,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June, 1992, pp73-75.
[24] M. J. Sinclair, “A high force low area MEMS thermal actuator,” Thermal and Thermomechanical Phenomena in Electronic Systems, May, 2000, pp127-131.
[25] L. Que, J.-S Park, and Y. B. Gianchandani, “Bent-beam electrothermal actuators for high force applications, ” IEEE MEMS’99, Orlando, FL, 1999, pp.31-36
[26] W.-C. Chen, C.-C Lee, C.-Y. Wu and W. Fang, “A new latched 2 X 2 optical switch using bi-directional movable electrothermal H-beam actuators,” Sensors and Actuators A: Physical, 123-124, pp.563-569, 2005.
[27] G. K Lau, T. C. Duc, J. F. L. Goosen, P. M. Sarro and F. V. Keulen, “An in-plane thermal unimorph using confined polymer,” Journal of Micromechanics and Microengineering, 17, pp.S174-S183, 2007
[28] L. Que, J.-S Park, and Y. B. Gianchandani, “Bent-beam electrothermal actuators—Part I: single beam and cascaded devices,” Journal of Microelectromechanical Systems, 10, pp247-254, 2001.
[29] Y.-S Choi, Y. Zhang, and D.-W Lee, “A thermal-driven silicon micro xy-stage integrated with piezoresistive sensors for nano-positioning,” Journal of Micromechanics and Microengineering, 22, p.0550022, 2012.
[30] C.-C Lee, W.-C Chen, S.-Y Lee, and W. Fang, “Design and implementation of novel “polymer joint” for thermal actuator currenet and thermal isolation,” IEEE MEMS conference, Wanchai, Hong Kong, Jan., 2010.
[31] L.K. Lagorce, O. Brand and M. G. Allen, “Magnetic microactuators based on polymer magnets,” Journal of Microelectromechanical Systems, 8, pp2-9, 1999.
[32] B. Wagner and W. Benecke, “Microfabricated actuator with moving permanent magnet,” IEEE MEMS conference, Nara, Japan, Jan., 1991.
[33] J. J. Bernstein, W. P. Taylor, J. D. Brazzle, C. J. Corcoran, G. Kirkos, J. E. Odhner, A. Pareek, M. Waelti and M. Zai, “Electromagnetically actuated mirror arrays for use in 3-D switching applications,” Journal of Microelectromechanical Systems, 13, pp526-535, 2004.
[34] K. H. Kim, H. J. Yoon, O. C. Jeong and S. S. Yang, “Fabrication and test of micro electromagnetic actuator,” Sensors and Actuators A: Physical, 117, pp.8-16, 2005.
[35] M. Feldmann and S. Büttgenbach, “Novel microrobts and micromotor using Lorentz force microactuators based on polymer magnets,” IEEE Transactions on Magnetics, 43, pp3891-3895, 2007
[36] A. Cao, J. Kim and L. Lin, “Bi-directional electrothermal electromagnetic actuators,” Journal of Micromechanics and Microengineering, 17, pp.975-982, 2007
[37] J. S. Ko, M. L. Lee, D.-S Lee, C. A. Choi, and Y. T. Kim, “Development and application of a laterally driven electromagnetic microactuator,” Applied Physics Letters, 81, pp.547-549, 2002.
[38] H. Routhuizen, M. Despont, U. Drechsler, G. Genolet, W. Häberle, M. Lutwyche, R. Stutz, and P. Vettiger, “Compact copper/epoxy-based electromagnetic scanner for scanning probe applications,” IEEE MEMS conference, Las Vegas, NV, Jan., 2002.
[39] V. W. Hesterman, R. G. Walmsley, and J. Brandt, “Magnetic micro-mover,” U.S. Patent, No. 5,834,864, 1998.
[40] J. Yun, S. Luanava, and V. Casasanta, “Magnetic actuation for MEMS scanners for retinal scanning displays,” Proc. of SPIE 4985, pp115-120, 2003.
[41] J.-J Choi, H. Park, K. Y. Kim, and J. U. Jeon, “Electromagnetic micro x-y stage for probe-based date stage,” Journal of Semiconductor Technology and Science, 1, pp84-93, 2001.
[42] A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, “Two-axis electromagnetic microscanner for high resolution displays,” Journal of Microelectromechanical Systems, 15, pp786-794, 2006.
[43] R. R. A. Syms, “Optical MEMS in bonded silicon on insulator,” Design Automation and Test in Eupre, p. 007, 2005.
[44] “Largan.” http://www.largan.com.tw/
[45] 郭瑞雄碩士論文, 光學防手振變焦鏡頭設計. 逢甲大學, 2010.
[46] D. Sachs, S. Nasiri, and D. Goehl, InvenSense Whitepaper, 2006.
[47] U. A. Bakshi and M. V. Bakshi , Magnetic Circuits And Transformers, Technical Publications ,2008
[48] D. J. Bell, T. J. Lu, N. A. Fleck, and S. M. Spearing, “MEMS actuators and sensors: observations on theirperformance and selection for purpose,” Journal of Micromechanics and Microengineering, 15, s153-164, 2005
[49] G. K. Fedder, “Simulation of microelectromechanical syste,,” Unvi. of California at Berkeley, 1994.