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研究生: 吳孟穎
Meng-Ying Wu
論文名稱: 低漏電共軛高分子場效電晶體之研製
The fabrication of Poly Field-effect-transistor with low leakage
指導教授: 洪勝富教授
Prof. Sheng-Fu Horng
孟心飛教授
Prof. Hsin-Fei Meng
口試委員:
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電子工程研究所
Institute of Electronics Engineering
論文出版年: 2007
畢業學年度: 95
語文別: 中文
論文頁數: 71
中文關鍵詞: 有機薄膜電晶體P3HT載子遷移率ON/OFF ratio
外文關鍵詞: organic thin film transistor, P3HT, mobility, ON/OFF ratio
相關次數: 點閱:3下載:0
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  • 有機發光二極體因其擁有較快的響應時間、視角更寬廣、低功率消耗和更高對比、高亮度的影像,所以成為現今的熱門研究主題。其中更因其可撓性,使得OLED和PLED的發展越來越受到重視,尤以PLED容易發展大面積尺寸的優點為甚。所以本實驗室的重點即在於應用主動式矩陣驅動PLED,所以提升OTFT的場效載子移動率(mobility),提高元件的響應頻率和降低漏電,提升元件開關比(on/off ratio),延長PLED發光的時間,即為我們努力的方向。

    我們的絕緣層是送長的APCVD/PECVD,我們利用polymer如PMMA (poly(methylmethacrylate))和PVP(Polyvinylphenol)來填補因成長oxide過程中出現的缺陷來降低經由閘極的漏電流。在後段處理方面,我們先利用文獻上的方法,N2 annealing和NH3處理因為P3HT摻雜所引起的漏電流。接著我們探討HMDS和介面對於漏電的影響,分析手套箱的水氧值、光的照射、加熱以及抽真空的與否和漏電的關係,最後利用Passivation(PEGDE/Al)覆蓋主動區的方式來隔絕水氧。我們的最好實驗結果是場效載子移動率在0.1cm2V-1s-1的時候,電流開關比達到了104,使元件更進一步達到應用的需求。


    Organic light-emitting diodes (OLED) possess many advantages, such as faster response time, more broad of the visual angle, lower power consumption, higher contrast ratio and higher brightness. Among them, because of its flexibility, the developments of OLED and PLED are more and more important. The research of our laboratory is that using active matrix drive PLED, so improving the mobility of OTFT and reducing leakage current to improve on/off ratio is studied.

    Our insulator is APCVD/PECVD oxide. We make up the defect which grow up with oxide to reduce the gate leakage current by using polymer like PMMA (poly (methylmethacrylate )) and PVP (Polyvinylphenol ). Then we use N2 annealing and NH3 treatment to deal with the leakage current by P3HT doping. We also discuss the influence of HMDS and interface to the leakage current, and analyze the relationship between leakage current and the water/oxygen value in glove box, lighting, heating and vacuuming. Finally, we cover the active area to prevent water/oxygen by using passivation. Our best result is that sample mobility achieve 0.1cm2V-1s-1 order and the on/off ratio up to 104.

    第一章 序論 1 1.1、研究背景-------------------------------------------------------------------------------------1 1.2、研究動機與方向----------------------------------------------------------------------------1 1.3、論文架構-------------------------------------------------------------------------------------2 第二章 實驗原理 3 2.1、有機薄膜場效電晶體的結構、操作方式和重要參數的計算----------------------3 2.2、P3HT的材料特性---------------------------------------------------------------------------6 2.3、P3HT場效電晶體的特性----------------------------------------------------------------8 第三章 實驗流程 11 3.1、元件結構-----------------------------------------------------------------------------------11 3.2、元件製程-----------------------------------------------------------------------------------11 3.3、元件量測-----------------------------------------------------------------------------------20 第四章 實驗結果與分析 21 4.1、Oxide孔洞的填補-----------------------------------------------------------------------21 4.2、N2 annealing和NH3處理--------------------------------------------------------------35  4.2.1、二極元件------------------------------------------------------------------------------35  4.2.2、FET的測試---------------------------------------------------------------------------38 4.3、降低Id漏電流和介面相關討論--------------------------------------------------------44  4.3.1、HMDS的測試------------------------------------------------------------------------44  4.3.2、介面特性與降低漏電的探討-----------------------------------------------------51  4.3.3、主動區的覆蓋和漏電的討論-----------------------------------------------------57 4.4、後續結果與討論-------------------------------------------------------------------------66 第五章 總結 69 參考文獻----------------------------------------------------------------------------------------70

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