以靜電驅動的反射元件已成為微光機電系統(MEMOS)的研究重點，此元件可應用在適應性控制光學(adaptive optics)及焦距的調變。本論文以表面微型加工的方式來製作以多層材料為鏡面之微細聚焦調變器。並利用靜電驅動來改變鏡面之變形，達到改變焦距的目的。而本文可分為分為模擬分析及實作量測兩方面。
在模擬分析方面，除了以板殼理論分析結構變形與熱應力及施加電壓的關係外，並以套裝模擬軟體“IntelliSuite”針對不同的製程參數及設計變數來預測因製程條件和施加電壓所導致的變形。同時也以田口式法則(Taguchi method)進行穩健型分析以達到需求。這些模擬分析結果均可提供設計此元件參數和規劃元件製程條件的依據。

在實作方面，則製作出500微米的扇形鏡面結構，並於量測後得知其曲率半徑約為400微米。

Micro-Electro-Mecha-Optical system, aiming at optical applications in MEMS, uses deformable mirrors to conduct adaptive optics devices and to change the focal length of the mirror. This thesis designed multi-layer deformable micromirrors with electrostatic actuation to adjust the focal length based on surface micromachining. The content of this thesis can be separated into two parts: analysis and fabrication.
In analysis, plate and shell theories are used to obtain the relations among deformation, thermal stress, and applied voltage. A series of simulations, by using IntelliSuite, are performed to investigate the process- and voltage-induced deformation under various parameters for a focusing micro-mirror. Robust designs are obtained by using Taguchi method. The aim of simulations is to provide the characteristics of variables for the device, which may help the designers for choosing better parameters when fabricated.

In fabrication, sectored structures with 500 um diameters are fabricated successfully. Curvature radius is measured which is about 400 um.

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