隨著科技的進步，硬脆材料逐漸被廣泛的應用在各個高科技領域，不論何種加工，都會令材料產生殘留應力，對硬脆材料而言，殘留應力的去除為一重要課題。延性材料的殘留應力生成原理已是發展相當成熟的理論，但對於硬脆材料的殘留應力產生機制尚有許多值得探討的問題。故於本論文中，以石英玻璃之切割與磨削為切入點，利用光彈法作為殘留應力檢測之工具，分析石英玻璃在加工過程中不同加工參數造成的殘留應力深度與大小，並結合石英玻璃切屑分析與加工表面形貌的觀察，建立石英玻璃磨削加工參數與殘留應力之間的關係。

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