半導體產業中機台設備的採購需要耗費龐大的資本，因此半導體廠商在採購新機台設備時面臨重大的投資決策。為了滿足顧客的需求，廠商必須進一步擴充產能添購機台設備。由於技術與產品快速的變化，要有效率地採購機台設備實在是件艱鉅的任務。本研究主要針對半導體產業機台設備管理問題，透過不同機台、產能限制進行產能擴充計畫。在考慮需求不確定環境下，加入COO成本模式作為單位生產成本、並考量產能不足成本與產能過剩成本，在多期數的條件下建立一套機台設備投資計畫。最後，我們針對產品種類、預算分配方式及需求的機率進行實驗，藉以觀察參數對於模式績效的影響。

In the semiconductor industry, machine tools purchases require an enormous amount of capital, which is approximate 60-70% of initial fab expenses for machine tools. Therefore the semiconductor manufacturing companies are faced on important capital investment decisions for the procurement of new types of machine tools for their facilities. In order to meet the forecast demand, the manufacturer may need to procure additional machine tools. In fact, it is a challenging task to procure machine tools efficiently because of rapid changes in technology and products. The thesis focuses on a machine tool management problem of semiconductor industry to determine tool planning using multiple types of machine tools producing various products. We will take into consideration the COO model as a unit cost, the capacity shortages, and capacity overflows simultaneously. In order to present investment decisions on procuring new machine tools and to examine the problem over multiple time periods within a single wafer facility, we analyze the tool capacity planning problem under uncertainty in demand and formulate the problem as a mixed integer problem to minimize the expected capacity shortage costs, capacity overflow costs, and production costs. Finally, we study the performance during different time periods to discuss different situation.

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