隨著工業科技的日新月異，所有的高效能的產品愈來愈微小且細
緻化。不論是硬碟機或是晶圓，都為求可以在有限的大小融入更多的
微製程在內。因此若能減少振動的產生，降低對振動對微結構影響，
將可以使得此類的產品有夠出眾的競爭力。由於硬碟機儲存資料的磁
軌將愈來愈微小化，故本論文研究主要是為了因應未來的硬碟機有更
穩定的讀寫，提升硬碟機在高速旋轉下有更好的存取表現，因此設計
振動抑制片來提升硬碟機碟片在高轉速下的阻尼表現。
本論文利用雷射都卜勒測振儀以及衝擊鎚來量取高轉速硬碟機
碟片的頻率響應，由不同的振動抑制片作為參數裝置，並將此振動抑
制片架設於碟片外緣的上下兩測，使高轉速硬碟機旋轉時產生高速氣
流，利用這樣的設計方式將氣流困住在此區間內，並造成空氣阻尼之
效應。為了能夠明確的知道碟片的共振頻率，此論文將從碟片最初始
的方式來找出相對應的共振模態，最後分別針對 (0,0)Mode、
(0,2)Mode、(0,3)Mode 來個別探討此設計對於這些模態造成的阻尼上
升量；而振動抑制片主要設計成三種角度，分別為 60 度、90 度、180
度，且在每個角度下有三種間距 (碟片至振動抑制片的距離)，分別
為 0.35mm、0.75mm、1mm，並搭配不同的轉速來量測碟片外圍的頻
率響應，從中比較(0,0)、(0,2)B、(0,2)F、(0,3)B、(0,3)F 在不同角度
與不同間距下的阻尼增加量，其中在 180 度與 0.35mm 的條件下有較
優異表現。
利用振動抑制片作減振的結果也意外的發現在碟片隨轉速往低
頻偏移的模態(Backward)，其阻尼比的增加量明顯的優於碟片隨轉速
往高頻偏移的模態(Forward)。此論文的發現在高精密硬碟機中的減振
有重大的影響性，其研究結果也可適用在光碟機與半導體中的晶圓工
業。

As engineering technologies advance, components of all high performance
products have been miniaturized and meticulous. In order to store more data and
place more components, significant efforts have been put into ensuring accuracy of
data accessing operations and micro-fabrication processes in disk drive and
semiconductor industries, respectively. Among all the key engineering factors, it
was found that reduction of disk vibrations can help achieve the aforementioned goal
as well as to improve product yield and competition in the market. As the present
trend in disk drive industry is to pack more data track in disk’s radial direction and
more data bits along disk’s circumferential direction in the same, smaller, and thinner
disk space, to assure reliability and accuracy of reading and writing data from the disk
at high rotating speed, dampening vibration response of the spinning disk is thought to
be the key challenge an is the primary research focus of this thesis.
In this research, parameter studies of several pair of stationary sector plates that
sandwich the spinning annular disk were designed and validated through experimental
measurements and numerical finite element studies. Reduction of the disk’s
self-induced vibrations was characterized by the damping ratios of the disk natural
modes observed in its response transfer functions made by Laser Doppler Vibrometer
(LDV) and an impact hammer.
Parameters being investigated by this research include the distance between the
disk and the sector plates (0.35 mm, 0.75 mm, and 1.00 mm), span angle (60
o
, 90
o
,
180
o
) of the sector plates, and rotating speed (0 rpm to 14000 rpm) of the annular disk.
The damping ratio was analyzed for disk’s (0,0) Mode, (0,2) Mode and (0,3) Mode
individually. From this research, significant increase of the damping ratio was
observed for disk’s (0,0), (0,2)B, (0,2)F, (0,3)B, (0,3)F Modes with 180
o
sector plates
placed 0.35mm both sides from the disk surface. It was also observed that the
damping ratio increases with increasing spin speed of the disk. Last but not the least,
the disk’s backward “B” nodal diameter modes were observed to render much higher
damping with the designed sector plates than the corresponding forward “F” mode
pairs.
The new findings made by this thesis have significant engineering implications
in vibration reduction applications in high precision disk drives, optical drives as well
as wafers in semiconductor industries.

87

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