簡易檢索 / 詳目顯示

研究生: 施冠岐
Kuan-Chi Shih
論文名稱: 使用電磁場模擬軟體分析奈米電阻來協助寄生效應測式以及單晶片設計
Electromagnetic Field Simulation Software Based Nanometer Resistance Analysis for Supporting Parametric Testing and SoC Designs
指導教授: 張克正
Keh-Jeng Chang
口試委員:
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 資訊工程學系
Computer Science
論文出版年: 2006
畢業學年度: 95
語文別: 英文
論文頁數: 83
中文關鍵詞: 場解算器電導矩陣金屬互連電阻低頻平面電阻轉角電阻基板電阻凹槽金屬電阻凡得夢方程式電阻查表表格
外文關鍵詞: field solver, conductance matrix, interconnect resistance, DC plane resistance, corner square resistance, substrate resistance, slotted Metal resistance, Van Der Pauw method, resistance look- up table
相關次數: 點閱:3下載:0
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 近來由於超大型積體電路(Very Large Scale Integrated Circuits, VLSI)的崛起,以及製程技術的進步,使得高效能以及低體積的晶片成為未來的趨勢。電阻存在於各種不同形式的電路,尤其在高效能低體積的晶片裡,電阻問題將會比以往更為嚴重。舉例來說,電源電壓降(IR drop),阻容延遲(RC delay)以及基板共擾(substrate coupling)等問題,會隨著製程技術下探而越來越嚴重。為了估計這些電阻問題的電阻值,我們可以配合公式,測量以及軟體來得到電阻值。使用軟體模擬相較於測量以及軟體來說,它的應用範圍廣泛(一個公式只能適用於一個電阻問題),成本也低廉(為了測量晶片上的電阻值,將一片晶圓實做出來至少需要三千萬台幣)。所以為了確保得到精確的電阻值,正確地使用電磁場模擬軟體來模擬這些電阻問題是有必要的。
    在這篇論文中,我們將介紹Raphael,一套可以用來計算電阻值的電磁場模擬軟體。我們將會介紹Raphael的基本功能,以及它的輸出:電導矩陣(conductance matrix),為了驗證Raphael的正確性以及應用的廣泛性,我們將會舉出幾個常見的電阻問題以及描述Raphael如何應用在這些電阻問題上;我們也使用了一些電阻公式以及公認電阻值來驗證Raphael的正確性。
    當Raphael應用於大型電路的設計,有可能會發生計算太慢的問題。為了解決這個問題,我們先為一個電阻問題建立了電阻表格(resistance table)並且在查表時,使用內插法來推算其大略的值。使用這個方法,可以快速的查到需要的電阻值並且不失其正確性。最後介紹本篇論文尚未詳述,未來有發展性的研究方向。


    Due to the semiconductor technology progresses, the process technology improves from .18μm to 90nm, even 65nm. So making high-performance and low-volume chip is a trend. Resistance problems exists in every circuit, especially in high-performance low-volume chip, resistance problems will be even serious than before, such as RC delay, IR drop or substrate coupling. In order to estimate these resistance problem efficient and accurately, software simulation before taping out is necessary.
    In this thesis we will introduce a field solver called Raphael to help us about the resistance extraction. We will explain the basic knowledge about Raphael and conductance matrix, then show the correctness of Raphael and its application on resistance problems to help IC design. Finally, we will show a way to enhance the speed of resistance extraction in large circuit design.

    Abstract...................................................I 中文摘要..................................................II Contents.................................................III List of Figures...........................................IV List of Tables............................................VI Chapter 1 Introduction.....................................1 Chapter 2 The Physical Basis of Resistance.................4 2.1 The Concept of Resistance..............................4 2.2 Resistivity............................................4 2.3 Resistance Extraction Method...........................6 Chapter 3 Raphael Usage and Examples......................12 3.1 Introduction to Raphael...............................12 3.2 How does Raphael Solve a Resistance Problem...........13 3.3 Verification of Conductance Matrix in Raphael.........18 Chapter 4 Applications to Raphael.........................24 4.1 Interconnect Resistance Problem.......................24 4.2 DC Plane Resistance Problem...........................28 4.3 Corner Square Resistance Problem.....................35 4.4 Substrate Resistance Problem..........................42 4.5 Slotted Metal Resistance Problem......................49 4.6 Van Der Pauw Method...................................54 Chapter 5 Resistance Calculating Automation...............58 5.1 Resistance Calculation Diagram........................58 5.2 Application of Resistance Calculation Diagram.........61 Chapter 6 Conclusion and Future Work......................64 Appendix A Investigation of Substrate Resistance Paper....66 References................................................82

    [1] T. Smedes, N.P. van der Meijs and A.J. van Genderen. Extraction of Circuit Models for Substrate Cross-talk, Computer-Aided Design, 1995. ICCAD-95. Digest of Technical Papers., 1995 IEEE/ACM International Conference on 5-9 Nov. 1995 Page(s):199 - 206
    [2] Nishath K. Verghese. Verification Techniques for Substrate Coupling and Their Application to Mixed-Signal IC Design, Solid-State Circuits, IEEE Journal of, Vol. 36, NO. 3, page 539-549, 2001
    [3] E. Schrik and N.P. van der Meijs. Combined BEM/FEM substrate resistance modeling. Design Automation Conference, 2002 Proceedings. 39th. page(s): 771- 776, 2002
    [4] E. Schrik and N.P. van der Meijs Combined BEM/FEM vs. 3DFEM Substrate Resistance Modeling, ProRISC 2004, Proceedings of the program for research on integrated systems and circuits, Veldhoven, The Netherlands, November 25 - 26, 2004, Technology Foundation STW, Utrecht, 2004, p. 435-441
    [5]Xiren Wang, Wenjian Yu, Zevi Wang. Boundary Element Method for Substrate Resistance Calculation, Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th
    [6] A.J. van Genderen, N.P. van der Meijs and T. Smedes Fast Computation of Substrate Resistances in Large Circuits, European Design and Test Conference, 1996. ED&TC 96. Proceedings, page 560-565
    [7] Anil Samavedam, Aline Sadate, Kartikeya Mayaram, Terri S. Fiez A Scalable Substrate Noise Coupling Model for Design of Mixed-Signal IC’s IEEE Journal of Solid-State Circuits, Vol. 35, NO. 6, June 2000
    [8]Dicle Ozis, Karti Mayaram, and Terri Fiez. An Efficient Modeling Approach for Substrate Noise Coupling Analysis, Circuits and Systems, 2002. ISCAS 2002. IEEE International Symposium on, V-237- V-240 vol.5
    [9]Dicle Ozis, Terri Fiez, and Karti Mayaram. A Comprehensive Geometry-Dependent Macromodel for Substrate Noise Coupling in Heavily Doped CMOS Processes, Custom Integrated Circuits Conference, 2002. Proceedings of the IEEE 2002, page 497- 500
    [10] Simon Kristiansson, Shiva P. Kagganti, Tony Ewert, Fredrik Ingvarson, Jorgen Olsson and Kjell O. Jeppson Substrate Resistance Modeling for Noise Coupling Analysis, Microelectronic Test Structures, 2003. International Conference on, page 124- 129

    無法下載圖示 全文公開日期 本全文未授權公開 (校內網路)
    全文公開日期 本全文未授權公開 (校外網路)

    QR CODE