應用於週期孔洞製作之奈米壓印模具製備探討

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研究生：	劉韋萍
論文名稱：	應用於週期孔洞製作之奈米壓印模具製備探討 Mold Fabrication in Nanoimprint Technology for Application in Periodical Column Structure
指導教授：	趙煦
口試委員:	陳至信陳淮義
學位類別：	碩士 Master
系所名稱：	電機資訊學院 - 光電工程研究所 Institute of Photonics Technologies
論文出版年：	2012
畢業學年度：	100
語文別：	中文
論文頁數：	68
中文關鍵詞：	奈米壓印技術、藍寶石、電子束直寫系統、脫模劑
相關次數：	點閱：2 下載：0
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本論文試著利用奈米壓印技術(Nanoimprint Technology)，在藍寶石(Sapphire)基板上壓印出晶格排列的圖案，針對熱壓式奈米壓印技術中模具的製作過程，以及實際奈米壓印的結果加以探討。我們使用國家奈米元件實驗室(National Nano Device Laboratories)的設施，先以L-edit軟體將尺寸、形狀繪製好，再利用Leica E-beam電子束直寫系統曝光匯出圖案，進而使用變壓器耦合型電漿(Transformer Coupled plasma)蝕刻樣本，並利用數值統計分析其曝光與蝕刻結果，最後再將模具清洗鍍上一層脫模劑後隨即完成模具製備。接著討論壓印後的結果並調整製程參數如：時間、壓力與溫度，最後檢討模具與實驗中的各項缺失。

摘要 ......................................................................................................... I
致謝 ........................................................................................................ II
目錄 ...................................................................................................... IV
圖目錄 .................................................................................................. VI
表目錄 .................................................................................................. IX
第一章緒論 ............................................................................................. 1
1.1 前言 .............................................................................................................. 1
1.2 研究動機與方向 .......................................................................................... 5
1.3 論文架構 ...................................................................................................... 6
第二章 實驗原理 ................................................................................... 7
2.1 奈米壓印技術介紹 ....................................................................................... 7
2.1.1熱壓式奈米壓印 ..................................................................................... 8
2.1.2步進光感式奈米壓印 ........................................................................... 10
2.1.3可撓性奈米壓印 .................................................................................... 11
2.1.4雷射成形式奈米壓印 ........................................................................... 12
2.2 乾式蝕刻 .................................................................................................... 13
2.3 掃描式電子顯微鏡 ..................................................................................... 17
第三章 實驗方法 ................................................................................. 20
3.1 實驗步驟流程 ............................................................................................ 20
3.2 模具的製作 ................................................................................................ 21
3.2.1檢查圖案的外觀 ................................................................................... 21
3.2.2蝕刻 ...................................................................................................... 36
3.2.3蒸鍍脫模劑 ........................................................................................... 42
3.3 奈米壓印製程 ............................................................................................ 45
第四章 實驗結果 ................................................................................. 53
V
4.1 結果討論 .................................................................................................... 53
第五章 結論 ......................................................................................... 65
參考文獻 ............................................................................................... 67

                                

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