利用網印及化學蝕刻方式製作射極鈍化背面局部擴散之單晶矽太陽能電池研究

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研究生：	吳皇都 Wu, Huang-Tu
論文名稱：	利用網印及化學蝕刻方式製作射極鈍化背面局部擴散之單晶矽太陽能電池研究 Using Screen Printing and Chemical Etching to Produce Mono-crystalline PERL Solar Cells
指導教授：	王立康 Wang, Li-Karn
口試委員:	張正陽 Chang, Jenq-Yang 何文章 Ho, Wen-Jeng
學位類別：	碩士 Master
系所名稱：	電機資訊學院 - 光電工程研究所 Institute of Photonics Technologies
論文出版年：	2012
畢業學年度：	100
語文別：	中文
論文頁數：	74
中文關鍵詞：	太陽能電池
外文關鍵詞：	solar cell
相關次數：	點閱：2 下載：0
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因為solar grade的單晶矽品質較差，矽塊材本身的缺陷會比較多，所以我們在矽晶片表面利用PECVD沉積氫化非晶矽薄膜(a-si:H)，並用真空退火爐做285℃到400℃的退火動作來修補表面斷鍵進行鈍化(passivation)處理。利用FTIR和QSSPC分別量測比較有無氫化非晶矽薄膜的氫含量和少數載子生命周期，且不同的退火溫度對少數載子生命周期的影響。
由於我們的結構是射極鈍化背面局部擴散太陽電池，所以背面會用PECVD沉積一層厚度約100nm的氮化矽做保護跟絕緣用，接著使用網印蝕刻膠的方式做背面電極圖形的開口，此種方法會比黃光微影定義圖形的方式所需的時間及成本來的低，較適合應用在業界量產的模式。
實驗結果顯示局部的背面電場載子收集率會比全面的背面電場高，而經過鈍化處理的電池表面缺陷較少，進而提高短路電流(Jsc)及效率。

致謝…………………………………………………………Ⅰ
摘要…………………………………………………………Ⅱ
目錄…………………………………………………………Ⅲ
圖目錄………………………………………………………Ⅴ
表目錄………………………………………………………Ⅹ
第一章 序論    ……………………………………………………………………1
1.1 研究動機……………………………………………………………….1
1.2 文獻回顧……………………………………………………………….2
1.3 研究構想與實驗架構………………………………………………….3
1.4 論文大綱……………………………………………………………….5
第二章 基本原理...............................................................................................6
        2.1 太陽能電池基本原理.............................................................................6
            2.1-1 施子與受子..................................................................................6
            2.1-2 太陽能電池發電原理..................................................................7
            2.1-3太陽光譜.......................................................................................8
            2.1-4載子復合.....................................................................................10
        2.2太陽能電池等效電路............................................................................15
            2.2-1 理想太陽能電池等效電路........................................................15
            2.2-2 考慮電阻的太陽能電池等效電路............................................16
        2.3太陽能電池的特性與效率....................................................................20
            2.3-1太陽能電池基本參數.................................................................20
            2.3-2其他參數.....................................................................................22
        2.4太陽能電池的效率損失........................................................................23
            2.4-1短路電流損失.............................................................................23
            2.4-2開路電壓損失.............................................................................23
            2.4-3填滿因子損失.............................................................................23
        2.5背面電場................................................................................................24
第三章 實驗方法與流程.............................................................................25
        3.1實驗設計................................................................................................25
        3.2實驗流程................................................................................................26
            3.2-1標準片之流程.............................................................................26
            3.2-2 結構片之流程............................................................................27
        3.3實驗步驟................................................................................................28
第四章 實驗結果與討論.............................................................................39
        4.1 無PERL結構.......................................................................................39
            4.1-1 全面BSF....................................................................................39
            4.1-2 抗反射層的厚度討論................................................................40
            4.1-3 正面銀電極線寬的討論............................................................44
            4.1-4 無PERL結構太陽能電池之效率.............................................46
        4.2 具PERL結構之太陽能電池................................................................50
4.2-1 局部BSF....................................................................................50
4.2-2 鈍化層與背面SiN保護層的討論............................................53
4.2-3 BES paste蝕刻溝寬的討論........................................................58
4.2-4 具PERL結構太陽能電池之效率.............................................60
第五章 結論........................................................................................................65

                                

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